• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.347-348
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• 2013

To obtain high conversion efficiency in InGaN-based solar cells, it is critical to grow high indium (In) composed InGaN layer for increasing sun light absorption wavelength rage. At present, most InGaN-based solar cells adopt InGaN/GaN multi-quantum-well (MQW) structure for high crystalline quality of InGaN with high In composition. In this study, we fabricated and compared the performances of two types of InGaN/GaN MQW solar cells which have the 15% (SC 15) and 25% (SC 25) of In composition at quantum well layer. Although both devices showed similar dark current density and leakage current, SC 15 showed better performance under AM 1.5G illumination as shown in Fig. 1. It is interesting to note that SC 25 showed severe current density decrease as increasing voltages. As a result, it lowered short circuit current density and fill factor of the device. However, SC 15 showed steady current density and over 75 % of fill factor. To investigate these differencesmore clearly, we analyzed their photoluminescence (PL) spectra under various applied voltages as shown in Fig. 2. At the same time, photocurrent, which was generated by PL excitation, was also measured as shown in Fig. 3. Further, we investigated the relationship between piezoelectric field and performance of InGaN based solar cell varying indium composition.

• 대한전자공학회논문지SD
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• 제39권4호
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• pp.41-54
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• 2002

본 논문에서는 등가회로를 이용하여 브래그 반사층형 FBAR (Film Bulk Acoustic Wave Resonator) 와 membrane 형 FBAR 그리고 상 하부 전극이 공기와 접하는 이상적인 FBAR 의 특성을 서로 비교함으로서 브래그 반사층과 membrane 이 공진 특성에 미치는 영향을 분석하였다. 압전층으로는 ZnO, membrane 층과 낮은 음향적인 임피던스 반사층은 SiO₂, 높은 음향적인 임피던스 반사층으로는 W, 전극층으로는 Al를 가정하였고 각 층은 탄성파 전달 손실을 가정하였다. 1-port 의 등가회로를 ABCD 파라미터를 추출할 수 있는 단순화된 등가회로로 변환하여 ABCD 파라미터를 추출하여 입력임피던스를 계산하였다. 필터 설계에서는 구하여진 파라미터를 산란행렬로 변환하여 필터의 대역폭 및 삽입손실을 구하였다. 전극층, 반사층, membrane 층의 두께 변화에 의한 공진주파수의 변화는 membrane 층과 전극 바로 아래의 반사층의 두께 변화가 가장 큰 영향을 미친다는 결과를 확인하였다. 반사층 구조에서 반사층수에 따른 공진특성과 K/sub eff/와 electrical Q 의 변화에서는 반사층수가 K/sub eff/ 에는 거의 영향을 미치지 않지만 electrical Q 는 층수가 증가할수록 증가하다가 7층 이상에서 포화되었다. 또한 FBAR의 electrical Q 는 membrane 층과 반사층의 mechanical Q 에 의존함을 알 수 있었다. Ladder 필터와 SCF(Stacked Crystal Filters) 모두 공진기의 수가 증가할수록 삽입손실과 out-of-band rejection 이 증가하였고 층수가 증가할수록 삽입손실은 감소하지만 대역폭에는 거의 변화가 없었다. membrane형의 ladder 필터와 SCF 는 불효 공진 특성으로 인한 불효응답특성이 나타났다. 또한 ladder 필터는 보다 우수한 대역폭의 skirt-selectivity 특성을 나타내었으며 SCF 는 대역폭의 삽입손실 측면에서 더 우수하였다.

• Journal of Mechanical Science and Technology
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• 제20권1호
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• pp.76-84
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• 2006

Arrayed ultrasonic sensors based on the piezoelectric thin film (lead-zirconate-titanate: Pb($Zr_{0.52}Ti_{0.48})O_{3}$) having composite membrane structure are fabricated. Different thermal and elastic characteristics of each layer generate the residual stress during the high temperature deposition processes, accomplished diaphragm is consequently bowing. We present the membrane deflection effects originated from the residual stress on the resonant frequencies of the sensor chips. The resonant frequencies ($f_r$) measured of each sensor structures are located in the range of $87.6{\sim}111\;kHz$, these are larger $30{\sim}40\;kHz$ than the resultant frequencies of FEM. The primary factors of $f_r$ deviations from the ideal FEM results are the membrane deflections, and the influence of stiffness variations are not so large on that. Membrane deflections have the effect of total thickness increase which sensitively change the $f_r$ to the positive direction. Stress generations of the membrane are also numerically predicted for considering the effect of stiffness variations on the $f_r$.

• 대한전자공학회논문지TC
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• 제40권3호
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• pp.10-17
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• 2003

본 논문에서는 유전자 알고리즘을 이용한 박막 체적 공진기 대역통과 여파기 설계기법을 제안하였다. 기존의 BVD등가모델을 이용한 여파기 설계기법은 공진 모드에서의 공진기의 임피던스 특성을 몇 개의 집중 소자로 근사함으로써 생기는 오차를 포함하고 있다. 본 논문에서는 공진기의 전기적 임피던스 특성식 자체를 이용한 최적화 FBAR여파기 설계기법을 제안하였다. 유전자 알고리즘을 적용하여 설계기준을 만족하도록 공진기의 두께 및 면적을 최적화하였다. 첫 번째 유전자 알고리즘은 사다리형 여파기의 직렬/병렬 공진기의 직렬/병렬 공진 주파수가 통과대역의 중심주파수와 일치하도록 각 공진기의 압전 물질 두께를 최적화하였다. 두 번째 유전자 알고리즘은 설계하고자하는 대역통과 여파기 특성을 만족시키기 위한 각 공진기의 면적을 최적화하였다. 제안된 방법을 이용하여 설계된 US-PCS 수신 대역통과 여파기는 기존의 방법 및 BVD모델을 이용한 설계결과와 비교하여 우수한 응답특성을 나타내었다.

• 한국음향학회지
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• 제23권1호
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• pp.1-7
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• 2004

본 연구에서는 항원-항체 결합반응을 통해 액상의 단백질 분자를 감지할 수 있는 SH형 SAW센서를 개발하였다. 측정하고자 하는 항원으로는 anti-Human-immune-globulin (anti-HigG) 단백질을, 이에 대응하는 항체로는 HigG를 채택하였다. 압전 단결정 LiTaO₃를 사용하여 100 MHz로 발진되는 센서를 제작하고, 센서의 지연선 위에 Ti/Au층을 증착하였다. 증착된 Au층 위에 SAM (self assembled monolayer)을 형성시켜서 추가되는 항원의 농도에 의한 센서의 주파수 변화를 측정하였다. 개발된 센서의 최소검출단위는 노이즈 레벨 400 Hz 이하 값에 10.8 ng/ml/Hz의 민감도를 가지며, anti-HigG 항원의 질량하중 효과에 대해 안정적인 반응을 보였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2009년도 제40회 하계학술대회
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• pp.1545_1546
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• 2009

This paper reports a novel wireless love-wave biosensor on $41^{\circ}$ YX $LiNbO_3$ piezoelectric substrate and $SiO_2$ guiding layer for Immunoglobulin G (IgG) detection by protein binding. Different from the traditional biosensors based on surface acoustic wave (SAW) oscillator structured by delay line/resonators, a 440MHz reflective delay line consists of SPUDTs and three reflectors placed on $41^{\circ}$ YX $LiNbO_3$ in a row was fabricated as the sensor element. Good linearity, reproducibility, and high sensitivity were observed in the IgG concentration range 1~65nM. Unique advantages as high sensitivity, passive and simple measurement system are present over currently available other biosensors.

• 전기학회논문지
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• 제56권5호
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• pp.915-920
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• 2007

AIN-based film bulk acoustic resonator (FBAR) devices which adopt a membrane-type configuration such as Mo/AIN/bottom-metal/Si are fabricated by employing a novel process. The proposed resonator structure does not require any supporting layer above the substrate, which leads to the reduction in energy loss of the resonators. For all the FBAR devices, the frequency response characteristics are measured and the device parameters, such as return loss and input impedance, are extracted from the frequency responses, and analyzed in terms of the various metals such as Al. Cu, Mo, W used in the bottom-electrode. The mass-loading effect caused by the used bottom-electrode metals is found to be the main reason for the difference revealed in the measured characteristics of the fabricated FBAH devices. The results obtained in this study also show that the degree of match in lattice constant and thermal expansion coefficient hetween piezoelectric layers and electrode metals is crucial to determine the device performance of FEAR.

• International Journal of Aeronautical and Space Sciences
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• 제12권1호
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• pp.69-77
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• 2011

A peristaltic micropump with lightweight piezo-composite actuator (LIPCA) membrane valves is presented. The micropump contained three cylinder chambers that were connected by microchannels and two active membrane valves. A circular miniature LIPCA was developed and manufactured to be used as actuating diaphragms. The LIPCA diaphragm acted as an active membrane valve that alternate between open and closed positions at the inlet and outlet in order to produce high pumping pressure. In this LIPCA, a lead zirconium titanate ceramic with a thickness of 0.1 mm was used as an active layer. The results confirmed that the actuator produced a large out-of-plane deflection. During the design process, a coupled field analysis was conducted in order to predict the actuating behavior of the LIPCA diaphragm; the behavior of the actuator was investigated from both a theoretical and experimental perspective. The active membrane valve concept was introduced as a means for increasing pumping pressure, and microelectromechanical system techniques were used to fabricate the peristaltic micropump. The pumping performance was analyzed experimentally in terms of the flow rate, pumping pressure and power consumption.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 추계학술대회 논문집
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• pp.109-112
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• 1998

SAW filters of transversal type were fabricated on some piezoelectric substrate of the LN 128 $^{\circ}$ Y-X waters through the simulation in which the number of IDT and window function were changed for the required frequency, and the mask making. Their IDT spacing and width were 1.63$\mu\textrm{m}$, 1.239$\mu\textrm{m}$, respectively. Titanium thin films having different thicknesses were introduced between the Al electrode and the substrate for improving the power resistance strength due to its high temperature durability and good adhesion characteristics. All of specimens showed similar insertion loss results, which means the possibility of introducing the Ti layer though it is known to have a higher resistivity leading to a worse insertion loss result. Ti inserted specimens had a better power durability than that of pure Al electrode though their thickness had no effect on the performance.

• Advanced Composite Materials
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• 제18권2호
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• pp.153-166
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• 2009

A matrix method for evaluating effective electro-magneto-thermo-elastic properties of a generally anisotropic multilayered composite is presented. Physical variables are categorized into two groups: one that satisfies the continuity across the interface between layers and another that satisfies an average inter-layer compatibility (which is also exact). The coupled electro-magneto-thermo-elastic constitutive equation is accordingly reassembled into submatrices, which leads to the derivation of concise and exact matrix expressions for effective properties of a multilayered composite having the coupled physical effects. Comparing the results for a purely elastic multiplayer with those from other theoretical approaches validates the developed method. Examples are given for a PZT-graphite/epoxy composite and a $BaTiO_3-CoFe_2O_4$ multiplayer which exhibit piezo-thermoelastic and magnetoelectric properties, respectively. The result shows how a strong magnetoelectric effect can be achieved by combining piezoelectric and piezomagnetic materials in a multilayered structure. The magnetoelectric coefficient of the $BaTiO_3-CoFe_2O_4$ multiplayer is compared with those for fibrous and particulate composites fabricated with the same constituents.