Hygroscopic Characteristics of $TiO_{2-x}$ Thin Film Humidity Sensors by RF Magnetron Sputtering
(고주파 마그네트론 스퍼터링에 의한 $TiO_{2-x}$ 박막 습도센서의 습도감지특성)
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- Journal of Sensor Science and Technology
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- v.7 no.2
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- pp.83-89
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- 1998