• 한국기계가공학회지
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• 제3권4호
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• pp.81-87
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• 2004

The titanium has many superior characteristics such as specific strength, heat resistance, corrosion resistance, organism compatibility, non-magnetic and etc. and their quantity are abundant. This study performed turning operation of Ti-6Al-4V alloy using the TiAlN coated tool which was treated with PVD. Experimental works were also executed to measure cutting force, chip figuration and surface roughness for different cutting conditions. As a result of study, tool wear was serious at the condition over 100m/min of cutting speed. The excellent cutting condition of cutting depth was at 1.0mm.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1999년도 추계학술대회 논문집 - 한국공작기계학회
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• pp.307-314
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• 1999

By using AIP(Arc Ion Plating) of a physical vapor deposition for the first time in Korea a ceramic tool whose surface is coated single layeredly with TiN is developed. In addition, cutting resistance appearing in the process of finishing cut of hardened carbon tool steel, STC3 is studied. The principal and radial components of cutting resistance in those cutting conditions appear to be the same or similar, and the feed component is relatively small. The feed component is found to be in proportion to cutting width, and the radial component in proportion to cutting thickness. Owing to coating the cutting resistance of a TiN coated ceramic tool increases compared with that of a general ceramic tool.

• Applied Science and Convergence Technology
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• 제23권6호
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• pp.371-375
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• 2014

Diffusion coefficient of Fe in polycrystalline host ZnSe as a mid-IR gain medium has been measured in the annealing temperature ranges of 850 to $950^{\circ}C$. The synthesis of the samples was carried out in quartz ampoule in which the Fe thin film deposited by physical vapor evaporation method on the ZnSe. One can realize that the diffusion coefficient strongly depends on the surface active surfactants through the cleaning process and the substrate temperature during the thin film deposition leading to $2.04{\times}10^{-9}cm^2/s$ for $Fe^{2+}:ZnSe$. The Annealing temperature dependence of the Fe ions diffusion in ZnSe was used to evaluate the activation energy, $E_a$=1.39 eV for diffusion and the pre-exponential factor $D_0$ of $13.5cm^2/s$.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.328-328
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• 2011

Wetting phenomena have been heavily studied for industrial and academic researches especially tuning the wettability between hydrophilicity and hydrophobicity. Wicking through the surface texture is shown on superhydrophilic surface while rolling (or dewetting) on the patterns of superhydrophobic surface. These wetting phenomena are known to be affected by surface wettability determined with physical surface patterns as well as chemical composition of surface layer. In this research, we introduce a method to control the wettability of a thin C-SiOx film from hydrophobic to hydrophilic using a mixture gas of HMDSO/$O_2$ by plasma polymerization with rf-CVD (radio frequency-Chemical Vapor Deposition). Wettability was finely controlled by changing the ratio of HMDSO/$O_2$. Hydrophilicity increased as the ratio decreased, while hydrophobicity was enhanced by the ratio. Moreover, fine control from superhydrophilicity to superhydrophobicity was achieved by C-SiOx coating on the Si wafer with prepatterns of submicron-sized pillar array formed by $CF_4$ plasma etching.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2015년도 추계학술대회 논문집
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• pp.147-147
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• 2015

물리기상증착을 이용하여 알루미늄(Al)과 마그네슘(Mg)의 조성이 다른 2층 구조를 갖는 박막을 강판 위에 코팅한 후 열처리를 실시하여 박막의 미세구조 변화와 합금상을 관찰하였다. Al-Mg 코팅강판의 내부식성을 평가하여 Al-Mg 코팅층의 미세구조와 합금상 변화가 내부식 특성에 미치는 영향을 확인하였다. Al-Mg 박막의 조성은 Al 박막과 Mg 박막의 증착율과 두께 변화를 이용하여 조절하였다. 대기 중에서 350, 400, $450^{\circ}C$의 온도로 2, 3, 10분 동안 열처리를 실시하였다. Al-Mg 코팅 강판은 열처리를 실시하면 치밀한 구조로 변화하였으며 Al-Mg 코팅층 내부에 작을 알갱이 구조가 나타나는 것을 확인하였다. 열처리를 통해서 Al-Mg 합금상이 생성되었다. 합금상의 생성으로 Al-Mg 코팅강판의 내식성에도 영향을 미친 것으로 판단된다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2015년도 추계학술대회 논문집
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• pp.251-251
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• 2015

최근 질병 조기진단에 대한 사회적 요구가 높아짐에 따라 이에 대한 기술에 관심이 집중되고 있다. 그 중 표면증강라만산란(surface enhanced Raman scattering(SERS))을 이용하여 인체 내 소량의 바이오마커를 검출하는 연구가 활발히 진행중이다. 본 연구에서는 바이오마커의 검지감도를 최대치로 증가시키기 위해 SERS 기판의 나노구조를 최적화 하였다. SERS 기판 표면의 나노구조, 크기, 형상, 밀도 등에 따라 검지감도가 변화되기 때문에 이를 제어하기 위해 증착공정 변수에 변화를 주어 표면의 나노구조를 형성하였다. 이를 분석하기 위해 SEM, XRD를 사용하였으며 최적화된 SERS 기판을 활용하여 Rhodamine 6G의 신호가 $1{\times}10^5$ 이상의 enhancing factor를 확인하였다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2018년도 춘계학술대회 논문집
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• pp.42.1-42.1
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• 2018

정전용량방식 터치스크린패널은 모바일에서 차량용 디스플레이에 이르기까지 휴대용 전자장치를 위한 직관적인 사용자 인터페이스 덕분에 최근 몇 년간 관심이 집중 되었다. 본 연구에서는 우수한 성형성과 정확성 및 고감도 터치패널 제작을 위해 Ionized Physical Vapor Deposition (IPVD)시스템을 이용하여 멀티레이어(Oxide/Metal/Oxide)의 투명전극을 형성 하였다. 멀티레이어 전극은 5.1 ohm/sq의 면저항과 89.5%의 투과율을 나타내며, 높은 신뢰성 및 접촉력의 특성을 나타내는 것을 확인 하였다. 이를 통해, 기존의 패턴크기보다 작은 3.8mm pitch 패턴의 15인치 GFF타입 터치패널을 성공적으로 제작 하였으며, 터치센서는 우수한 선형성, 정확성 및 고감도 스타일러스펜 (직경=1mm)의 멀티터치를 구현 하였다.

• The Korean Journal of Ceramics
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• 제4권4호
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• pp.340-344
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• 1998

Failure mechanisms were investigated for the two layer thermal barrier coatings consisting of NiCrAlY bond coat and $ZrO_2$-8wt.% $Y_2O_3$ ceramic coating during cyclic oxidation. $Al_2O_3$ developed at the ceramic coating/bond coat interface first, followed by the Cr/Ni rich oxides such as $NiCr_2O_4$ and $Ni(Al, Cr)_2O_4$ during cyclic oxidation. It was observed that the spalling of ceramic coatings took place primarily within the NiCrAlY bond coat oxidation products or at the interface between the bond coat oxidation products and zirconia based ceramic coating or the bond coat. It was also observed that the fracture within these oxidation products occurred with the formation of $Ni(Cr, Al)_2O_4$ spinel or Cr/Ni rich oxides. It was therefore concluded that the formation of these oxides was a life-limiting event for the thermal barrier coatings.

• 소성∙가공
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• 제12권4호
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• pp.394-400
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• 2003

TiN coated films exhibit excellent mechanical properties such as high wear, erosion and corrosion resistances and a high thermal stability. Therefore, they are widely applied to a coating material in tools, ornaments, parts and semiconductors. However, the fracture of TiN coated films frequently occurs. The distribution of preferred orientations, i.e., texture, of TiN coated films strongly influences the fracture behavior of these films. In the present study. various TiN coating layers having different textures were prepared by the reactive ion physical vapor deposition and the texture dependence of friction coefficient, erosion and corrosion in these coating layers was investigated. The sample depicting the (115) texture parallel to the coating layer normal displayed a flatter surface than that observed from the sample having the (111) texture. The friction coefficient of TiN thin films was hardly dependent on the texture of coated samples. The samples having (115) texture displayed higher wear, erosion and corrosion resistances than the samples having (111) texture.

• 산업기술연구
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• 제27권A호
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• pp.157-162
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• 2007

This paper describes a power supply aimed at the production of plasma and its control method for a magnetron sputter in thin film coating process of PVD(Physical Vapor Deposition). Plasma load changes its impedance characteristic easily according to operating conditions and frequently produces electric arc. So. in this paper, a plasma power supply with improved output control performance in the transient state for the plasma load is presented. Also, it includes a strategy that can detect arc rapidly and reduce arc energy effectively into a load. The validity of the proposed power supply through experimentation on 20kW system was proved.