• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2001년도 춘계학술발표대회 논문집
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• pp.126-129
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• 2001

LIPCA (LIghtweight Piezo-composite Curved Actuator) is an actuator device which is lighter than other conventional piezoelectric ceramic type actuator. LIPCA is composed of a piezoelectric ceramic layer and fiber reinforced light composite layers, typically a PZT ceramic layer is sandwiched by a top fiber layer with low CTE (coefficient of thermal expansion) and base layers with high CTE. LIPCA has curved shape like a typical THUNDER (thin-layer composite unimorph feroelectric driver and sensor), but it is lighter an than THUNDER. Since the curved shape of LIPCA is from the thermal deformation during the manufacturing process of unsymmetrically laminated lay-up structure, an analysis for the thermal deformation and residual stresses induced during the manufacturing process is very important for an optimal design to increase the performance of LIPCA. To investigate the thermal deformation behavior and the induced residual stresses of LIPCA at room temperature, the curvatures of LIPCA were measured and compared with those predicted from the analysis using the classical lamination theory. A methodology is being studied to find an optimal stacking sequence and geometry of LIPCA to have larger specific actuating displacement and higher force. The residual stresses induced during the cooling process of the piezo-composite actuators have been calculated. A lay-up geometry for the PZT ceramic layer to have compression stress in the geometrical principal direction has been designed.

• 대한기계학회논문집A
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• 제30권1호
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• pp.84-89
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• 2006

A wireless capsule endoscope has been developed to replace the conventional endoscope. However, the commercialized capsule endoscope moves passively by peristaltic waves, which has some limitations for doctors to diagnose more thoroughly and actively. In order to solve this problem, a locomotive mechanism is proposed for wireless capsule endoscopes. Based on the tests of various actuators, a piezo actuator is selected as a micro actuator for capsule endoscope. In general, piezo actuators are known to have limited displacement with high voltage supply. In order to overcome the limitation of common piezo actuator, the impact based piezo actuator, is developed to realize long stroke up 11mm. By using the impact based piezo actuator, a prototype of an earthworm-like locomotive mechanism was developed. In addition, the proposed locomotive mechanism has engraved clamps mimicked the claw of an insect. The earthworm-like locomotive mechanism has 15 mm in diameter and 30mm under retraction stage and 41 mm under elongation stage in total length. Hollow space is allocated to comprise essential endoscope components such as a camera, a communication module, bio sensors, and a battery. For the feasibility test of proposed locomotive mechanism, a series of experiments were carried out including in-vitro tests. Based on results of the experiments, we conclude that the proposed locomotive mechanism is effective to be used for micro capsule endoscopes.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2013년도 춘계학술대회 논문집
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• pp.454-459
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• 2013

For the purpose of rapid development and superior design quality assurance, sophisticated finite element model for SOM(Spatial Optical Modulator) piezo actuator of MOEMS device has been developed and evaluated for the accuracy of dynamics and residual stress analysis. Parametric finite element model is constructed using ANSYS APDL language to increase the design and analysis performance. Geometric dimensions, mechanical material properties for each thin film layer are input parameters of FE model and residual stresses in all thin film layers are simulated by thermal expansion method with psedu process temperature. $6^{th}$ mask design samples are manufactured and $1^{st}$ natural frequency and 10V PZT driving displacement are measured with LDV. The results of experiment are compared with those of the simulation and validate the good agreement in $1^{st}$ natural frequency within 5% error. But large error over 30% occurred in 10V PZT driving displacement because of insufficient PZT constant $d_{31}$ measurement technology.

• JSTS:Journal of Semiconductor Technology and Science
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• 제2권4호
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• pp.246-252
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• 2002

Two kinds of PZT cantilevers integrated with a piezoresistor have been newly designed, fabricated, and characterized for high speed AFM. In first cantilever, a piezoresistor is used to sense atomic force acting on tip, while in second cantilever, a piezoresistor is integrated to calibrate hysteresis and creep phenomena of the PZT cantilever. The fabricated PZT cantilevers provide high tip displacement of $0.55\mu\textrm{m}/V$ and high resonant frequency of 73 KHz. A new cantilever structure has been designed to prevent electrical coupling between sensor and PZT actuator and the proposed cantilever shows 5 times lower coupling voltage than that of the previous cantilever. The fabricated PZT cantilever shows a crisp scanned image at 1mm/sec, while the conventional piezo-tube scanner shows blurred image even at $180\mu\textrm{m}/sec$. The non-linear properties of the PZT actuator are also well calibrated using the piezoresistive sensor for calibration.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.828-831
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• 2003

The benefits of the pneumatic valve with piezoelectric element are faster response times, low energy consumption, and the ability to be used in hazardous environments and field bus systems. In this paper, PZT actuator, 2 and 3 stages pneumatic valve were designed and manufactured. Also. characteristics of the pneumatic valve with piezoelectric element were tested with a testing system. It is confirmed that the PZT actuator is useful one for controlling the direction of pilot valve.

• 한국항공우주학회지
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• 제35권3호
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• pp.218-224
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• 2007

PZT와 같은 압전 재료는 능동 진동 억제 분야에서 널리 사용되고 있지만 단일 PZT의 경우 장착 과정에서의 손상, 전기 누전, 낮은 피로 성능과 같은 문제가 지적되고 있다. 이러한 문제를 해결하기 위하여 개발된 LIPCA 작동기는 여러 층의 복합재료와 PZT 층으로 구성되어 있다. 본 연구에서는 LIPCA 작동기를 끝단 질량이 부착된 알루미늄 외팔보의 진동을 억제하는데 적용하였다. 양변위 되먹임 제어 알고리듬을 사용하였으며, 필터 주파수를 대상 모드의 첫 번째 고유진동수에 맞추었다. 실험적으로 구한 알루미늄 보의 고유 진동수는 유한요소 해석의 결과와 잘 일치하였다. LIPCA 작동기를 능동 진동제어에 적용할 때 효율성을 시간과 주파수 영역에서 확인하고자 하였는데, 실험 결과 PPF제어를 사용한 LIPCA 작동기가 자유 진동의 안정화 시간과 강제 진동의 진폭을 효과적으로 제어할 수 있었다. 사례 연구로 다른 두께를 가지는 보의 강제 진동 제어를 수행하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.190-194
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• 2001

Because, Piezo-electric transducer(PZT) transform electric energy into mechanical energy, it is a adequate material for positioning control and force control, take excellent properties as actuator with high speed and high performance. Recently, researches of ultra precision positioning using this PZT are advanced in. In this paper, we use a actuator of PZT, design a positioning apparatus with ultra precision position apparatus as hinge structure. Because of this purpose, before, we were confirmed in control properties of ultra precision stage by FEM method.

• 제어로봇시스템학회논문지
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• 제22권4호
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• pp.271-275
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• 2016

For machining systems like the motor driven linear stage which have high precision positioning with a long stroke, it is necessary to examine the repeatability of the reference position decision. Though piezo (PZT) actuator driven linear stages have high precision feed drivers and a short stroke, they have some limitations for reference position decisions if they have not been equipped with an accurate home sensor. This study was performed to examine the repeatability for home position decision of a EE-SX671 photo sensor as a home switch by using piezo actuator driven linear stages and capacitance probe.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2005년도 창립60주년 기념 추계 학술대회
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• pp.200.2-200.2
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• 2005

• 유공압시스템학회논문집
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• 제2권3호
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• pp.6-11
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• 2005

A household gas valve is used for flow control of LPG(Liquefied Petroleum Gas) or LNG(Liquefied Natural Gas) of which pressure is about $200mmH_2O(\fallingdotseq\;0.0196[bar])$. Currently, two kinds of valves such as rotary type and button type are widely used in many applications. But, these valves have some problems that they are not controllable and reliable. Piezo actuation combined with modem microelectronics provides a reliable, quiet, low energy, infinitely adjustable gas valve. In this paper, gas valve using piezo actuator which are bimorph and a circle type was studied. Also, Prototype for gas valve was manufactured and characteristics of the prototype gas valve were analyzed.