• 제목/요약/키워드: Physical vapor transport

검색결과 92건 처리시간 0.022초

PVT법을 이용한 (011)면으로 성장된 AlN 단결정 성장에 관한 연구 (A study on growing of bulk AlN single crystals grown having a (011) growth face of by PVT method)

  • 강승민
    • 한국결정성장학회지
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    • 제25권1호
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    • pp.32-34
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    • 2015
  • PVT(Physical vapor transport)법으로 벌크형 종자 결정을 이용하여 AlN 단결정을 성장 시켰다. 성장과정은 고주파 유도 가열 코일을 이용한 방법으로 진행되었다. 카본 도가니의 하단에 원료 분말을 장입하고 종자 결정은 도가니의 상부에 부착하였다. 성장 조건으로 온도는 $2000{\sim}2100^{\circ}C$ 사이에서 이루어 졌으며 챔버내 압은 $1{\times}10^{-1}{\sim}200$ Torr로 유지하였다. 또한 가열 위치를 결정짓는 hot-zone 조절이 성장의 시간이 진행됨에 따라 수정되었다. 이러한 조건하에 약 600시간 성장시킨 결과로 장축 직경 17 mm 두께 7 mm의 AlN 단결정이 얻어졌으며, Laue X-Ray 장치을 이용하여 성장된 결정의 방향을 조사한 결과 R방향[011]으로 성장 되었음을 알 수 있었다.

편성물의 섬유의 종류, 실의 굵기 및 니트타입에 따른 투습완충능력 (Effect of Fiber Content, Yarn Size and Construction of Knit Fabrics on the Buffering Capacity against Water Vapor)

  • 유화숙;허윤숙;김은애
    • 한국의류학회지
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    • 제20권1호
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    • pp.228-238
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    • 1996
  • The purpose of this study was to evaluate the effect of chacteristics of knit fabrics on the microclimate of the skin simulating system. To determine the effect of characteristics of knit fabrics, vapor state of sweat pulse was simulated in the closed system. Different contents of fibers such as cotton, wool and polyester with different yarn size and knit types were chosen for specimens. The changes of humidity and temperature of air layer in the simulated systems were measured. Buffering indices, $K_d$ and $\beta_r$, were determined by considering $\alpha_p, \DeltaP_{max}, t_{max}, and tan\beta$. Physical properties of knit fabrics such as thickness, porosity, air resistance and moisture vapor transport were measured. Results showed that vapor pressure of wool was lower than cotton or polyester This was attributed to the hydrophilicity of wool which absorbed moisture rather quickly and retained in the knit fabric. The time to decrease vapor pressure was faster for polyester than cotton or wool. As a result, $K_d$ was in the order of wool> polye, item> cotton. $\beta_r$ of wool was rower than cotton or polyester due to its lowers porosity and slower desorption rate. For the yarn size, $K_d$ was in the order of 80's> 60's> 30's; thinner and lighter yarn showed better water vapor transport property. For knit type, buffering capacity of single jersey was better than interlock knit fabric. Statistical analysis showed that the air permeability was the most influential factor far the water vapor transport properties.

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Parametric studies on convection during the physical vapor transport of mercurous chloride ($Hg_2Cl_2$)

  • Kim, Geug-Tae;Lee, Kyong-Hwan
    • 한국결정성장학회지
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    • 제14권6호
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    • pp.281-289
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    • 2004
  • The temperature hump is found to be most efficient in suppressing parasitic nucleation. With the temperature humps, there are found to be observed in undersaturations along the transport path for convective-diffusive processes ranging from $D_{AB}$ = 0.0584 $\textrm{cm}^2$/s to 0.584 $\textrm{cm}^2$/s, axial positions from 0 to 7.5 cm. With decreasing Ar = 5 to 3.5, the temperature difference is increased because of the imposed nonlinear temperature profile but the rate is decreased. For 2 $\leq$ Ar $\leq$ 3.5, the rate is increased with the aspect ratio as well as the temperature difference. Such an occurrence of a critical aspect ratio is likely to be due to the effect of sidewall and much small temperature difference. The rate is decreased exponentially with the aspect ratio for 2 $\leq$ Ar $\leq$ 10. Also, the rate is exponentially decreased with partial pressure of component B, P for 1 $\leq$ P $\leq$ 100 Torr.$ B/ $\leq$ 100 Torr.

브로민화 수은(I)(Hg2Br2) 물리적 증착공정에서 온도농도대류의 기초연구 (Fundamental studies on thermosolutal convection in mercurous bromide(Hg2Br2) physical vapor transport processes)

  • 김극태;권무현
    • 한국결정성장학회지
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    • 제33권3호
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    • pp.110-115
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    • 2023
  • 브로민화 수은(I)(Hg2Br2) 물리적 증착법 공정에서 구성요소 B의 분압, PB를 40 Torr에서 200 Torr로 증가시켰을 때 1개의 셀(unicell)이 결정성장영역에서 기체상 공간의 중심으로 이동함을 보여주고 있다. PB = 40 Torr에서는 경계층 흐름이 지배적이고, PB = 200 Torr에서는 코어영역흐름(core region)을 보이고 있다. 고려되는 물리적 증착법 공정에서 PB = 40 Torr와 PB = 200 Torr에서 1개(single)의 셀(cell) 형태로 3차원의 유동의 흐름과 x, y 직교 중심축에 대하여 비대칭 유동흐름을 나타내고 있다. 소스와 결정 영역 사이의 임계 온도차는 약 30 K입니다. Hg2Br2의 총 몰 플럭스는 임계값에 도달할 때까지 온도차에 따라 증가한다. 임계 총 몰 플럭스에서 총 몰 플럭스는 갑자기 감소한다.

Ground-based model study for spaceflight experiments under microgravity environments on thermo-solutal convection during physical vapor transport of mercurous chloride

  • Choi, Jeong-Gil;Lee, Kyong-Hwan;Kim, Geug-Tae
    • 한국결정성장학회지
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    • 제17권6호
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    • pp.256-263
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    • 2007
  • For $P_B=50Torr,\;P_T=5401Torr,\;T_S=450^{\circ}C,\;{\Delta}T=20K$, Ar=5, Pr=3.34, Le=0.01, Pe=4.16, Cv=1.05, adiabatic and linear thermal profiles at walls, the intensity of solutal convection (solutal Grashof number $Grs=7.86{\times}10^6$) is greater than that of thermal convection (thermal Grashof number $Grt=4.83{\times}10^5$) by one order of magnitude, which is based on the solutally buoyancy-driven convection due to the disparity in the molecular weights of the component A ($Hg_2Cl_2$) and B (He). With increasing the partial pressure of component B from 20 up to 800 Torr, the rate is decreased exponentially. It is also interesting that as the partial pressure of component B is increased by a factor of 2, the rate is approximately reduced by a half. For systems under consideration, the rate increases linearly and directly with the dimensionless Peclet number which reflects the intensity of condensation and sublimation at the crystal and source region. The convective transport decreases with lower g level and is changed to the diffusive mode at $0.1g_0$. In other words, for regions in which the g level is $0.1g_0$ or less, the diffusion-driven convection results in a parabolic velocity profile and a recirculating cell is not likely to occur. Therefore a gravitational acceleration level of less than $0.1g_0$ can be adequate to ensure purely diffusive transport.

PVT법에 의한 AlN 단결정 성장에서 Hot-Zone 의존성 (Dependance of hot-zone position on AlN single crystal growth by PVT method)

  • 인경필;강승민
    • 한국결정성장학회지
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    • 제26권2호
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    • pp.84-88
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    • 2016
  • PVT(Physical vapor transport)법을 이용하여 AlN 단결정을 성장시켰으며 유도 코일의 위치를 변화시켜가면서 핫존의 위치가 달라짐에 따라 변화하는 결과를 비교하였다. 그라파이트 도가니가 사용되었으며 그 규격은 ${\Phi}90{\times}H120$이었다. 온도는 $1950{\sim}2050^{\circ}C$이며 챔버 압력은 150에서 1 Torr까지 사용되었다. 또한 핫존은 실험 회차에 따라 변화를 주었으며 이 결과가 비교되었다. 핫존의 위치가 AlN 단결정 응축 위치에서부터 충분히 아래쪽(> 40 mm)인 경우 성장된 결정 사이즈는 다른 조건들에 비해 양호했지만(${\sim}300{\mu}m/hr$), 조건 재현성은 상당히 떨어졌다. 반대로 핫존과 AlN 성장 위치간의 거리가 가까워질수록 성장된 결정의 크기는 작아지고 결정의 핵이 생성되는 빈도는 낮아지면서 성장된 결정의 질의 안정성은 증가했다. 성장 속도와 품질 두 가지 면에서 초기 핫존 코일의 위치가 결정 성장 위치로부터 20 mm 정도일 때가 가장 우수했다. 핫존의 위치는 매우 민감한 결과를 주었고 이것에서 더 나아가 코일의 이동 속도 또한 최적으로 컨트롤 되어야만 최적의 성장 조건이 설정될 수 있다.

Importance of convection during physical vapor transport of Hg2Cl2 in the presence of Kr under environments of high gravitational accelerations

  • Kim, Geug-Tae
    • 한국결정성장학회지
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    • 제22권1호
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    • pp.29-35
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    • 2012
  • Special attention in the role of convection in vapor crystal growth has been paid since some single crystals under high gravity acceleration of $10g_0$ appear considerably larger than those under normal gravity acceleration ($1g_0$). With increasing the gravity acceleration from $1g_0$ up to $10g_0$, the total molar flux for ${\Delta}T$ = 30 K increases by a factor of 4, while for ${\Delta}T$ = 90, by a factor of 3. The maximum molar fluxes for three different gravity levels of $1g_0$, $4g_0$ and $10g_0$, appear approximately in the neighborhood of y = 0.5 cm, and the molar fluxes show asymmetrical patterns, which indicate the occurrence of either one single or more than one convective cell. As the gravitational level is enhanced form $1g_0$ up to $10g_0$, the intensity of convection is increased significantly through the maximum molar fluxes for ${\Delta}T$ = 30 K and 90 K. At $10g_0$, the maximum total molar flux is nearly invariant for for ${\Delta}T$ = 30 K and 90 K. The total molar flux increases with increasing the gravity acceleration, for $1g_0{\leq}g_y{\leq}10g_0$, and decreases with increasing the partial pressure of component B, a noble gas called as Kr (Krypton), $P_B$. The ${{\mid}U{\mid}}_{max}$ is directly proportional to the gravity acceleration for 20 Torr $P_B{\leq}300$ Torr. As the partial pressure of $P_B$ (Torr) decreases from 300 Torr to 20 Torr, the slopes of the ${{\mid}U{\mid}}_{max}s$ versus the gravity accelerations increase from 0.29 sec to 0.54 sec, i.e. by a factor of 2. The total molar flux of $Hg_2Cl_2$ is first order exponentially decayed with increasing the partial pressure of component B, $P_B$ (Torr) from 20 Torr up to 300 Torr.

PVT 방법에 의한 링 모양의 SiC 단결정 성장 (Growth of ring-shaped SiC single crystal via physical vapor transport method)

  • 김우연;제태완;나준혁;최수민;이하린;장희연;박미선;장연숙;정은진;강진기;이원재
    • 한국결정성장학회지
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    • 제32권1호
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    • pp.1-6
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    • 2022
  • 본 연구에서는 PVT(Physical Vapor Transport) 방법을 이용하여 반도체 식각 공정용 소재로 사용되는 링 모양의 SiC(Silicon carbide) 단결정을 제조하였다. 흑연 도가니 내부에 원기둥 형태의 흑연 구조물을 배치하여 PVT법에 의한 링 모양의 SiC 단결정을 성장시켰다. 단결정 기판을 시드로 사용하여 성장한 경우 크랙이 없는 우수한 특성의 포커스링을 얻을 수 있었다. 단결정 포커스링과 CVD 포커스링의 에칭 특성을 살펴본 결과 단결정 포커스링의 에칭속도가 줄어들었고, 단결정 포커스링이 우수한 내플라즈마성을 보여준다고 할 수 있다.

고온 다습한 환경에서의 주관적 착용 쾌적감과 관련 물성 변인 (Subjective Evaluation of Wear Comfort and Related Physical Variables under Warm and Humid Condition)

  • 김정화;홍경희;조승식
    • 한국의류학회지
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    • 제21권6호
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    • pp.1021-1030
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    • 1997
  • Physical variables related to the subjective evaluation of wear comfort were explored. Experimental fabrics was those used in the previous paper where subjective sensations of women's thin shirts were reported. Fabrics include 100% cotton (unfinished), 100% cotton (water repellent finished), cotton/polyester 35/65 (unfinished), cotton/polyester 35/65 (peach skin finished), 100% polyester fabric(plain), 100% polyester crepe. Among various physical properties of the experimental fabrics, heat 8E moisture transport properties and surface properties were chosen as important variables based on the regression coefficient. Especially, humidity at the microclimate in dynamic mode was highly correlated to the subjective evaluation and appeared to be a sensitive physical predictor, compared to dry thermal transmission rate or water vapor transmission rate. Surface characteristic parameters, however, did not show consistant trend in the prediction of the human's subjective sensation. Interaction between surface properties and humidity measurement was also observed.

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