• 한국항공우주학회지
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• 제38권9호
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• pp.869-874
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• 2010

압전 소자는 부피에 비해 발생 힘이 크고 빠른 응답 특성을 갖기 때문에, 최근 압전 소자를 이용한 모터의 연구가 활발하게 이루어지고 있다. 그러나 발생 변위가 작아, 압전소자의 직접적인 변위 특성을 이용하는 것에 한계가 있다. 따라서 큰 변위를 확보하기 위해, 바이메탈을 사용하거나 한 개 이상의 압전 소자를 사용한 모터가 연구되었다. 본 연구를 통해 제안된 선형 모터는 구동부의 첫 번째 모드 형상을 이용하기 때문에 낮은 구동 주파수에서 작동이 가능하다. 또한 한 개의 압전 소자를 사용하여, 구동 주파수와 구동부의 공진 주파수 비에 따라 모터의 방향을 제어할 수 있도록 고안되었다.

• 전기학회논문지
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• 제56권3호
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• pp.566-570
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• 2007

The specific electrical, optical and acoustic properties of Zinc Oxide (ZnO) are important for semiconductor process which has many various applications. Piezoelectric ZnO films has been widely used for such as transducers, bulk and surface acoustic-wave resonators, and acousto-optic devices. In this study, we investigated etch characteristics of ZnO thin films in inductively coupled plasma etch system with $BCl_3/Ar$ gas mixture. The etching characteristics of ZnO thin films were investigated in terms of etch rates and selectivities to $SiO_2$ as a function of $BCl_3/Ar$ gas mixing ratio, RF power, DC bias voltage and process pressure. The maximum ZnO etch rate of 172 nm/min was obtained for $BCl_3$ (80%)/Ar(20%) gas mixture. The chemical states on the etched surface were investigated with X-ray photoelectron spectroscopy (XPS).

• 전기학회논문지
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• 제66권8호
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• pp.1215-1221
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• 2017

Parametric array transducers are used for highly directional speaker in an air environments. Piezoelectric micromachined ultrasonic transducers for parametric array transducers need DC-biased voltage driving signals in order to get high-directional quality-sound features. The existing power amplifier such as class A amplifiers has low efficiency and require large volume heatsinks. To overcome the above-mentioned disadvantages of the conventional amplifier, this paper proposes a new power amplifier system. The proposed power amplifier system ensures high linearity of output characteristic by utilizing the push-pull class B type amplifier. Furthermore, the proposed power amplifier system gets high efficiency because it contains the DC-DC converter-type power supply which can perform energy recovery and envelope tracking function. Also the paper suggests the detailed circuit topology. Its characteristics are verified by the detailed experimental results.

• JSTS:Journal of Semiconductor Technology and Science
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• 제2권4호
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• pp.246-252
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• 2002

Two kinds of PZT cantilevers integrated with a piezoresistor have been newly designed, fabricated, and characterized for high speed AFM. In first cantilever, a piezoresistor is used to sense atomic force acting on tip, while in second cantilever, a piezoresistor is integrated to calibrate hysteresis and creep phenomena of the PZT cantilever. The fabricated PZT cantilevers provide high tip displacement of $0.55\mu\textrm{m}/V$ and high resonant frequency of 73 KHz. A new cantilever structure has been designed to prevent electrical coupling between sensor and PZT actuator and the proposed cantilever shows 5 times lower coupling voltage than that of the previous cantilever. The fabricated PZT cantilever shows a crisp scanned image at 1mm/sec, while the conventional piezo-tube scanner shows blurred image even at $180\mu\textrm{m}/sec$. The non-linear properties of the PZT actuator are also well calibrated using the piezoresistive sensor for calibration.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.655-659
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• 2006

This paper presents a novel electrostatic drop-on-demand inkjet device featured by a MEMS fabricated pole-type and hole-type nozzle with tube shaped orifice and investigates the feasibility of applying the inkjet device to display fabrication process. The electric voltage signal applied to the ring shaped upper electrode plate, against the hole-shaped ground or pole-shaped ground, referred here pole-type and hole-type nozzle respectively, allows ejection of small droplet to take place: That is, a tiny droplet is taken away from the peak of the mountain shaped liquid meniscus formed at the nozzle orifice. It is verified experimentally that the use of the pole type nozzle allows a stable and sustainable micro-dripping mode of droplet ejection for a wider range of applied voltages and of liquid viscosities. This demonstrates a feasibility of electrostatic drop-on-demand inkjet device as a disruptive alternative to conventional print heads such as thermal bubble or piezoelectric inkjet heads.

• 대한기계학회논문집A
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• 제20권5호
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• pp.1573-1581
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• 1996

This paper present as experimental demonstratio of DSP and a sensory actuator that is used to actively control sound transmission/radiation through a vibrating plate. A plane acoustic wave incident on a clamped, thin circular plate was used as a noise source, and a sensory actuator bounded to the plate was used to control and sense vibration of the plate. The sound transmission reduction problem was tranformed as a structural vibration control problem that actively control the structural vibration modes coupled to acoustic modes. The results show that the first structural vibration mode is controlled with a reduction of 78 percent in the displacement and velocity of the plate. This corresponds to a 13dB reduction in the acoustic response. These experimental results indicate that a sensory actuator bounded to the plate can be employed to attenuate the sound transmitted to radiated from the plate.

• 한국소음진동공학회논문집
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• 제15권3호
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• pp.290-296
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• 2005

This paper proposes the modeling scheme of the Miniature Universal Testing Machine (MUTM) composed of 36 thin-beam-type bimorph PZTs and the control algorithm to minimize the residual vibration of the MUTM in the dynamic testing of specimens. In the operation of the MUTM, hysteresis, residual displacement and vibration of it are major issues. From the analysis of the MUTM behaviors, the hysteresis is described by the curving fitting scheme with the function of an input voltage. The dynamic characteristics of the MUTM are identified by the frequency domain modeling technique based on the experimental data. The interested bandwidth is focused on 125-315HZ for effective modeling and control. For the robust vibration control of the MUTM, the sliding mode control and the Kalman filter as observer are proposed. The paper also proposes the best input signal type to operate the MUTM effectively. The feasibility of the proposed modeling scheme and control algorithm are tested and verified experimentally.

• 한국음향학회:학술대회논문집
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• 한국음향학회 1999년도 학술발표대회 논문집 제18권 1호
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• pp.224-227
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• 1999

A high power deep-water sonar transducer of FFR (Free Flooded Ring) type has been designed using a coupled FE-BEM. The present sonar transducer is composed of rectangular piezoelectric ceramics and pie-shaped steels (or the advantage of simple fabrication. The dynamics of the sonar transducer is modelled in three dimensions and is analyzed with external electrical excitation conditions. Different results are available such as steady-state frequency response for TX and RX displacement modes, directivity patterns, back-scattering patterns, bandwidths, transmitting voltage responses and receiving sensitivity responses. The TV response shows a very high acoustic pressure of 150 dB/lV (ref $1{\mu}Pa$ at 1m) at 1900 Hz. This ultra high power response of the sonar transducer indicates a new possibility of the sonar transducer development.

• 한국수산과학회지
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• 제44권5호
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• pp.543-549
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• 2011

An underwater speaker was developed for use as an acoustic deterrent device that transmits acoustic energy through the water omnidirectionally over a broadband frequency range to eliminate marine mammal attacks and to prevent physical damage to the inshore and coastal fishing grounds of Korea. The underwater speaker was constructed of two vibration caps machined from 6061-T6 aluminum alloy and a stack of PZ 26 piezoelectric ceramic rings (Ferroperm Piezoceramics A/S) connected mechanically in series and electrically in parallel. The performance characteristics of the underwater speaker were measured and analyzed in an experimental water tank of $5\;m{\times}5\;m{\times}6\;m$. The peak transmitting voltage response (TVR) was measured at 11.16 kHz with 163.45 dB re $1\;{\mu}Pa$/V at 1m. The underwater speaker showed a near omnidirectional beam pattern at the peak TVR resonance frequency. The usable frequency range was 4-25 kHz with a lower TVR limit of approximately 140 dB. We conclude that this underwater speaker could be satisfactorily used as an acoustic deterrent device against marine mammals, particularly the bottlenose dolphin, to protect catches and fishing grounds as well as the mammals themselves, for example, by keeping them away from fishing gear and/or vessels.

• 한국기계가공학회지
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• 제12권1호
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• pp.97-103
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• 2013

A new precision positioning mechanism for stage was been developed by Displacement Magnification Device(DMD) in this paper. The DMD was composed of the beam and multilayer piezoelectric actuators. The theoretical and experimental analysis of DMD to enlarge displacement more then 50times were discussed. And the 2-axis stage by using displacement amplification apparatus was added in the new DMD, and it was able to do it through finite element analysis and experiment. As the results, the magnification of DMD can be obtained about $100{mu}m$ displacement to the 10V input voltage($1.5{mu}m$). And the about 50nm of linearity error in the $30{mu}m$ measurement range and 20times of the amplification in displacement can be measured. In addition, the experimental results are confirmed the possibility of millimeter displacement characteristics and correspond to finite element analysis results.