• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.730-733
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• 2004

An ultrasonic linear motor was composed af a slider and a stator vibrator including piezoelectric material and elastic material. The ultrasonic linear motors mainly consist of an ultrasonic vibrator which generates elliptical oscillations. $L_1-B4$ ultrasonic linear motor use longitudinal and bending multi-vibration. In order to design stators which has high efficiency and diriving characteristics. The finite element method was used to optimize dimension of ultrasonic vibrator and direction of vibratory displacement. stator vibrator of respectively width 3, 5, 7[mm] was fabricated an experimented. as results When width was 5[mm], the driving characteristics was good

• Proceedings of the Korea Electromagnetic Engineering Society Conference
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• 2002.11a
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• pp.3-6
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• 2002

In this paper, Thin film bulk acoustic resonate.(TFBAR) fillers tuned by gold plated on-wafer inductors are presented. The air-gap type TEBAR is used with aluminum nitride(AIN) as piezoelectric material and platinum as top and bottom electrodes. Inductor equivalent model and modified Butterworth-Van Dyke(MBVD) model are employed for the frequency tuning of fabricated TFBAR bandpass filters. Fabricated inductor has inductance of 3 nH and Q factor of about 8 at 2 ㎓. It is clearly revealed that inductor tuning can enhance the bandwidth of ladder filters and improve out-of-band rejection characteristic around 10㏈.

• Journal of the Korean Ceramic Society
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• v.23 no.3
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• pp.21-26
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• 1986

In this study the system of $Pb(Mn_{1/3} Nb_{2/3})O_3-PbTiO_3-PbZrO_3$ piexoelectric ceramics was made in the radial mode disk and attenuation characteristic of the desinged ladder type filter was investigated. What is more temperature dependance of resonant frequency and variation of resonant frequency was examined by chan-ging the electrode diameter of piezoelectric resonator. (A Group : De=11mm, B Group : De=7.5mm and C Gro-up : De=5.5mm) Upon investigation it was the following. The center frequency of A, B and c filter showed up in the 200KHz, 270KHz and 380KHz respectively. As the electrode diameter decreased center frequency in creased abruptly. As the Co_2/Co1 increased attenuation characteristics and selectivity was improved. As the x=50. resonant frequ-ency invaried with variation of temperature.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1627-1629
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• 1996

Polyvinylidene fluoride( : PVDF) has piezoelectric and pyroelectric. The ${\beta}-PVDF$ manufactured by induced-electric field. In accordance to increasing induced-electric field, the 530 $cm^{-1}$ peak decrease, whereas $510cm^{-1}$ peak increase. The dielectric constant of PVDF thin film is 6.8 and 10 MV/m induced-PVDF thin film is 9.4. The dielectric relaxation characteristic of PVDF thin films correspond to Debye's theory.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.18 no.2
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• pp.137-143
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• 2009

This paper presents the fabrication of inchworm motor for high precision actuator system of large displacement and high force. The inchworm motor consists of a extend actuator that provides displacement of tool guide and two clamping actuators which provide the holding force. In order to avoid the PZT fracture, design of pre-load housing was conducted by flexure hinge structure, because PZT actuator has low tensile and shear. To design the pre-load housing and optimize the clamping mechanism, the static and dynamic analysis were conducted by finite element method. From these results, a prototype of the inchworm motor was fabricated and dynamic characteristic with respect to the various frequency was tested. The maximum velocity of the inchworm motor was $41.1{\mu}m/s$ at 16Hz.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.05a
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• pp.202-207
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• 2002

This paper deals with a novel shunted actuator, which has a capability to suppress multi-mode vibration amplitudes by using a pair of piezoceramic patches. In order to describe the characteristic behaviors of shunted dampers connected with a series and a parallel resistor-negative capacitive branch circuit, the stiffness ratio and loss factor with respect to the non-dimensional frequency are considered. To obtain a guideline model of a piezo/beam system connected with a series and a parallel resistor-negative capacitor branch circuit, the governing equations of motion is derived through Hamiltons principle and a piezo sensor equation as well as a shunt damping matrix is developed. The theoretical analysis shows that the shunted actuator developed in this study can significantly reduce multiple-mode vibration amplitudes simultaneously over the whole structural frequency range.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.3
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• pp.105-109
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• 2001

In this paper, the windmill type ultrasonic motors with 11.35 mm diameter, 2.87 mm thickness of metal endcap and 1.47 g weight were fabricated. Effects of slots and thickness on torque characteristic in the windmill type ultrasonic motor were investigated, when stator's slots were changed from 4, 6, 8 and thickness 0.15 mm, respectively. Specially designed metal endcaps with windmill shaped cutting can provide longitudinal and torsional displacements simultaneously as the ceramic disk vibrates radically. The windmill type ultrasonic motor has only three components: a stator element with windmill shape slotted metal endcap, a rotor and bearing. Ultrasonic motor stimulated to ultrasonic oscillations by piezoelectrics to drive a rotor via friction contact. The ultrasonic motor fabricated here was the windmill type ultrasonic motor operated by single-phase AC source. Bidirectional revolution using single-phase high frequency for driving the ultrasonic motor was presented.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.415-418
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• 2000

In this paper, we calculated equivalent circuit of Langevin type ultrasonic vibrator and designed a vibrator whose resonant frequency is 50(KHz). FEA (Finite Element Analysis) was employed to calculate the resonant frequencies and maximum displacements of designed vibrators. The computer calculated resonant frequencies were approached to the designed one. As AC voltage input the maximum displacements were shown sinusoidal changes. Terminal input admittance over a frequency range spanning the resonant frequency were calculated. ANSYS was employed to calculate resonant frequencies, displacements and terminal input admittance of vibrators

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.11a
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• pp.204-207
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• 2000

An ultrasonic linear motor was composed of a slider and a stator vibrator including piezoelectric material and elastic material. The ultrasonic linear motors mainly consist of an ultrasonic vibrator which generates elliptical oscillations. L$_1$-B$_4$ ultrasonic linear motor use longitudinal and bending multi-vibration. In order to low driving voltage and improve the life time of the ultrasonic oscillator, we used stacked piezoceramics. Stacked piezoceramics are adhered to aluminum elastic material. The finite element method was used to optimize dimension of ultrasonic vibrator and direction of vibratory displacement. As a result of estimating the characteristics of the ultrasonic linear motor, no-load velocity was 2.04[m/s] when applied voltage was 70[V$\sub$rms/] in resonance frequency.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.8 no.5
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• pp.1007-1012
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• 2007

A novel Michelson interferometer controlled with a feedback circuit(MIFC) has been developed and its performance has been evaluated. This new interferometer can measure the displacement of the sample by directly reading the feedback bias applied to the PZT whose piezoelectric characteristic is known. The experimental result showed that the step height the silicon membrane measured by using MIFC was actually same with the value measured by SEM, which confirms that MICS is an easy and accurate method for the nano-scale displacement measurement.