• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.532-532
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• 2008

본 연구에서는 Embedded 기판용 폴리머 후막저항의 허용편차 개선을 위하여 새로운 후막 패터닝 기술을 도입하는 연구를 실시하였다. 기존의 Embedded 기판용 폴리머 후막저항은 스크린 인쇄에 의하여 형성됨에 따라 패턴의 정밀성이 떨어지고 기판 상 위치별 두께편차에 의하여 저항값의 허용편차(tolerance)가 ${\pm}$20~30% 정도로 큰 단점을 가지고 있다. 따라서 경화 후 laser trimming 공정을 필수적으로 동반하게 된다. 이를 개선하기 위하여 본 연구에서는 알칼리 수용액에 현상이 가능한 감광성 레진을 이용하여 폴리머 후막저항 페이스트를 제작하는 것과 함께 기판 전면에 균일한 두께로 인쇄하는 roll coating 방법을 도입하는 실험을 수행하였다. 알칼리 현상형의 감광성 레진 시스템은 노광 및 현상에 의해 정밀한 패턴을 구현할 수 있는 장점을 가지고 있으며, 본 연구에는 A사의 일액형 레진과 T사의 이액형 레진을 사용하였다. 여기에 전도성 필러로서 카본블랙을 첨가하였는데, 그 첨가량의 조절에 따른 후막저항의 시트저항값 변화와 현상 특성을 관찰하였다. 테스트 보드는 FR-4 기판 상에 전극 형상의 동박을 패터닝 후 Ni/Au 도금까지 실시하여 제작하였고, 이 테스트 보드 상에 별도로 제작된 저항 페이스트를 도포한 후 저항체 패턴이 입혀져 있는 Cr 마스크를 이용하여 노광하였다. 이후 현상 공정을 통하여 저항체를 패터닝하고, 이를 $200^{\circ}C$에서 1시간 열경화하는 것으로 후막 저항 테스트쿠폰을 제작하였다. 실험결과 roll coating에 의해 도포된 후막저항체들은 균일한 두께 범위를 나타내었고, 이에 따라 최종 경화 후 허용편차도 통상 ${\pm}$5~10% 이내로 제어될 수 있었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.116-119
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• 2003

Self-patterning of thin films using photosensitive sol solution has advantages such as simple manufacturing process compared to photoresist/dry etching process. In this study, ferroelectric $Sr_{0.9}Bi_{2.1}Ta_2O_9$(SBT) and $La_{0.5}Sr_{0.5}CoO_3$(LSCO)thin films have been prepared by spin coating method using photosensitive sol solution. $Sr(OC_2H5)_2$, $Bi(TMHD)_3$ and $Ta(OC_2H)_5)_5$ were used as starting materials for SBT solution and $La(OCH_2CH_2OCH_3)_3$, $Sr(OC_2H_5)_2$, $CO(OCH_2CH_2OCH_3)_2$ were used for LSCO solution. Solubility difference by UV irradiation on LSCO thin film allows to obtain a fine patterning due to M-O-M bond formation. The lowest resistivity($4{\times}10^{-3}{\Omega}cm$) of LSCO thin films was obtained by annealing at $740^{\circ}C$.

• 한국전기전자재료학회논문지
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• 제31권4호
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• pp.231-237
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• 2018

In this study, two important requirements for the home production of a robot to detect and remove improvised explosive devices (IEDs) are presented in terms of the total cost for robot system development and the performance improvement of the mine detection technology. Firstly, cost analyses were performed in order to provide a reasonable solution following an engineering estimate method. As a result, the total cost for a mass production system without the mine detection system was estimated to be approximately 396 million won. For the case including the mine detection system, the total cost was estimated to be approximately 411 million won, in which labor costs and overhead charges were slightly increased and the material costs for the mine detection system were negligible. Secondly, a method for fabricating the carbon nanotube (CNT) based gas detection sensor was studied. The detection electrodes were formed by a photolithography process using a photosensitive CNT paste. As a result, this method was shown to be a scalable and expandable technology for producing excellent mine detection sensors. In particular, it was found that surface treatments by using adhesive taping or ion beam bombardment methods are effective for exposing the CNTs to the ambient air environment. Fowler-Nordheim (F-N) plots were obtained from the electron-emission characteristics of the surface treated CNT paste. The F-N plot suggests that sufficient electrons are available for transport between CNT surfaces and chemical molecules, which will make an effective chemiresistive sensor for the advanced IED detection system.

• 센서학회지
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• 제2권1호
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• pp.35-40
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• 1993

$Si_{3}N_{4}$ 박막의 코팅된 pH-ISFET의 게이트 부위 위에 lipase 효소를 고정화하여 FET(field effect transistor) 형지질(lipid) 센서를 제조하였다. 효소 고정화막 형성 물질로는 수용성 고분자인 polyvinyl alcohol(PVA)에 감광성기인 1-methyl-4-(formylstyryl) pyridinium methosulfate(SbQ)를 결합시킨 PVA-SbQ를 사용하였다. PVA-SbQ 수용액 (SbQ 1mole %, 10 wt%) $200{\mu}L$, bovine serum albumin (BSA) 7.5 mg, lipase 10 mg으로 구성 된 현탁액을 사용한 사진식각(photolithographic) 공정의 최적 조건은 피막의 상온 진공 건조 시간 45분, spin coater의 회전수 $5,000{\sim}6,000$ rpm, UV 노광시간 $20{\sim}30$초, 증류수 현상 시간 $30{\sim}40$초로 나타났다. 이렇게 구성된 지질 센서는 triacetin을 지질 시료로 하였을 때 $10{\sim}100$ mM의 농도 범위에서 직선성의 검정선을 나타내었다.

• 한국통신학회논문지
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• 제12권1호
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• pp.9-18
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• 1987

DPCM의 선형예측기를 비감광성 원소(dummy pixel)를 가지고 있는 선형 감광성 전하결합소자(CCD)를 광전자 시스템으로 구현하는 방법을 제시하였다. 종래의 시스템과 마찬가지로 이 시스템은 입력광원, 공간여파기(마스크), 선형감광성 CCD의 3부분으로 구성되었다. 비감광성 원소에 의한 시간지연을 고려하여 종래의 마스크를 변형하여 각 예측계수를 하나 이상의 마스크 원소에 분산시킨, 새로운 방식의 분산형 마스크를 제시하고 이 마스크를 사용할 때의 특성을 이론적으로 분석하였으며 실험으로 확인하였다.

• 한국인쇄학회지
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• 제18권1호
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• pp.113-120
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• 2000

A previous paper was reported in being sensetized photopolymer, poly(vinyl cinnamoyl acetate) (PVCiA)1) with some squarylium dyes such as 1,3-bis(4 or 6-trifluouomethy1-1,3,3-trimethylindo) squarylium dyes(TFSQ). Here, we synthesized new 1,3-bis(4 or 6-nitro-1,3,3-trimethylindo) squarylium dyes(NISQ) to sensetize photopolymer, such as poly(vinyl cinnamoyl acetate). Absorption's coefficient of (NISQ8) is 8.5x105, the sensitivity of PVCiA added with NISQ8(3%) was highly sensitized 8 times than not added, and 2 times than TFSQ8(3%). Maybe, high absorption'scoefficient and red shift of NISQs with strongly withdrawing group to TFSQs afford to the high sensitivity of PVCiA.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2001년도 The IMAPS-Korea Workshop 2001 Emerging Technology on packaging
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• pp.104-109
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• 2001

A 355 nm (3.5 eV) neodymium:yttrium aluminum gamet laser, produced by a harmonic generator, was used to create silver metallic particles as seeds for nucleation in photosensitive glass containing Ag+ and Ce3+ ions. The pulse width and frequency of the laser were 8 ns and 10 Hz, respectively. Heat treatment was conducted at 570 C for 1 h, following laser irradiation, to produce crystalline growth, after which a LiAlSi3O8 crystal phase appeared in the laser-irradiated Li2O A1203 SiO2 glass. For the Present study, we compared the effect of laser-induced crystallization on glass crystallization with that of spontaneous crystallization by heat treatment.

• 한국생산제조학회지
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• 제21권2호
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• pp.311-315
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• 2012

Diaphragm type noncontact automatic control valve is a valve for controling acidic PR(Photo Resist) liquid used in the semiconductor process. PR is photosensitive liquid that changes phases depending on light transmittance. PR is very toxic and expensive; the purpose of this paper is to address methods that prevent loss due to leaks. The design of noncontact precise automatic control valve is expected to play an important role in controlling fluid flow, therefore influencing energy conservation and environmental improvement. In this paper, diaphragm type automatic control valve's part design, assembly and simulation are introduced. Also, through the analysis of fluid flow the valve's internal velocity, pressure, and turbulent intensity are interpreted. This paper proposes to contribute to the improvement of the valve's performance.

• Journal of Photoscience
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• 제7권2호
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• pp.47-52
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• 2000

The copolymmers of N, N-dimethylaminoethyl methacrylate(DAEM) and N-arylmethacrylamide (AMA) were prepared, and their photochemical properties as a negative photoresist were studied by the measurements of insoluble fraction, and by UV and IR absorption spectral changes. These copolymers are soluble in DMF, actone, methanol, of acidic buffer solutions. Solubility of these copolymer films in the vuffer solutions increased with the amount of DAEM units in the copolymer and decreased with the pH value. The insoluble fraction of the copolymer films in the buffer solution of pH 4 of in methanol increased with irradiation time and the amount of AMA units in the copolymer. UV and IR spectral changes indicated that not only photo-crosslinking but also the photo-Fries rearrangement took place upon irradiation with a 254nm UV light.

• 한국인쇄학회지
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• 제12권1호
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• pp.1.1-11
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• 1994

The photosensitive properties and carrier transport in the organic photoconductor with the carrier transport layers(CTL) of polymer matrix doped with two carrier transport materials above carrier generation layer(CGL) containing oxotitanium phthalocyanine (TiOPc) were investigated. The CGL of TiOPc dispersed in poly(vinylbutyral) was formed as thickness of 0.1${\mu}{\textrm}{m}$and the carrier transport layer was prepared by coating polycarbonate and polyester doped with oxadiazoly(OXD), polyvinylcarbazole (PVK), trinitro fluorenone(TNF) as thickness of 10~15${\mu}{\textrm}{m}$, respectively. We have measured half decay exposure,sensitivity and xerographic gain from the photo-induced discharge curve(PIDC). In this work, it was found that the characteristics of carrier transport were mainly caused by the ionization potential difference of constitutive materials in molecularly doped polymer.