• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1995.03a
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• pp.40-62
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• 1995

A micro positioning system using piezoelectric actuators have very wide application region such as ultra-precision machine tool optical device measurement system. In order to keep a high precision displacement resolution it to useful to take a position sensor and feedback of the error. From the practical point of view high-resolution displacement sensor systems are very expensive and it is difficult to make such a sensitive sensor work properly in a poor operational environment of industry. In this study a piezo-electric micro-depth control system which does not require position sensor but piezoelectric voltage feedback has been developed. It is driven by hysteresis-considering reference input voltage calculated in advance and actuator/sensor characteristics of piezoelectric materials. From the result of experiments a fast and stable response of micro-depth control system has been achieved and an efficient technique to control the piezoelectric actuator suggested.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1997.04a
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• pp.434-439
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• 1997

This paper presents the active control of a flexible plate vibration. The plate was excited by white noise point force and the control was performed by one or two piezo ceramic actuator bonded to the surface of the plate. An adaptive controller based on filtered-x or multiple filtered-x LMS algorithm was used and the controller was defined by minimizing the square of the response of error sensor. In the experiment, PZT sensor was used as an error sensor while white noise was applied as a disturbance. In the case of multiple channel control, more than 22 dB of vibration reduction was achieved. Results indicate that the vibration of a flexible plate could be controlled effectively when the piezo ceramic actuator was used with multiple filtered-x LMS algorithm.

• Proceedings of the KOSOMBE Conference
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• v.1995 no.05
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• pp.61-63
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• 1995

The grabber used for the manipulation of single cell is developed by employing the piezo actuator as a source of grabbing force and this system consists of sucking cylinder, XYZ stage and inverted microscopy. With this grabbing system, 2 experiments are performed and they are as follows; 1) the relation between displacement change of piezo actuator and applied voltage was estimated by using sucking cylinder, 2) we grabbed plotoplast of cabbage's leaf-cell with this system. These experiments showed that the proposed grabbing system can be applicable as a single cell handling device in the field of biotechnology and medicine.

• Membrane Journal
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• v.14 no.2
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• pp.142-148
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• 2004

This paper presents the enhancement of oxygen transfer efficiency using vibrating intravascular lung assist device (VIVLAD) for patients having chronic respiratory problems. The flow rate was controlled by the pump and monitored by a built-in flow meter. The vibration apparatus was composed of a piezo-actuator, a function generator, and a power amplifier. Gas flow rates of up to 6 L/min through the 120-cm-long hollow fibers have been achieved by exciting a piezo-actuator. The output PVDF sensor and FRF (frequency response function) were investigated by various frequency in VIVLAD. As a result, the maximum oxygen transfer rate was found to occur with maximum amplitude and the transfer of vibration to the hollow fiber membranes. It was excited by the frequency band of 35 Hz at various distilled water flow rates, and various module types.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2013.04a
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• pp.454-459
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• 2013

For the purpose of rapid development and superior design quality assurance, sophisticated finite element model for SOM(Spatial Optical Modulator) piezo actuator of MOEMS device has been developed and evaluated for the accuracy of dynamics and residual stress analysis. Parametric finite element model is constructed using ANSYS APDL language to increase the design and analysis performance. Geometric dimensions, mechanical material properties for each thin film layer are input parameters of FE model and residual stresses in all thin film layers are simulated by thermal expansion method with psedu process temperature. $6^{th}$ mask design samples are manufactured and $1^{st}$ natural frequency and 10V PZT driving displacement are measured with LDV. The results of experiment are compared with those of the simulation and validate the good agreement in $1^{st}$ natural frequency within 5% error. But large error over 30% occurred in 10V PZT driving displacement because of insufficient PZT constant $d_{31}$ measurement technology.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.1023-1024
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• 2010

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2006.06a
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• pp.33-34
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• 2006

In this study, a prototype piezo-driven Injector. as a new method driven by piezoelectric energy, has been designed and fabricated based on the concept of inverse piezo-electric effect to overcome the major drawbacks of conventional solenoid-driven injector with a fixed and slow control of injection rate. The effects of an electric control between the solenoid valve and piezo-ceramic stack for injector needle's driving on the dynamic characteristics were usually investigated. We found that this piezo-electric actuator has the main advantage to drastically reducing the time of injector nozzle opening, as well to exert higher force output levels.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.10
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• pp.1541-1548
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• 2004

A nano-stage simulation tool is developed for an advanced E-beam lithography system. Even if piezo-actuators are believed to be compatible fer the E-beam lithograpy system it is difficult to predict their characteristics due to their nonlinearities such as hysteresis and creep. In this paper, the nonlinear properties are modeled for a piezo-actuator by considering the voltage range and speed variations. The hysteresis is described as the first order differential equation with 24 sets of parameters and the creep is modeled as a time-dependent logarithmic function with 2 sets of a parameter. A two-axis nano stage with piezo-actuators are investigated for realizing nano scale motions. The characteristics of flexure guide mechanisms are analyzed based on the finite element method using the ANSYS software. The simulation tool for the nano stage is constructed by using the RecurDyn software. The dynamic response of the nano stage is obtained in simulations and compared with the experimental data.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.207-210
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• 2002

This paper is concerned with the experiments on the active vibration control of a plate with piezoceramic sensors and actuators. The natural frequencies of the composite plate featured by a piezo-film sensor and piezo-ceramic actuator are calculated by using the modal analysis method. Modal coordinates are introduced to obtain the state equations of the structural system. Six natural frequencies were considered in the modelling, because robust control theory which has inherent robustness to structured uncertainty is adopted to suppress the transients vibrations of a glass fiber reinforced(GFR) composite beam. A robust controller satisfying the nominal performance and robust performance is designed using robust theory based on the structured singular value. Simulations were carried out with the designed controller and effectiveness of the robust control strategy was verified by results.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.1 s.178
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• pp.201-208
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• 2006

Recently, there are many studies for the micro-machining using Piezo actuator. However, because of its step-by-step motion, it is nearly impossible to increase the machining accuracy for a circular path. To increase the accuracy, it is well known that it is necessary the finer and synchronous movement for x-y axes. Therefore, this paper proposes an adaptive control for finer movement of the actuator, and realizes a synchronous control for the x-y axes. The experimental results show that the machining accuracy is remarkably improved.