• 한국전기전자재료학회논문지
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• 제26권2호
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• pp.114-118
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• 2013

In this study, coupled mode piezoelectric devices for AE sensor application with excellent displacement and piezoelectric characteristics were simulated using ATILA FEM program, and then fabricated. Displacements and electromechanical coupling factors of the piezoelectric devices were investigated. The simulation results showed that excellent displacement and electromechanical coupling factor were obtained when the ratio of diameter/thickness was 1.0. The piezoelectric device of ${\Phi}/T$= 1.0 exhibited the optimum values of fr= 406 kHz, displacement= $6.11{\times}10^{-8}[m]$, $k_{eff}$= 0.648. The results show that the coupled vibration mode piezoelectric device is a promising candidate for the application of AE sensor piezoelectric device.

• 한국전기전자재료학회논문지
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• 제31권2호
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• pp.94-97
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• 2018

Lead zirconate titanate/poly-vinylidene fluoride (PZT/PVDF) piezoelectric devices were fabricated by incorporating carbon nanotubes (CNTs), for use as flexible energy harvesting devices. CNTs were added to maximize the formation of the ${\beta}$ phase of PVDF to enhance the piezoelectricity of the devices. The phase transition of PVDF induced by the addition of CNTs was confirmed by analyzing the X-ray diffraction patterns, scanning electron microscopy images, and atomic force microscopy images. The enhanced output efficiency of the PZT/PVDF piezoelectric devices was confirmed by measuring the output current and voltage of the fabricated devices. The maximum output current and voltage of the PZT/PVDF piezoelectric devices was 200 nA and 350 mV, respectively, upon incorporation of 0.06 wt% CNTs.

• 한국분말재료학회지
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• 제25권3호
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• pp.263-272
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• 2018

Recent developments in the field of energy harvesting technology that convert ambient energy resources into electricity enable the use of self-powered energy systems in wearable and portable electronic devices without the need for additional external power sources. In particular, piezoelectric-effect-based flexible energy harvesters have drawn much attention because they can guarantee power generation from ubiquitous mechanical and vibrational movements. In response to demand for sustainable, permanent, and remote use of real-life personal electronics, many research groups have investigated flexible piezoelectric energy harvesters (f-PEHs) that employ nanoscaled piezoelectric materials such as nanowires, nanoparticles, nanofibers, and nanotubes. In those attempts, they have proven the feasibility of energy harvesting from tiny periodic mechanical deformations and energy utilization of f-PEH in commercial electronic devices. This review paper provides a brief overview of f-PEH devices based on piezoelectric nanomaterials and summarizes the development history, output performance, and applications.

• 한국전기전자재료학회논문지
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• 제34권6호
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• pp.416-425
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• 2021

In the 4^th industrial age, electronic devices are becoming smaller and lighter with a low power consumption to overcome spatial limitation. The piezoelectric energy harvesters can convert mechanical kinetic energy into electric energy; thus, enabling the operation of small electronic devices. Recently, various piezoelectric harvesters have been reported and the electric output from these harvesters could be anticipated by theoretical analysis methods. For example, COMSOL Multiphysics software provides a theoretical simulation of piezoelectric effect with a combination of mechanical and electrical phenomena in the piezoelectric materials. This article introduces a brief modeling of piezoelectric harvester to investigate mechanical stress and electrical output of harvesting devices by the COMSOL Multiphysics software.

• 정보저장시스템학회논문집
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• 제3권1호
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• pp.47-53
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• 2007

In this paper, a thermo-piezoelectric mechanism with integrated heaters and piezoelectric sensors has been studied for low power probe-based data storage. Silicon nitride cantilever integrated with silicon heater and piezoelectric sensor has been developed to improve the uniformity of cantilevers. Data bits of 40 nm in diameter were recorded on PMMA film. The sensitivity of the piezoelectric sensor was 0.615 fC/nm after poling the PZT layer. And, the $34\times34$ probe array integrated with CMOS circuits has been successfully developed by simple one-step bonding process. The process can simplify the process step and reduce tip wear using silicon nitride tip.

• 한국전기전자재료학회논문지
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• 제25권2호
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• pp.105-109
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• 2012

In this study, thickness vibration mode piezoelectric devices for AE sensor application were simulated using ATILA FEM program, and then fabricated. Trajectory resonant displacement and electro mechanical coupling factors of the piezoelectric devices were investigated. The simulation results showed that excellent displacement and electro mechanical coupling factor was obtained when the ratio of diameter/thickness($\Phi/T$) was 0.75. The piezoelectric device of $\Phi/T$=0.75 exhibited the optimum values of fr= 183 kHz, displacement= $4.44{\times}10^{-7}[m]$, $k_{33}$= 0.69, which were suitable for the application of AE sensor piezoelectric device.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2006년도 춘계학술대회논문집
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• pp.827-830
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• 2006

With recent advanced in portable electric devices, wireless sensor, MEMS and bio-Mechanics device, the new typed power supply, not conventional battery but self-powered energy source is needed. Particularly, the system that harvests from their environments are interests for use in self powered devices. For very low powered devices, environmental energy may be enough to use power source. In the generality of cases, these energy harvesting systems are used in the piezoelectric materials as mechanisms to convert mechanical vibration energy into electric energy. Through the piezoelectric materials, the ambient vibration energy could be used to prolong the power supply or in the ideal case provide endless energy f9r the devices. Therefore, the piezoelectric power harvesting cantilever beam is developed. Also, the output voltage and power are predicted in this study. We also discuss the developing system of the piezoelectric energy scavenger. An experimental verification of the model is also performed to ensure its accuracy.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.193-193
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• 2008

Wearable and ubiquitous micro systems will be greatly growing and their related devices should be self-powered in order to avoid the replacement of finite power sources, for example, by scavenging energy from the environment. With ever reducing power requirements of both analog and digital circuits, power scavenging approaches are becoming increasingly realistic. One approach is to drive an electromechanical converter from ambient motion or vibration. Vibration-driven generators based on electromagnetic, electrostatic and piezoelectric technologies have been demonstrated. Among various generator types proposed so far, piezoelectric generator possesses considerable potential in micro system. To overcome low mechanical-to-electric energy conversion, the piezoelectric device should activate in resonance mode in response to external vibration. Normally, the external vibration excretes at low frequency ranging 0.1 to 200 Hz, whereas the resonant frequencies of the devices are fixed as constant. Therefore, keeping their resonant mode in varying external vibration can be one of important points in enhancing the conversion efficiency. We investigated the possibility of use of multi-bender type piezoelectric devices. To match the external vibration frequency with the device resonant frequency, the various devices with different resonant frequency were chosen.

• JSTS:Journal of Semiconductor Technology and Science
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• 제5권1호
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• pp.24-29
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• 2005

Silicon nitride cantilevers integrated with silicon heaters and piezoelectric sensors were developed for the scanning probe microscope (SPM) based data storage application. These nitride cantilevers are expected to have better mechanical stability and uniformity of initial bending than the previously developed silicon cantilevers. Data bits of 40 nm in diameter were recorded on PMMA film and the sensitivity of the piezoelectric sensor was 0.615 fC/nm, meaning that indentations less than 20 nm in depth can be detected. For high speed operation, $128{\times}128$ cantilever array was developed.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.194-194
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• 2008

Lead oxide based ceramics, represented by PZT, are the most widely used materials for piezoelectric actuators, sensors, and transducers due to their excellent piezoelectric properties. In particular, high-performance multilayered piezoelectric ceramics for advanced electronic components have drawn great attention. In order to develop piezoelectric ceramics capable of being sintered at low temperature for multilayer piezoelectric device applications, the effect of CuO additions on the microstructures and electromechanical properties of the 0.4Pb$(Mg_{1/3}Nb_{2/3})O_3-0.25PbZrO_3-0.35PbTiO_3$ ceramics was investigated. The samples with CuO addition were synthesized by ordinary sintering technique. X-ray diffractions indicated that all samples formed a single phase perovskite structure. The addition of CuO improved the sinterability of the samples and caused an increase in the density and grain size at low temperature. The optimum sintering temperature was lowered by CuO additions. Excellent piezoelectric and electromechanical responses, $d_{33}$ ~ 663 pC/N, $k_p$ ~ 0.72, were obtained for the samples of high density with 0.1 wt% CuO addition sintered at $1050^{\circ}C$ for 4 h in air. These results show that the piezoelectric properties of PMNZT ceramics can be improved by controlling the microstructure and this system is potentially a good candidate as multilayer piezoelectric device for a wide range of electro-mechanical transducer applications.