Etching characteristic of SBT thin film by using Ar/$CHF_3$ Plasma
(Ar/$CHF_3$ 플라즈마를 이용한 SBT 박막에 대한 식각특성 연구)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 1999.11a
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- pp.41-43
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- 1999