• Proceedings of the KIEE Conference
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• 2005.10b
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• pp.514-516
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• 2005

압전 구동기(Piezo actuator)는 수 나노미터 수준의 위치정밀도와 고분해능을 가지고 있으나 비선형 특성인 히스테리시스(Hysteresis)는 정상상태에서 위치 오차를 발생하는 주요 원인이 된다. 현재까지 히스테리시스를 보상하기 위해 피 프 포워드 제어 방법, Pl 제어 방법, $H_{\infty}$제어 방법 등이 연구되어 왔지만 저주파 대역의 외란(disturbance)까지 고려하여 시스 템을 주파수 영역에서 설계, 분석하는 방법에 대한 연구는 미흡하였다. 본 논문은 압전 구동기의 위치 제어를 위한 제어기의 설계와 이를 주파수 영역에서 분석하는 내용을 다룬다. 제어기의 설계는 히스테리시스를 보상하기 위해 극점 배치 방법과 외란 관측기(Disturbance observer)를 기본으로 하였으며 적분제어를 적용하여 시스템 민감도(sensitivity)를 개선하였다. 시뮬레이션과 실험을 통하여 설계한 제어기가 히스데리시스에 대한 보상과 민감도의 개선에 효율적임을 검증하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.190-194
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• 2001

Because, Piezo-electric transducer(PZT) transform electric energy into mechanical energy, it is a adequate material for positioning control and force control, take excellent properties as actuator with high speed and high performance. Recently, researches of ultra precision positioning using this PZT are advanced in. In this paper, we use a actuator of PZT, design a positioning apparatus with ultra precision position apparatus as hinge structure. Because of this purpose, before, we were confirmed in control properties of ultra precision stage by FEM method.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.05a
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• pp.228-232
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• 2004

This paper is to identify the position of random disturbance on flexible dynamic system, and the position of the piezo ceramic actuator 0 minimize tip response. Correlation of the output signals from each parts on flexible system is used to identify the position of random disturbance. Except the correlation with an output signal from the position of random disturbance, other correlations have time delay. This is a base idea to identify the position on this study.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.8
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• pp.2501-2507
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• 1996

In this paper actively controlled air bearing is investigated to overcome the defects of air bearing such as low stiffness and damping coefficients. The actively controlled air beairng is composed of an air bearing, a gap sensor, a controller, and a piezo actuator. By controlling the position of air bearing with piezo actuator, the position of floating object is controlled. In this study the proportional-Integral-Derivative controller is employed. Active air bearing is investigated numerically and experimentally. There is good agreement between the simulation and the experimental results. It is shown that the stiffness and damping characteristics and positioning experimental results. It is shown that the stiffness and damping characteristics and positioning accuracy of air bearing can be improved by means of adopting actively controlled air bearing.

• Journal of Institute of Control, Robotics and Systems
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• v.22 no.4
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• pp.271-275
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• 2016

For machining systems like the motor driven linear stage which have high precision positioning with a long stroke, it is necessary to examine the repeatability of the reference position decision. Though piezo (PZT) actuator driven linear stages have high precision feed drivers and a short stroke, they have some limitations for reference position decisions if they have not been equipped with an accurate home sensor. This study was performed to examine the repeatability for home position decision of a EE-SX671 photo sensor as a home switch by using piezo actuator driven linear stages and capacitance probe.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.11a
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• pp.924-927
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• 2004

Measurements of fluctuating wall pressures were made with a linear array of 16 piezo-electric transducers beneath a fully-developed turbulent boundary layer. The piezoelectric bimorph actuator applied in this experiment has bonding structures of each polarity to make out-of-plane displacements rather than in-plane ones by using piezoelectric effect To specify the boundary layer characteristics at the location where the actuation was applied, the wall friction coefficients and $Re_\theta$ were measured by using the CPM method. The actuating frequency for the bimorph film was determined according to the priori bursting frequency from boundary layer parameters. The reduction of convecting energies in wave-number space was clearly observed at the specified actuating frequencies.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.12
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• pp.194-201
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• 1998

The beam rotating actuator has been developed. It can be utilized to improve the data transfer rate for the optical disk systems, Newly developed laser beam rotating actuator is applied to put multi-beam spots on more than one track on the optical disk simultaneously. The beam rotating actuator is made of piezoelectric ceramic bimorph as the form of cantilever, Piezoelectric actuators with high resolution, high stiffness and fast frequency response are widely assembled in micropositioning applications. Therefore, the actuator has above 50Hz natural frequency. Beam array is rotated using the dove prism in the end of beamrotator. The dynamic equation of beam rotating actuator is derived theoretically. The actuator is designed on the ground of this analysis. The performance of the beam rotating actuator is verified as the dynamics frequency performance is measured using the dynamic analyzer and sensor.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.778-783
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• 2003

The problem considered in this paper is about the collocation of sensor and actuator for the active control of sound and vibration. It is well-known that a point collocated sensor-actuator pair offers an unconditional stability with very high performance when it is used with a direct velocity feedback (DVFB) control, because the pair has strictly positive real (SPR) property. In order to utilize this SPR characteristics, a matched piezoelectric sensor and actuator pair is considered, but this pair suffers from the in-plane motion coupling problem with the out-of$.$plane motion due to the piezo sensor and actuator interaction. This coupling phnomenon limits the stability and performance of the matched pair with DVFB control. As a new alternative, a point sensor and piezoelectric actuator pair is also considered, which provides SPR property in all frequency range except at the first resonance in very low frequency. This non-SPR resonance could be minimized by applying a phase lag compensator.

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.429-429
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• 2000

Micro positioning mechanism is the key technology in many fields, such as scanning electron microscopy (SEM), x-ray lithography, mask alignment and micro-machining. In the paper, a 3DOF parallel-type micro-positioning mechanism is proposed. This mechanism uses piezo-actuators and Flexure hinge to control x, y and $\theta$ motion. It is shown both analytically and numerically that 2 DOF flexure hinge model was better precision than 1 DOF flexure hinge design.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.35 no.3
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• pp.218-224
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• 2007

Although piezoelectric materials such as PZT have been widely used as actuators in the field of active vibration suppression, the use of bare PZT as an actuator may cause some drawbacks such as critical breaks in the installation process, short circuits in the host material and low fatigue performance. The LIPCA-C2 (lightweight piezocomposite actuator) was developed to alleviate these problems. We implemented the LIPCA as an actuator to suppress the vibration of an aluminum cantilever beam with a tip mass. In our test, we used positive position feedback control algorithm. The filter frequency for this type of feedback should be tuned to the natural frequency of the target mode. The first three experimental natural frequencies of the aluminum cantilever beam agree well with the results of finite element analysis. The effectiveness of using the LIPCA as an actuator in active vibration suppression was investigated with respect to the time and frequency domains, and the experimental results show that LIPCAs with PPF control can significantly reduce the amplitude of forced vibrations and the settling time of free vibrations. For a case study, the forced vibration control of several beams with different thicknesses were performed.