• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1995년도 춘계학술대회 논문집
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• pp.40-62
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• 1995

A micro positioning system using piezoelectric actuators have very wide application region such as ultra-precision machine tool optical device measurement system. In order to keep a high precision displacement resolution it to useful to take a position sensor and feedback of the error. From the practical point of view high-resolution displacement sensor systems are very expensive and it is difficult to make such a sensitive sensor work properly in a poor operational environment of industry. In this study a piezo-electric micro-depth control system which does not require position sensor but piezoelectric voltage feedback has been developed. It is driven by hysteresis-considering reference input voltage calculated in advance and actuator/sensor characteristics of piezoelectric materials. From the result of experiments a fast and stable response of micro-depth control system has been achieved and an efficient technique to control the piezoelectric actuator suggested.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 1997년도 춘계학술대회논문집; 경주코오롱호텔; 22-23 May 1997
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• pp.434-439
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• 1997

This paper presents the active control of a flexible plate vibration. The plate was excited by white noise point force and the control was performed by one or two piezo ceramic actuator bonded to the surface of the plate. An adaptive controller based on filtered-x or multiple filtered-x LMS algorithm was used and the controller was defined by minimizing the square of the response of error sensor. In the experiment, PZT sensor was used as an error sensor while white noise was applied as a disturbance. In the case of multiple channel control, more than 22 dB of vibration reduction was achieved. Results indicate that the vibration of a flexible plate could be controlled effectively when the piezo ceramic actuator was used with multiple filtered-x LMS algorithm.

• 대한의용생체공학회:학술대회논문집
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• 대한의용생체공학회 1995년도 춘계학술대회
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• pp.61-63
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• 1995

The grabber used for the manipulation of single cell is developed by employing the piezo actuator as a source of grabbing force and this system consists of sucking cylinder, XYZ stage and inverted microscopy. With this grabbing system, 2 experiments are performed and they are as follows; 1) the relation between displacement change of piezo actuator and applied voltage was estimated by using sucking cylinder, 2) we grabbed plotoplast of cabbage's leaf-cell with this system. These experiments showed that the proposed grabbing system can be applicable as a single cell handling device in the field of biotechnology and medicine.

• 멤브레인
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• 제14권2호
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• pp.142-148
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• 2004

본 연구는 호흡부전환자를 위한 진동형 혈관 내 폐 보조장치를 사용하여 산소전달효율을 향상시키기 위한 연구이다. 유량은 점프와 유량을 사용하여 조정하였다. 가진 장치는 압전 진동자, 함수 발생기와 전력 증폭기로 구성하였다. 기체의 유량은 120 cm 길이의 중공사를 통하여 6 L/min까지 하였으며 압전 진동자로 가진 하였다. PVDF 센서와 FRF를 사용하여 VIVLAD에서 발생하는 주파수를 검출하였다. 실험결과, 최대 진폭이 발생하고 중공사들에 진동이 전달되어 최대 산소전달속도가 발생함을 확인할 수 있었다. 이 최대 진폭은 다양한 유속과 각각의 모듈에서 35 Hz 영역에서 발생함을 확인할 수 있었다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2013년도 춘계학술대회 논문집
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• pp.454-459
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• 2013

For the purpose of rapid development and superior design quality assurance, sophisticated finite element model for SOM(Spatial Optical Modulator) piezo actuator of MOEMS device has been developed and evaluated for the accuracy of dynamics and residual stress analysis. Parametric finite element model is constructed using ANSYS APDL language to increase the design and analysis performance. Geometric dimensions, mechanical material properties for each thin film layer are input parameters of FE model and residual stresses in all thin film layers are simulated by thermal expansion method with psedu process temperature. $6^{th}$ mask design samples are manufactured and $1^{st}$ natural frequency and 10V PZT driving displacement are measured with LDV. The results of experiment are compared with those of the simulation and validate the good agreement in $1^{st}$ natural frequency within 5% error. But large error over 30% occurred in 10V PZT driving displacement because of insufficient PZT constant $d_{31}$ measurement technology.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.1023-1024
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• 2010

• 한국마린엔지니어링학회:학술대회논문집
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• 한국마린엔지니어링학회 2006년도 전기학술대회논문집
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• pp.33-34
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• 2006

In this study, a prototype piezo-driven Injector. as a new method driven by piezoelectric energy, has been designed and fabricated based on the concept of inverse piezo-electric effect to overcome the major drawbacks of conventional solenoid-driven injector with a fixed and slow control of injection rate. The effects of an electric control between the solenoid valve and piezo-ceramic stack for injector needle's driving on the dynamic characteristics were usually investigated. We found that this piezo-electric actuator has the main advantage to drastically reducing the time of injector nozzle opening, as well to exert higher force output levels.

• 대한기계학회논문집A
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• 제28권10호
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• pp.1541-1548
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• 2004

A nano-stage simulation tool is developed for an advanced E-beam lithography system. Even if piezo-actuators are believed to be compatible fer the E-beam lithograpy system it is difficult to predict their characteristics due to their nonlinearities such as hysteresis and creep. In this paper, the nonlinear properties are modeled for a piezo-actuator by considering the voltage range and speed variations. The hysteresis is described as the first order differential equation with 24 sets of parameters and the creep is modeled as a time-dependent logarithmic function with 2 sets of a parameter. A two-axis nano stage with piezo-actuators are investigated for realizing nano scale motions. The characteristics of flexure guide mechanisms are analyzed based on the finite element method using the ANSYS software. The simulation tool for the nano stage is constructed by using the RecurDyn software. The dynamic response of the nano stage is obtained in simulations and compared with the experimental data.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.207-210
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• 2002

This paper is concerned with the experiments on the active vibration control of a plate with piezoceramic sensors and actuators. The natural frequencies of the composite plate featured by a piezo-film sensor and piezo-ceramic actuator are calculated by using the modal analysis method. Modal coordinates are introduced to obtain the state equations of the structural system. Six natural frequencies were considered in the modelling, because robust control theory which has inherent robustness to structured uncertainty is adopted to suppress the transients vibrations of a glass fiber reinforced(GFR) composite beam. A robust controller satisfying the nominal performance and robust performance is designed using robust theory based on the structured singular value. Simulations were carried out with the designed controller and effectiveness of the robust control strategy was verified by results.

• 한국정밀공학회지
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• 제23권1호
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• pp.201-208
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• 2006

Recently, there are many studies for the micro-machining using Piezo actuator. However, because of its step-by-step motion, it is nearly impossible to increase the machining accuracy for a circular path. To increase the accuracy, it is well known that it is necessary the finer and synchronous movement for x-y axes. Therefore, this paper proposes an adaptive control for finer movement of the actuator, and realizes a synchronous control for the x-y axes. The experimental results show that the machining accuracy is remarkably improved.