• Title/Summary/Keyword: Physical Vapor Deposition

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Measurement of the transition probabilities at 394.55 nm for physical vapor deposition of Gd (Gd 증기 증착용 394.55 nm 전이선의 전이확률 측정)

  • 고광훈;정의창;김택수;권덕희;노시표;김철중
    • Proceedings of the Optical Society of Korea Conference
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    • 2002.07a
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    • pp.12-13
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    • 2002
  • 원자력 산업용 중성자 흡수체 제조에 사용되는 Gd 금속증기 발생기에 설치할 목적으로 394.55 nm 전이선의 전이확률을 측정한 결과를 보고한다. 증기 증발률을 장시간 동안 일정한 양으로 유지하기 위해서는 증기밀도가 실시간으로 측정되어야 하고, 이를 위해 반도체 레이저를 광원으로 사용하는 원자흡수 분광계를 제작하고 있다. 전자빔 가열로 발생된 원자빔은 가속된 전자빔과의 충돌에 의하여 가열표면의 온도를 알면 설명할 수 있는 일반적인 원자빔 성질과는 매우 다른 특성을 가지고 있다. (중략)

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Ceramic Coating by Electron Beam PVD for Nanos-Tructure Control (나노구조 제어를 위한 EB-PVD법에 의반 세라믹스 코팅)

  • Matsbara, Hideaki
    • Ceramist
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    • v.9 no.6
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    • pp.24-29
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    • 2006
  • Electron beam physical vapor deposition (EB-PVD) process has currently been applied to thermal barrier coatings (TBCs) for aircraft engines. Due to unique columnar structure, EB-PVD TBCs have advantages in resistances to thermal shock and thermal cycle for their applications, compared to films prepared by plasma spray By the EB-PVD equipment, we successfully obtained yttria-stabilized zirconia (YSZ) layer which has columnar and feather like structure including a large amount of nano size pores and gaps. The EB-PVD technique has been developed for coating functional perovskite type oxides such as (La, Sr)MnO3. Electrode properties have been improved by interface and structural control.

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Effect of Nitride Coatings on Lifetime of Cold Forging Dies for Piston of Brake Master Cylinders (브레이크 마스터 실린더의 피스톤 단조용 펀치 수명에 대한 질화물 코팅의 영향)

  • Choi, J.M.;Lee, J.W.;Kim, M.K.;Park, J.S.
    • Transactions of Materials Processing
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    • v.25 no.5
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    • pp.313-318
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    • 2016
  • The plasma vapor coatings on two kinds of die steels have been carried out in order to identify the most optimized conditions. When TiN or TiAlN coatings were carried out on the substrates, the coating layer thicknesses were not significantly changed, and the optimized coating thickness was identified as ~ 5 μm. When the optimized coating conditions and stress analysis were applied to the primary piston dies for fabrication of aluminum cylinders, an extended life time of the die was observed. The methodology for extending the life time of dies was discussed in terms of microstructures and stress analysis.

빗각 증착 기술과 이를 이용한 박막의 제조 및 특성

  • Jeong, Jae-In;Yang, Ji-Hun;Park, Hye-Seon;Jeong, Jae-Hun;Song, Min-A
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.125-125
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    • 2012
  • 물리증착(physical vapor deposition; PVD)은 진공 또는 특정 가스 분위기에서 고상의 물질을 기화시켜 기판에 피막을 형성하는 방법으로 증발과 스퍼터링 그리고 이온플레이팅 등이 있다. PVD 방법으로 박막을 제작하면 대부분의 박막은 주상정 구조로 성장하게 된다. 이러한 주상정의 조직을 제어하는 방법으로 빗각 증착(oblique angle deposition; OAD) 기술이 있다. OAD는 타겟(증발원)에 대해서 기판을 평행하게 배치하는 일반적인 코팅방법과는 달리 기판의 수직성분과 타겟의 수직성분이 이루는 각도가 0도 이상이 되도록 조절하여 기판을 기울인 상태로 코팅하는 방법을 말한다. OAD 방법을 이용하면 기판으로 입사하는 증기가 초기에 생성된 핵(seed)에 의해 shadowing이 발생하면서 증기가 수직으로 입사하는 normal 증착과는 다른 형상의 성장 조직이 만들어지게 된다. 본 논문에서는 OAD 방법을 이용하여 Al과 TiN 박막을 제조하고 그 특성을 비교하였다. Al 박막은 UBM (Un-Balanced Magnetron) 스퍼터링 소스를 이용하여 빗각을 각각 0, 30, 45, 60 및 90도의 각도에서 강판 및 실리콘 웨이퍼 상에 시편을 제조하되 단층 및 다층으로 시편을 제조하고 치밀도와 함께 조도와 반사율을 비교하고 염수분무시험을 이용하여 내식성을 평가하였다. TiN 박막은 Cathodic Arc 방식을 이용하되 Al 박막과 동일한 방법으로 코팅을 하고 내식성 및 경도 등의 특성을 비교하였다. TiN 박막은 경사각이 커지면서 경도가 낮아졌으나 바이어스 전압을 이용하여 다층으로 제조함에 의해 경도는 유지하면서 modulus를 낮출 수 있어서 박막의 신뢰성을 나타내는 H3/E2 값은 증가함을 알 수 있었다.

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STUDY ON ATMOSPHERIC BEHAVIOR OF POLYCYCLIC AROMATIC HYDROCARBONS IN URBAN AREA, JEONJU

  • Kim, Hyoung-Seop;Kim, Jong-Guk;Kim, Kyoung-Soo
    • Environmental Engineering Research
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    • v.12 no.3
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    • pp.118-127
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    • 2007
  • Between June and November 2002, the atmospheric concentrations and dry deposition fluxes of polycyclic aromatic hydrocarbons (PAHs) in Chonju were measured four times each over five days. The total concentration of PAHs in ambient air was $84\;ng/m^3$, with about 90% existing in the vapor phase. Plots of log ($K_p$) vs. log (${P_L}^0$) indicated that PAHs partitioning was not in equilibrium and the particulate characteristics did not change with seasonal variations. The PAHs fluxes to a water surface sampler (WSS) and a dry deposition plate (DDP) were about 14.15 and $1.92\;{\mu}g/m^2/d$, respectively. The flux of the gaseous phase, acquired by subtracting the DDP from the WSS results, was about $12.23\;{\mu}g/m^2/d$. A considerable correlation was shown between the atmospheric concentrations and deposition fluxes in the gaseous phase, but not in the particulate phase, as the fluxes of the particulate phase were dependent on the physical velocity differences of the particulates based on the particle diameter.

Low Temperature Deposition of ${\mu}c$-Si:H Thin-films for Solar Cell Application (태양전지용 ${\mu}c$-Si:H 박막의 저온증착 및 특성분석)

  • Chung, Y.S.;Lee, J.C.;Kim, S.K.;Yoon, K.H.;Song, J.;Park, I.J.;Kwon, S.W.;Lim, K.S.
    • Proceedings of the KIEE Conference
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    • 2003.07c
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    • pp.1592-1594
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    • 2003
  • This paper presents the deposition and characterization of microcrystalline silicon(${\mu}c$-Si:H) films by HWCVD(Hot-wire Chemical Vapor Deposition) method at low substrate($300^{\circ}C$). The filament temperature, pressure and $SiH_4$ concentration were determined to be a critical parameter for the deposition of poly-Si films. Series A was deposited under the conditions of $1380^{\circ}C$(Tf), 100 mTorr and $2{\sim}10%\{SC:SiH_4/(SiH_4+H_2)\}$ for 60 min. Series B was deposited under the conditions of $1400{\sim}1450^{\circ}(T_f)$, 30 mTorr and $2{\sim}12%$(SC) for 60 min. The physical characteristics were measured by Raman and FTIR spectroscopy, dark and photoconductivity measurements under AM1.5 illumination.

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Effect of CNT Diameter on Physical Properties of Styrene-Butadiene Rubber Nanocomposites

  • Park, Young-Soo;Huh, Mong-Young;Kang, Sin-Jae;Yun, Seok-Il;Ahn, Kay-Hyeok
    • Carbon letters
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    • v.10 no.4
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    • pp.320-324
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    • 2009
  • We investigated the effect of diameter and content of carbon nanotubes (CNTs) on the physical properties of styrenebutadiene rubber (SBR)/CNTs nanocomposites. CNTs-reinforced SBR nanocomposites were prepared by the melt mixing process. CNTs with different diameters were synthesized by the chemical vapor deposition method (CVD). In this work, the mechanical property and other physical properties of SBR/CNTS nanocomposites were discussed as a function of the content and diameter of CNTs.

A Study of Physical and Optical Properties of GaN grown using In-situ SiN Mask by MOCVD (In-situ SiN Mask를 이용하여 성장한 GaN 박막의 물성적, 광학적 특성 연구)

  • Kim, Deok-Kyu;Jeong, Jong-Yub;Park, Choon-Bae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07a
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    • pp.121-124
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    • 2004
  • We have grown GaN layers with in-situ SiN mask by metal organic chemical vapor deposition(MOCVD) and study the physical properties of the GaN layer. We have also investigate the effect of the SiN mask on its optical property. By inserting a SiN mask, (102) the full width at half maximum(FWHM) decreased from 480 arcsec to 409 arcsec. The PL intensity of GaN with SiN mask improved 2 times to that without SiN mask. We have thus shown that the SiN mask improved significantly the physical and optical properties of the GgN layer.

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