• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.05a
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• pp.883-889
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• 2005

Micro robots have been developed for many applications: medical, industrial, military, and so on. A small mobile robot was built and it has three legs made of bimorph piezoelectric actuators. It proceeds by vibrating the rear leg and it rotates by vibrating one of the front legs. The locomotion of the robot is described by relative position of mass center and the friction between the legs and the floor. This paper describes the principles of locomotion and modeling of the robot Modeling was simulated to investigate the dynamics of its mobility. The simulation results verified the modeling by showing similar movement of the robot as measured. It remained, however, several problems through experiments such as crooked direction of forward movement and proceeding speed.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.190-191
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• 2006

본 연구에서는 압전 세라믹을 이용한 Piezoelectric Energy Harvesting Systems을 개발하기 위해서, 바이몰프 액츄에이터를 제작하여 구동속도에 따른 발전특성을 고찰하였다. 또한 발전 회로시스템을 설계하여 압전소자에 의한 발전특성을 분석하였다. 본 시스템을 통해서 에 1.3 mm(100 V 인가)의 대변위 바이몰프 액츄에이터를 제작하였으며, 이런 액츄에이터를 이용하여 60 mW급의 LED를 구동하였다.

• 제어로봇시스템학회:학술대회논문집
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• 1996.10a
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• pp.397-400
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• 1996

In this paper, robust motion control of a flexible micro-actuator is presented. The actuator is made of a bimorph piezoelectric high-polymer material (PVDF). No mathematical model system can exactly model a physical system such a flexible micro-actuator. For this reason we must be aware of how modeling errors might adversely affect the performance of a control system for such a model. The H method addresses a wide range of the control problems, combining the frequency and time domain approaches. The design is an optimal one in the sense of minimization of the maximum of the closed-loop transfer function. It includes colored measurement and process noise. It also addresses the issues of robustness due to model uncertainties, and is applicable to the, flexible micro-actuator control problem. Therefore, we adopt the H control problem to the robust motion control of the flexible micro-actuator. Theoretical and experimental results demonstrate the satisfactory performance and the effectiveness of the designed controller. the effectiveness of the designed controller.

• Transactions of The Korea Fluid Power Systems Society
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• v.3 no.2
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• pp.1-6
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• 2006

The pressure regulator which is used for controlling the reducing pressure in the piezoelectrically driven pneumatic valve has been studied. The pneumatic valve of this study object is 2-stage type and consists of a piezoelectric actuator, a controller, a poppet valve and a pressure regulator. Nominal flow of 50 lpm, maximum operating pressure of 0.9MPa and frequency characteristic of 10Hz and over are required in this pneumatic valve, but the pressure regulator is needed because piezoelectric actuator has no ability to control the pressure of 0.9MPa directly. In this study, bimorph type PZT actuator of $25.2mm(L){\times}7.2mm(W){\times}0.5mm(H)$ with constant of $-220{\times}10-12$ CN-1 was proposed and investigated. Maximum operating force of 0.052 N and maximum displacement of $63{\mu}m$ were gotten from the fabricated PZT actuator. From the analysis results, the orifice diameter of 0.6mm for a piezoelectric actuator was derived and then the pressure regulator which can be operated under 0.15 MPa easily was designed and manufactured. Performance and effects of design parameters were simulated by the Simulink of Matlab software, and it was confirmed that the performance characteristics of manufactured pressure regulator are superior in the common use pressure range of 0.5 MPa to 0.7 MPa. The results show that the proposed pressure regulator is suitable for the pneumatic valve with a PZT actuator.

• Journal of the Korean Ceramic Society
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• v.26 no.6
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• pp.802-810
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• 1989

The temperature dependence of piezoelectric strain constant and the electric field induced strain are investigated as a function of PT in 0.5[xPT-(1-x)PZ]-0.5PNN ceramics. The piezoelectric strain constant d31 has the highest value(360$\times$10-12m/V) at PT=0.68. The temperature dependence of d31 is improved as Curie temperature of sample is increased, and the electric field dependence of induced strain is decreased with the coercive field increased. This ceramic system shows both piezoelectric effect and electrostrictive effect under the applied electric field. The piezoelectric of tetragonal phase is higher than that of rhombohedral phase, and the magnitude of electrostrictive constant is appeared in the order of morphotropic, rhombohedral and tetragonal phase. The piezoelectric strain constant with applied field must be considered theelectrostrictive effect due to 90$^{\circ}$domain wall displacements, and the displacement of bimorph type actuator agrees with the calulated value well.

• Transactions of the Society of Information Storage Systems
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• v.2 no.4
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• pp.251-256
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• 2006

There is a great demand of micro-actuators for mobile information devices such as SFF optical drives and mobile phone cameras. However, the magnetic coils used in conventional electromagnetic motors are a major obstacle for the miniaturization because of their complicated structures and large power consumption. In this paper, a linear ultrasonic motor to actuate focusing lens of mobile devices is proposed. The new actuator uses a ring type bimorph piezoelectric material, and $d_{31}$ mode is adopted for applying linear motion. The interaction between inertia force and friction force makes linear motion by high-frequency saw signal input. The saw signal gives steady forces on the one direction by asymmetric inclination property of the signal itself on time domain. A commercial FEM(ANSYS) was used in this investigation for simulating structural analysis, identification of dynamic property, such as resultant displacement and coupled analysis with piezoelectric material. To evaluate the performance of the new design, a prototype was manufactured and experiments were carried out. Experimental results show the actuator motion of 5.4 mm/s at 10V saw signal of 41 kHz.

• Proceedings of the Computational Structural Engineering Institute Conference
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• 2002.04a
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• pp.461-469
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• 2002

This paper deals with a fully coupled piezoelectric-mechanical assumed strain solid element that can be used for geometric and material nonlinear modeling of thin piezoelectric actuators. Since the assumed strain solid element can alleviate locking, the element is suitable for performance analysis of very thin actuators without locking. A finite element code is developed based on the finite element formulation and validated by solving typical numerical examples such as bimorph and unimorph beams. Using thecode, we have conducted performance analysis for LIPCA actuator. The estimated actuation displacement of LIPCA agrees well with experimental data under low prescribed voltage.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.62-63
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• 2005

Recently, a tiny piezoelectric linear motor using a vibration made of the transducer has been invented. The motor consists of a shaft, mobile element, and piezoelectric transducer using a piezoelectric radial mode bimorph disk. The fringe of the bimorph disk is fixed firmly which means this area has no degree of freedom. Therefore, the radial mode of the tranducer transfers to the flexurd mode. The mobile elements move along the shaft by the impact force generated by the flexurd mode of the piezoelectric transducer. The piezoelectric ceramic disks have thickness of 0.1 mm and diameter of 3.5 mm. The elastic disk is introduced between two disks of the ceramic, which has thickness of 0.1 mm and diameter of 3.8 mm. The fringe of the elastic disk is fixed by a brass cylinder which height is 1.2 mm. The Pyrex shaft is used which has diameter of 1 mm and height of 10 mm. The motors are operated at their resonant frequencies. The dynamic properties of the motor have been intensively measured and analyzed according to the applied voltage wave forms at the resonant frequencies. As the sawtooth and rectangular voltage waves are applied, the velocity, the thrust force, and the velocity dependence of the mobile position are measured. The dynamic characteristics are also analyzed within a period of each wave using laser vibrometer. The velocity of the mobile is moderately constant along the shaft. The better dynamic characteristics are obtained in the case of applying the rectangular wave.

• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.190-194
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• 2005

There is a great demand of micro-actuators for mobile information devices such as SFF optical drives and mobile camera phones. However, conventional magnetic coils of electromagnetic motors are a major obstacle for miniaturization because of their complicated structures and large power consumption. In this paper, a linear ultrasonic motor to actuate focusing lens of mobile devices is proposed. The new actuator uses a ring type bimorph piezoelectric material, and $d_{31}$ mode is adopted for applying linear motion. The interaction between inertia force and friction force makes linear motion by high-frequency saw signal input. The saw signal gives steady forces on the one direction by asymmetric inclination property of the signal itself on time domain. A commercial FEM (ANSYS) was used in this investigation for simulating structural analysis, identification of dynamic property, such as resultant displacement and coupled analysis with piezoelectric material. To evaluate the performance of the new design, a prototype was manufactured and experiments were carried out. Experimental results show the actuator motion of 1.52 mm/s at 10 kHz input signal in 5 V.

• Proceedings of the SAREK Conference
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• 2006.06a
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• pp.477-482
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• 2006

In this study, a micro vapor compressor has been designed, fabricated and tested. The micro vapor compressor was made of silicon substrates and fabricated by micromachining process. The compressor is driven by a piezoelectric actuator which is widely used in microfluidic systems because of its strong force and rapid response. The actuator is a bimorph structure which consists of a silicon membrane and a piezoelectric ceramic film. A simulation work was conducted on the performance characteristics of the compressor. The simulation investigated the flow rate variation under various back pressure conditions. Experimental works were carried out on the operation of a compressor and the test results were compared with the simulation results.