• Journal of the Korea Academia-Industrial cooperation Society
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• v.13 no.8
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• pp.3735-3740
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• 2012

In this paper, the performance of power generation for the energy harvesting block with a combination of piezoelectric technology and electromagnetic technology among various energy harvesting technologies was investigated. The goal of this study is to evaluate on the applicability of our developed energy harvesting block into the field of urban & housing. First, we carried out a finite element vibration analysis and evaluated the performance of power generation for the multi-layer energy harvester at laboratory scale. Second, we described the features of our developed prototype module that includes amplification technologies to improve power density per module and evaluated the performance of power generation for the energy harvesting block in a variety of ways. Finally, we suggested the direction for the improvement of the energy harvesting block module.

• Advances in aircraft and spacecraft science
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• v.8 no.1
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• pp.17-30
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• 2021

This is an investigation for a more electric regional aircraft, considering the ATR 72 aircraft as an example and the electrification of its four double slotted flaps, which were estimated to require an energy of 540 Wh for takeoff and 1780 Wh for landing, with a maximum power requirement of 35.6 kW during landing. An analysis and evaluation of three energy harvesting systems has been carried out, which led to the recommendation of a combination of a piezoelectric and a thermoelectric harvesting system providing 65% and 17%, respectively, of the required energy for the actuators of the four flaps. The remaining energy may be provided by a solar energy harvesting photovoltaic system, which was calculated to have a maximum capacity of 12.8 kWh at maximum solar irradiance. It was estimated that a supercapacitor of 232 kg could provide the energy storage and power required for the four flaps, which proved to be 59% of the required weight of a lithium iron phosphate (LFP) battery while the supercapacitor also constitutes a safer option.

• Advances in nano research
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• v.14 no.5
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• pp.409-419
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• 2023

Tracking the motion of tennis balls is a challenging task in using cameras around the tennis court. The most important instance of the tennis trajectory is the time of impact and touch the court which in some cases could not be detected precisely. In the present study, we aim to present a novel design of tennis balls equipped with nano-sensors to detect the touch of the ball to the court. In the impact instance, tennis ball receives significant acceleration and change in the linear momentum. This large acceleration could deform a small-beam structure with piezoelectric layer to produce voltage. The voltage could further be utilized to produce infrared waves which could be easily detected by infrared detection sensors installed on the same video cameras or separately near the tennis court. Therefore, the exact time of the impact could be achieved with higher accuracy than image analyzing method. A detailed dynamical property of such sensors is discussed using nonlinear beam equations. The results show that within the acceleration range of tennis ball during an impact, the piezoelectric patches of the nano-sensors in the tennis ball could produce enough voltages to propagate infrared waves to be detected by infrared detectors.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.615-618
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• 2005

All over the world, many kinds of micro-actuators were already developed for various applications. The actuators are using various principles such as electromagnetic, piezoelectric and thermopneumatic etc. The most of the micro-actuators have been made using 2D based MEMS technology. In these actuators, it is difficult to drive 3-dimensional motion. This characteristic gives the limit of actuator application. However, micro-stereolithography technology has made it possible to fabricate freeform three-dimensional microstructures. In this technology, 2-dimensional micro-shape layer is cumulated on the other layers. This layer-by-layer process is the main principle to fabricate 3-dimensioal micro-structures. In this research, a micro-bellows actuator that is vertically moving was developed using the micro-stereolithography technology. When pressure was applied into the bellows, a non-contact actuating motion is generated. For actuation experiment, syringe pump and laser interferometer were used for applying pressure and measuring the displacement. Several hundreds micro-scale actuation was observed. And, to demonstrate the feasibility of proposed actuation principle, in this research, a micro-gripper was developed using half-bellows structure.

• Journal of Electrical Engineering and Technology
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• v.13 no.6
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• pp.2434-2440
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• 2018

A new type of piezoelectric micromachined ultrasonic transducer (pMUT) with high resonant frequency was developed by using a thin lead zirconate titanate (PZT) as an insulation layer on a floating $10{\mu}m$ silicon membrane. The PZT insulation layer facilitated acoustic impedance matching at active pMUT, leading to a high performance in the acoustic conversion property compared with the transducer using $SiO_2$ insulation layer. The fabricated ultrasonic devices were wirelessly measured by connecting two identical acoustic transducers to two separate ports in a single network analyzer simultaneously. The acoustic wave emitted from a transducer induced a $3.16{\mu}W$ on the other side of the transducer at a distance of 2 cm. The transducer performances in terms of device diameters, PZT thickness, annealings, and different DC polings, etc. were investigated. COMSOL simulation was also performed to predict the device performances prior to fabrication. Based on the COMSOL simulation, the device was fabricated and the results were compared.

• Journal of the Korean Ceramic Society
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• v.43 no.1 s.284
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• pp.42-47
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• 2006

In this paper, we prepared high-quality ZnO thin films for application of FBAR (Film Bulk Acoustic Resonator) by using pulse DC magnetron sputtering. To prevent the formation of low dielectric layers between metal and piezoelectric layer, Ru film of 30 nm thickness was used as a buffer layer. In addition we investigated the influence of annealing condition with various temperatures. As the annealing temperature increased, the crystalline orientation with the preference of (002) c-axis and resistance properties improved. The single resonator which was fabricated at $500^{\circ}C$ exhibited the resonance frequency and the return loss 0.99 GHz and 15 dB, respectively. This work demonstrates potential feasibility for the use of thin film Ru buffer layers and the optimization of annealing condition.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2004.10a
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• pp.286-289
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• 2004

This paper presents the fatigue characteristics of LIPCA (LIghtweight Piezo-Composite Actuator) device system. The LIPCA device system is composed of a piezoelectric ceramic layer and fiber reinforced lightweight composite layers. Typically a PZT ceramic layer is sandwiched by a top fiber layer with low CTE (coefficient of thermal expansion) and base layers with high CTE. The advantages of the LIPCA design are weight reduction by using the lightweight fiber reinforced plastic layers without compromising the generation of high force and large displacement and design flexibility by selecting the fiber direction and the size of prepreg layers. To predict the degradation of actuation performance of LIPCA due to fatigue, the cyclic electric loading tests using PZT specimens were performed and the strain for a given excitation voltage was measured during the test. The results from the PZT fatigue test were implemented into CLPT (Classical Laminated Plate Theory) model to predict the degradation of LIPCA's actuation displacement. The fatigue characteristic of PZT was measured using a test system composed of a supporting jig, a high voltage power supplier, data acquisition board, PC, and evaluated.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.2
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• pp.164-168
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• 2005

Piezoelectric ZnO thin films were for the first time formed on SiO$_2$/Si(100) substrate using 2-step deposition, atomic layer deposition(ALD) and RF magnetron sputtering deposition, for film bulk acoustic resonator(FBAR) applications. The ZnO buffer layer by ALD was deposited using alternating diethyl zinc(DEZn)/$H_2O$ exposures and ultrahigh purity argon gas for purging. The ZnO films by 2-step deposition revealed stronger c-axis-preferred orientation and smoother surface than those by the conventional RF sputtering method. The solidly mounted resonator(SMR)-typed FBAR fabricated by using 2-step deposition method revealed higher quality factor of 580 and lower return loss of -17.35dB. Therefore the 2-step deposition method in this study could be applied to the FBAR device fabrication.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.11
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• pp.921-925
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• 2000

Characteristics of Pb(Mg, Nb)O$_3$-Pb(Zr, Ti)O$_3$system thick films fabricated by a screen printing method were investigated. The buffer layer were coated with various thickness of Ag-Pd by screen printing to investigate the effect as a diffusion barrier and deposited Pt as a electrode by sputtering on Ag-Pb layer. The printed thick films were burned out at 650$\^{C}$ and sintered at 950$\^{C}$ in O$_2$condition for each 20, 60min after printing with 350mesh screen. The thickness of piezoelectric thick film was 15∼20㎛ and Ag-Pb layer acted as a diffusion barrier above 3㎛ thickness. The PMN-PZT thick films were screen printed on Pt/Ag-Pb(6m) and sintered by 2nd step (650$\^{C}$/20min and 950$\^{C}$/1h) using paste mixed PMN-PZT and binder in the ratio of 70:30, and the remnant polarization of thick film was 9.1$\mu$C/㎠ in this conditions.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.21 no.8
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• pp.222-227
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• 2020

Pb(Zr,Ti)O₃(denoted as PZT) in the perovskite phase is used as a dielectric, piezoelectric, and super appetizer material owing to its ferroelectric properties. A PZT film was formed by an RF magnetron sputtering process by preparing a target composed of Pb_1.3(Zr_0.52Ti_0.48)O₃. The PZT film was formed by dividing the material into a mono-layer PZT produced continuously with the same sputtering power and a bi-layer PZT produced with two-stage sputtering power. The bi-layer PZT consisted of a lower layer produced under low-power sputtering conditions and an upper layer produced under the same conditions as the mono-layer PZT. XRD revealed small amounts of pyrochlore phase in the mono-layer PZT, but only the perovskite phase was detected in the bi-layer PZT. SEM and AFM revealed the upper part of the bi-layer PZT to be more compact and smooth. Moreover, the bi-layered PZT showed superior symmetry polarization and a significantly reduced leakage current of less than 1×10-5 A/cm². This phenomenon observed in bi-layer PZT was attributed to the induction of growth into a pure perovskite phase by suppressing the formation of a pyrochlore phase in the upper PZT layer where the densely formed lower PZT layer was produced sequentially.