Silicon Nitride Cantilever Arrays Integrated with Si Heater and Piezoelectric Sensors for SPM Data Storage Applications |
Nam, Hyo-Jin
(MS Group, Devices and Materials Lab., LG Electronics Institute of Technology)
Jang, Seong-Soo (MS Group, Devices and Materials Lab., LG Electronics Institute of Technology) Kim, Young-Sik (MS Group, Devices and Materials Lab., LG Electronics Institute of Technology) Lee, Caroline-Sunyong (MS Group, Devices and Materials Lab., LG Electronics Institute of Technology) Jin, Won-Hyeog (MS Group, Devices and Materials Lab., LG Electronics Institute of Technology) Cho, Il-Joo (MS Group, Devices and Materials Lab., LG Electronics Institute of Technology) Bu, Jong-Uk (MS Group, Devices and Materials Lab., LG Electronics Institute of Technology) |
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