Design, Fabrication and Test of Piezoelectric Actuator Using U-Shape PZT Strips and Lever Structure for Lateral Stroke Amplification
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이준형
(한국기계연구원)
이택민 (한국기계연구원) 최두선 (한국기계연구원) 황경현 (한국기계연구원) 서영호 (한국기계연구원 나노공정그룹) |
1 | Rebeiz, G.M. and Muldavin, J.B., 2001, 'RF MEMS Switches and Switch Circuits,' IEEE Microwave magazine, pp. 59-71 DOI ScienceOn |
2 | Tom Campbell, 2001, 'MEMS Switch Technology Approaches the Ideal_Switch,' Applied Microwave and Wireless, pp. 100-107 |
3 | Kim, S.G. and Koo, M.K., 2000, 'Design of a Microactuator Array Against the Coupled Nature of MEMS Systems Processes,' Annals of CIRP, Vol. 49, No.1 |
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