• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.299-299
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• 2007

This paper presents an omni-directional piezoelectric actuator which utilizes only one actuator. The actuator has a simple structure of cone type consists of two piezoelectric ceramics of ring type and electrodes divided four segments and a stainless steel body. To find the optimal operating condition of the actuator, the frequency characteristics of the actuator are analyzed by ATILA, FEM and measured by Impedance Analyzer. We have also developed a stage using the omni-directional actuator and an actuator driver circuit to create four sinusoidal waves with a variable frequency and phase difference.

• Journal of the Korean Ceramic Society
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• v.40 no.11
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• pp.1062-1066
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• 2003

Design of a piezoelectric actuator for the ultrasonic motor must ensure that contact point has elliptic trajectory of movement. The new idea of an elliptic trajectory formation of the piezoelectric actuator is investigated in the paper. Shaking beam for the piezoelectric linear ultrasonic motor was introduced to realize this new idea. The principle is based on the excitation of longitudinal and flexural vibrations of the actuator by using two sources of longitudinal mechanical vibrations shifted by $\pi$/2. Mode-frequency and harmonic response analyses of the actuator based on FEM have been carried out. The moving trajectory of the contact point has been defined. Finally, The experimental research of shaking beam has been confirmed an opportunity of the elliptic trajectory reception with the help of one stable mode of the vibrations.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.12
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• pp.1937-1941
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• 2004

We present lateral actuated piezoelectric actuator using U-shaped PZT strip and lever structure for the RF switch application. In the previous study of RF switch, they used horizontal contact switch fabricated by thin film metals. However, thin film metals could not generate large contact force due to low stiffness. In this work, we suggest lateral contact switch which makes large contact force by increasing stiffness. In addition, we use PZT actuator for the high force actuation. Generally actuator using thin film PZT moves to the vertical direction due to the neutral axis shift. Therefore we need lateral motion generation mechanism based on the thin film PZT actuator. In order to increase lateral motion of thin film PZT actuator, we use U-shaped PZT actuator using residual stress control. Also, thin film PZT actuator can generate very small lateral motion of 120${\times}$10$^{-6}$ ${\mu}{\textrm}{m}$/V for d$_{31}$ mode, thus we suggest lever structure to increase stroke amplification. From the experimental study, fabricated PZT actuator shows maximum lateral displacement of 1 ${\mu}{\textrm}{m}$, and break down voltage of the thin film PZT actuator is above 16V.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.5
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• pp.289-293
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• 2000

This paper presents a study on the linear compensation of nonlinear hysteric actuators using the highly magnetostrictive film pattern as a strain sensor. Elements had a hybrid structure, in which thin soft glass substrate with the highly magnetostrictive amorphous FeCoSiB film was bonded on the PZT piezoelectric substrate. The magnetostrictive film as a strain sensor detects the deflection of an actuator, and a voltage signal from the strain sensor related to the deflection of an actuator is used for the linear control of an actuator.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.68-69
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• 2005

Low temperature ($\leq900^{\circ}C$) sintering piezoelectric ceramics $0.01Pb(Mg_{1/2}W_{1/2})O_3$-0.41Pb$(Ni_{1/3}Nb_{2/3})O_3-0.35PbTiO_3-0.23PbZrO_3+0.1wt%Y_2O_3+xwt%ZnO$ $(0{\leq}x{\leq}2.5)$ have been developed and investigated. The electromechanical coupling coefficient ($k_p$), piezoelectric constant ($d_{33}$), and mechanical quality factor ($Q_m$) have been measured to characterize the piezoelectric materials system. When 2.0 wt% ZnO is added, the properties of the system, $d_{33}$ = 559 pC/N, $k_p$ = 55.0 % and $Q_m$ = 73.4 are obtained which are very suitable for piezoelectric actuators. A bending mode multilayer actuator has been also developed using the materials which size is $27(L)\times9(W)\times1.07(t)mm^3$. The actuators are fabricated by multilayer ceramic (MLC) process and consist of24 layers and each layer thickness is $35{\mu}m$. At this time, the displacement of actuator was $100{\mu}m$ at 28V.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.1
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• pp.119-125
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• 1997

This paper deals with an experimental investigation on an active vibration control of ahybrid smart structure(HSS) via an electro-rheological fluid actuator(ERFA) and a piezoelectric film actuator(PFA). Firstly, an HSS is constructed by inserting a silicone oil-based electro-rheological fluid into a hollow can- tilevered beam and perfectly bonding piezoelectric films ofn the upper and lower surfaces of the beam as an actuator and a sensor, respectively. The control scheme of the ERFA tuning stiffness and damping charac- teristics of the HSS with imposed electric fields is formulated as a function of excitation frequencies on the basis of field-dependent respnses. On the other hand, as for the control scheme of the PFA permitting control voltages to generate axial forces or bending moments for suppressing deflections of the HSS, a neuro sliding mode controller(NSC) is employed. Furthermore, an experimental implementation activating the ERFA and the PFA independently is established to carry out an active vibration control in both the transient and forced vibrations. The experimental results exhibit a superior ability of the gtbrid actuation system to tailor elastodynamic response characteristics of the HSS rather than a single class of actuator system alone.

• Journal of Mechanical Science and Technology
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• v.20 no.11
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• pp.1993-2001
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• 2006

The piezoelectric bimorph film, which, as an actuator, can generate more effective displacement than the usual PVDF film, is used to control the turbulent boundary-layer flow. The change of wall pressures inside the turbulent boundary layer is observed by using the multi-channel microphone array flush-mounted on the surface when actuation at the non-dimensional frequency $f_b^+$:=0.008 and 0.028 is applied to the turbulent boundary layer. The wall pressure characteristics by the actuation to produce local displacement are more dominantly influenced by the size of the actuator module than the actuation frequency. The movement of large-scale turbulent structures to the upper layer is found to be the main mechanism of the reduction in the wall- pressure energy spectrum when the 700$700{\nu}/u_{\tau}$-long bimorph film is periodically actuated at the non- dimensional frequency $f_b^+$:=0.008 and 0.028. The biomorph actuator is triggered with the time delay for the active forcing at a single frequency when a 1/8' pressure-type, pin-holed microphone sensor detects the large-amplitude pressure event by the turbulent spot. The wall-pressure energy in the late-transitional boundary layer is partially reduced near the convection wavenumber by the open-loop control based on the large amplitude event.

• 한국가시화정보학회:학술대회논문집
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• 2002.04a
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• pp.1-7
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• 2002

This papers describes the preparation and experimental results of a micro mass detection devices based on cantilever and a diffuser-type micro pump using screen printing thick-film technologies and Si micro-machining. PZT-PCW thick films were prepared by new hybrid method based on the screen printing. By applying these PZT-PCW piezoelectric thick films on actuator, a cantilever for mass detection sensor and a micropump for microfluidic element are successfully fabricated. Resonant frequency and displacement of PZT-PCW thick film actuator in air and in liquid are measured by laser vibrometer system as a function of actuator size. The resonant frequency of PZT-PCW thick film actuator in liquid decreases order of 1/2-1/4 due to damping effect. The sensitivity of cantilever is characterized by Au deposition method which has the mass loading effect such as adsorption of protein. The Sensitivity of PZT-0.12PCW thick film cantilever is proportional to detecting area.

• Journal of the Korean Ceramic Society
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• v.40 no.3
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• pp.225-228
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• 2003

A Bender typed Multilayer Actuator(BMA) for decreasing the depolarization effect was designed and fabricated. Unlike bimorph and multimorph actuators in which depolarization occurred, the BMA did not generate depolarization because the polarization and the electric field directions are the same. The simulated results indicate that higher displacement of the BMA can be achieved by increasing input voltage. Compared with the multimorph actuator, the proposed actuator is expected to extend a life time as well as acceptable voltage range.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.4 s.247
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• pp.350-357
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• 2006

A new valveless micropump for bi-directional application has been developed and tested. The micropump was fabricated on silicon and glass substrates by micromachining process. The micropump in this study consists of a membrane actuator, a pumping chamber, fluidic channels and two piezoelectric ceramic films. The channels and pumping chamber were etched on a glass wafer and the membrane was made on a silion wafer which is actuated by a piezoelectric ceramic (PZT) film. The geometry of the micropump was optimized by numerical analysis and the performance of the micropump was investigated by the experiments. The maximum flow rate was $323{\mu}L/min$ and the maximum back pressure was 294 Pa when the membrane actuator of $10{\times}10mm^2$ was driven at 130 Hz and 385 V.