• 제목/요약/키워드: Photo C-V

검색결과 105건 처리시간 0.039초

$GeH_4$ 가스 함량에 따른 SiGe 박막의 특성변화

  • 조재현;안시현;박형식;장경수;이준신
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.227-227
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    • 2010
  • 기존 실리콘 박막 태양 전지는 적외선에 대한 감응도와 흡수도가 낮아서 광흡수율을 증가시킬 경우 효율의 효과적인 개선이 기대되어진다. 이를 개선하기 위해서 밴드갭이 Si에 비해 상대적으로 낮은 Ge을 도입함으로써 Si와 Ge 화합물을 형성할 경우 결정상태와 수소 함유량에 따라 밴드갭 조절이 가능하다. 또한 Ge는 Si에 비해 빛에 대한 감응도가 우수하여 광흡수율을 증가시킬수 있다. 단 SiGe 박막의 Ge 량이 일정량이상 많아질 경우 박막 내 결함 등의 생성으로 광변환 효율이 오히려 감소하므로 Ge 량의 적정화가 필요하다. 본 실험에 사용된 SiGe:H Layer는 $SiH_4$ 가스와 $GeH_4$ 가스를 혼합하여 증착하였고 증착두께는 150nm로 고정하였으며 증착장비는 PECVD를 이용하였다. 파워는 플라즈마의 방전특성을 알아본 후 최소파워를 이용하여 증착하였다. 이는 증착 시 플라즈마에 의한 박막 손상을 최소화하기 위함이다. Ellipsometry를 이용하여 박막의 두께와 optical bandgap을 측정하였다. 박막의 특성을 평가하기 위해서 STA 장비를 이용하여 dark conductivity, photo conductivity, activation energy 등을 측정하였고, MDC를 이용해 C-V 곡선을 측정하였고, 이를 terman method를 이용하여 $D_{it}$를 계산하였다.

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Measurement of EUV (Extreme Ultraviolet) and electron temperature in a hypocycloidal pinch device for EUV lithography

  • Lee, Sung-Hee;Hong, Young-June;Choi, Eun-Ha
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.108-108
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    • 2010
  • We have generated Ne-Xe plasma in dense plasma focus device with hypocycloidal pinch for extreme ultraviolet (EUV) lithography and investigated an electron temperature. We have applied an input voltage 4.5 kV to the capacitor bank of 1.53 uF and the diode chamber has been filled with Ne-Xe(30%) gas in accordance with pressure. If we assumed that the focused plasma regions satisfy the local thermodynamic equilibrium (LTE) conditions, the electron temperature of the hypocycloidal pinch plasma focus could be obtained by the optical emission spectroscopy (OES). The electron temperature has been measured by Boltzmann plot. The light intensity is proportion to the Bolzman factor. We have been measured the electron temperature by observation of relative Ne-Xe intensity. The EUV emission signal whose wavelength is about 6~16 nm has been detected by using a photo-detector (AXUV-100 Zr/C, IRD) and the line intensity has been detected by using a HR4000CG Composite-grating Spectrometer.

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농작물 재배 자동화를 위한 제어시스템 설계에 관한 연구 (A Study on Control system design for Automated Cultivation of product)

  • 조영석
    • 디지털산업정보학회논문지
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    • 제10권1호
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    • pp.55-60
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    • 2014
  • Today, there is increasing the elderly population in rural community, and people of returning from the urban to the rural community are demand to be of high value-added agriculture. In this time, there are required to regularization, standardization, automation, for getting of production of high value crops. In this paper, we are study for automation cultivation control system design for produce high-value crops. this system were designed of two parts that one part is measure and control unit, another part is server part for database and server side control. the main controller for measurement and control is used MC9S08AW60, server for Database and server-side control was using MySQL with CentOS. The source code of control program was coding C and compile with GCC. the functions of measurement and control unit are digital input and output each 8channels and can be scan-able of 20 Bit with 2CH/Sec. Analog Output were designed that can be output of 4-20mA or 0-5V on 4channel. The Digital input and output part were designed 8-channel, and using the high speed photo coupler and relays. We showed that system is possible to measure a 20bit data width, 2Ch/sec as 8 channel analog signals.

IBSD법에 의한 SBN60 강유전체 박막의 배향 및 전기적 특성 (Crystallization and Electrical Properties of SBM Thin Films by IBSD Process)

  • 정성원;장재훈;이희영
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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    • pp.869-873
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    • 2004
  • [ $Sr_xBa_{1-x}Nb_2O_6$ ] (SBN, $0.25{\leq}x{\leq}0.75$) ceramic is a ferroelectric material with tetragonal tungsten bronze (TTB) type structure, which has a high pyroelectric coefficient, piezoelectric, and a photo refractive properties. In this study, SBN60(x=0.6) thin film was manufactured by ion beam sputtering technique. Using the prepared SBN60 target in $Ar/O_2$ atmosphere as-deposited SBN60 thin film on Pt(100)/$TiO_2/SiO_2/Si$ substrate crystallization and orientation behavior as well as electric properties of SBN60 thin film were examined. SBN60 deposition up to $3000{\AA}$ in thickness, SBN60 thin film was heat-treated at $650^{\circ}C{\sim}800^{\circ}C$. The orientation was shown primarily along (001) plane from XRD pattern where working pressure was $4.3{\times}10^{-4}$ torr. The deposited layer was uniform, preferred orientatin and crystallization behavior resulted in the change of $O_2$ ratio was observed. In electric propertie of Pt/SBN60/Pt thin film capacitor remnant polarization (2Pr) value was $10{\mu}C/cm^2$, the coercive filed (Ec) 50 kV/cm, and the dielectric constant 615, respectively.

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The a-Si:H/poly-Si Heterojunction Solar Cells

  • Kim, Sang-Su;Kim, do-Young;Lim, Dong-Gun;Junsin Yi;Lee, Jae-Choon;Lim, Koeng-Su
    • Journal of Electrical Engineering and information Science
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    • 제2권5호
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    • pp.65-71
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    • 1997
  • We present heterojunction solar cells with a structure of metal/a-Si:H(n-i-p)/poly-Si(n-p)/metal for the terrestrial applications. This cell consists fo two component cells: a top n-i-p junction a-Si:Hi cell with wide-bandgap 1.8eV and a bottom n-p junction poly-Si cell with narrow-bandgap 1.1eV. The efficiency influencing factors of the solar cell were investigated in terms of simulation an experiment. Three main topics of the investigated study were the bottom cell with n-p junction poly-Si, the top a-Si:H cell with n-i-p junction, and the interface layer effects of heterojunction cell. The efficiency of bottom cell was improved with a pretreatment temperature of 900$^{\circ}C$, surface polishing, emitter thickness of 0.43$\mu\textrm{m}$, top Yb metal, and grid finger shading of 7% coverage. The process optimized cell showed a conversion efficiency about 16%. Top cell was grown by suing a photo-CVD system which gave an ion damage free and good p/i-a-Si:H layer interface. The heterojunction interface effect was examined with three different surface states; a chemical passivation, thermal oxide passivation, and Yb metal. the oxide passivated cell exhibited the higher photocurrent generation and better spectral response.

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Measurement of electron temperature and density using Stark broadening of the coaxial focused plasma for extreme ultraviolet (EUV) lithography

  • Lee, Sung-Hee;Hong, Young-June;Choi, Eun-Ha
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.475-475
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    • 2010
  • We have generated Ar plasma in dense plasma focus device with coaxial electrodes for extreme ultraviolet (EUV) lithography and investigated an emitted visible light for electro-optical plasma diagnostics. We have applied an input voltage 4.5 kV to the capacitor bank of 1.53 uF and the diode chamber has been filled with Ar gas of pressure 8 mTorr. The inner surface of the cylindrical cathode has been attatched by an acetal insulator. Also, the anode made of tin metal. If we assumed that the focused plasma regions satisfy the local thermodynamic equilibrium (LTE) conditions, the electron temperature and density of the coaxial plasma focus could be obtained by Stark broadening of optical emission spectroscopy (OES). The Lorentzian profile for emission lines of Ar I of 426.629 nm and Ar II of 487.99 nm were measured with a visible monochromator. And the electron density has been estimated by FWHM (Full Width Half Maximum) of its profile. To find the exact value of FWHM, we observed the instrument line broadening of the monochromator with a Hg-Ar reference lamp. The electron temperature has been calculated using the two relative electron density ratios of the Stark profiles. In case of electron density, it has been observed by the Stark broadening method. This experiment result shows the temporal behavior of the electron temperature and density characteristics for the focused plasma. The EUV emission signal whose wavelength is about 6 ~ 16 nm has been detected by using a photo-detector (AXUV-100 Zr/C, IRD). The result compared the electron temperature and density with the temporal EUV signal. The electron density and temperature were observed to be $10^{16}\;cm^{-3}$ and 20 ~ 30 eV, respectively.

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Benzothiadiazole-benzodithiophene을 기반으로 한 D/A구조의 공액 고분자 합성 및 광전변환 효율 특성 개선 연구 (Synthesis and Characterization of Power Conversion Efficiency of D/A Structure Conjugated Polymer Based on Benzothiadiazole-Benzodithiophene)

  • 성기호;윤대희;우제완
    • 공업화학
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    • 제24권5호
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    • pp.537-543
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    • 2013
  • 본 연구에서는 유기박막태양전지로 적용 가능한 push-pull 구조의 고분자를 합성하여 그 특성을 확인하였다. 전자주개 물질로는 benzodithiophene 유도체를 도입하였고, 전자받개물질은 benzothiadiazole 유도체를 사용하여 Stille coupling 반응으로 poly{4,8-didodecyloxybenzo[1,2-b;3,4-b]dithiophene-alt-5,6-bis(octyloxy)-4,7-di(thiophen-2-yl)benzo[c][1,2,5]-thiadiazole} (PDBDT-TBTD)를 합성하였다. 각 합성 단계별 단량체의 확인은 $^1H-NMR$과 GC-MS를 통해 이루어졌으며, 합성된 conjugated polymer는 GPC, TGA, UV-Vis, cyclic voltammetry를 이용하여 물리적, 광학적 및 전기화학적 특성을 확인하였다. PDBDT-TBTD의 수평균 분자량은 6200이였으며, 초기 분해온도(5% weight loss temperature, $T_d$)값은 $323^{\circ}C$로 측정 되었다. 박막형태에서의 최대 흡수파장은 599 nm이며, 광학적 밴드갭(${E_g}^{opt}$)은 1.70 eV으로 확인되었다. 유기박막태양전지 소자는 ITO/PEDOT : PSS/PDBDT-TBTD : $PC_{71}BM/BaF_2/Ba/Al$ 구조로 제작하였으며, PDBDT-TBTD와 $PC_{71}BM$를 1 : 2 (w/w)의 비율로 블렌딩하여 광활성층으로 사용하였다. 제작된 소자는 solar simulator으로 광전변환효율을 확인하였고, 최대 광전변환효율은 2.1%이었다.

기능성 덴드리머 박막의 광학적 거동 및 전기적 특성 (Optical Behavior and Electrical Properties of Functional Dendrimer Thin Films)

  • 박재철;정상범;권영수
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제52권5호
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    • pp.201-205
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    • 2003
  • We synthesized dendrimers containing light switchable units, azobenzene group. And the dendrimer containing 48 pyridinepropanol functional end group, which could form a complex structure with metal ions was synthesized. To apply to the molecular level devices or data storage system using Langmuir-Blodgett(LB) film, we firstly investigated the monolayer behavior using the surface pressure-area($\pi$-A) isotherms at air-water interface. And then the surface pressure shift of monolayer by light irradiation was also measured to the dendrimer with azobezene group. As a result, the monolayer of dendrimer with azobenzene group showed the reversible photo-switching behavior by the isomerization of azobenzene group in their periphery. The samples for electrical measurement were fabricated to two types which were pure dendrimer with pyridinepropanol group and its complexes with $Pt^4+$ ions by LB method. We have studied the electrical properties of the ultra thin dendrimer LB films investigated by the current-voltage(I-V) characteristics of Metal/Dendrimer LB films/Metal(MIM) structure. And we have investigated different results in the surface activity at the air-water interface as well as the electrical properties for the monolayers of pure dendrimer with pyridinevopanol group and its complex with $Pt^4+$ ions. In conclusion, it is demonstrated that the metal ion around dendrimer with pyri야nepropanol group can contribute to make formation of network structure among dendrimers and it result from the change of electrical properties. This results suggest that the dendrimers with azobenzene group and pvridinedropanol group can be applied to high efficient nano-device of molecular level.

어레이 IrMn 스핀밸브 소자의 자기저항특성 연구 (Magnetoresistive Properties of Array IrMn Spin Valves Devices)

  • 안명천;최상대;주호완;김기왕;황도근;이장로;이상석
    • 한국자기학회지
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    • 제17권4호
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    • pp.156-161
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    • 2007
  • 어레이(away) 자성센서 개발을 위해 고진공 스퍼터링 증착장비를 이용하여 스펙큘러형(specular type) Glass/Ta(5)/NiFe(7)/IrMn(10)/NiFe(5)/$O_2$/CoFe(5)/Cu(2.6)/CoFe(5)/$O_2$/NiFe(7)/Ta(5)(nm) 거대자기저항-스핀밸브(giant magnetoresistive-spin valves; CMR-SV)박막을 제작하였다. 다층박막 시료를 $20{\times}80{\mu}m^2$의 미세 활성영역을 가진 15개 어레이를 $8{\times}8mm^2$ 영역 내에 최적화한 제작 조건으로 광 리소그래피 패터닝 하였다. Cu를 증착하여 만든 2단자 전극법으로 측정한 자성특성은 15개 모든 소자들이 균일한 자기저항특성을 나타내었고, 5 Oe 근방에서 가장 민감한 자기저항비 자장민감도와 출력전압들은 각각 0.5%/Oe, ${\triangle}$V: 3.9 mV이었다. 형상자기이방성이 적용된 상부 자유층 $CoFe/O_2/NiFe$층은 하부 고정 자성층 $IrMn/NiFe/O_2/CoFe$층 자화 용이축과 직교하였다. 측정시 인가전류 값을 각각 1 mA에서 10 mA까지 인가하였을 때 출력 작동 전압 값은 균일하게 증가하였으며, 자장감응도도 거의 일정하여 미세 외부자장에 민감한 나노자성소자로서 좋은 특성을 띠었다.

완전 스위칭이 가능한 Ti:LiNbO3 진행파 광변조기 (Traveling-wave Ti:LiNbO3 optical modulator capable of complete switching)

  • 곽재곤;김경암;김영문;정은주;피중호;박권동;김창민
    • 한국광학회지
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    • 제14권5호
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    • pp.545-554
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    • 2003
  • Ti:LiNbO$_3$세 도파로 방향성 결합기와 CPW진행파 전극으로 구성된 완전 스위칭이 가능한 외부 광변조기를 설계, 제작하였다. 결합 모드 이론을 이용하여 세 도파로 광결합기의 스위칭 현상을 해석하였으며, 유한차분법을 이용하여 단일 모드를 갖는 광도파로의 설계 및 공정 파라미터를 도출하였으며, 이를 이용하여 광 결합길이를 계산하였다. 등각사상법과 반복이완법을 이용하여, CPW구조 진행파 전극의 특성임피던스와 M/W(Micro wave)유효굴절률 정합조건을 동시에 만족하는 설계 파라미터를 도출하였다. 제작된 세 도파로 광변조기의 삽입손실과 스위칭 전압은 약 4㏈와 19V였으며, S 파라미터를 측정하여 특성임피던스 Z$_{c}$=45 Ω M/W 유효굴절률 N$_{eff}$=2.20, 그리고 감쇠상수 $\alpha$$_{0}$=0.055/cm√GHZ 등의 진행파 전극 파라미터를 추출하였다. 추출된 진행파 전극 파라미터를 이용하여 이론적인 주파수 응답 R($\omega$)을 계산하였으며, Photo Detector로 측정된 주파수 응답과 비교하였다. 주파수 응답 측정 결과, 3㏈ 변조대역폭은 13 GHz로 측정되었다.