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Silicon Nitride Cantilever Arrays Integrated with Si Heater and Piezoelectric Sensors for SPM Data Storage Applications  

Nam, Hyo-Jin (MS Group, Devices and Materials Lab., LG Electronics Institute of Technology)
Jang, Seong-Soo (MS Group, Devices and Materials Lab., LG Electronics Institute of Technology)
Kim, Young-Sik (MS Group, Devices and Materials Lab., LG Electronics Institute of Technology)
Lee, Caroline-Sunyong (MS Group, Devices and Materials Lab., LG Electronics Institute of Technology)
Jin, Won-Hyeog (MS Group, Devices and Materials Lab., LG Electronics Institute of Technology)
Cho, Il-Joo (MS Group, Devices and Materials Lab., LG Electronics Institute of Technology)
Bu, Jong-Uk (MS Group, Devices and Materials Lab., LG Electronics Institute of Technology)
Publication Information
JSTS:Journal of Semiconductor Technology and Science / v.5, no.1, 2005 , pp. 24-29 More about this Journal
Abstract
Silicon nitride cantilevers integrated with silicon heaters and piezoelectric sensors were developed for the scanning probe microscope (SPM) based data storage application. These nitride cantilevers are expected to have better mechanical stability and uniformity of initial bending than the previously developed silicon cantilevers. Data bits of 40 nm in diameter were recorded on PMMA film and the sensitivity of the piezoelectric sensor was 0.615 fC/nm, meaning that indentations less than 20 nm in depth can be detected. For high speed operation, $128{\times}128$ cantilever array was developed.
Keywords
SPM; data storage; piezoelectric sensor; nitride cantilever;
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