Abstract
Design of the optical modulator composed of a three-waveguide coupler and CPW traveling-wave electrodes was carried out. Switching phenomena of three-waveguide couplers were analyzed by using the coupled mode theory, and the coupling-lengths of the devices were calculated by means of the FDM. CPW traveling-wave electrodes were analysed by the CMM and SOR simulation technique in order to find the conditions of phase-velocity and impedance matching. Traveling-wave modulators were fabricated on z-cut LiNbO$_3$ substrate. Ti was in-diffused in LiNbO$_3$ to make waveguides and Au electrodes were built on the waveguides by the electrolyte technique. The fabricated modulator chip was end-polished, pig-tailed and packaged in a brass mount with K-connector. The insertion loss and the switching voltage of the optical modulator were about 4㏈ and 19V, respectively. Network analyzer was used to obtain the S parameter and the corresponding RF response. From the measurement, parameters of the traveling-wave electrodes were extracted to be Z$_{c}$= 45 Ω, N$_{eff}$=2.20, and $\alpha$$_{0}$=0.055/cm√GHZ. The measured optical response R($\omega$) was compared with the theoretically estimated one, showing both responses agree well. The measurement results revealed that 3㏈ bandwidth turned out to be about 13 GHz.
Ti:LiNbO$_3$세 도파로 방향성 결합기와 CPW진행파 전극으로 구성된 완전 스위칭이 가능한 외부 광변조기를 설계, 제작하였다. 결합 모드 이론을 이용하여 세 도파로 광결합기의 스위칭 현상을 해석하였으며, 유한차분법을 이용하여 단일 모드를 갖는 광도파로의 설계 및 공정 파라미터를 도출하였으며, 이를 이용하여 광 결합길이를 계산하였다. 등각사상법과 반복이완법을 이용하여, CPW구조 진행파 전극의 특성임피던스와 M/W(Micro wave)유효굴절률 정합조건을 동시에 만족하는 설계 파라미터를 도출하였다. 제작된 세 도파로 광변조기의 삽입손실과 스위칭 전압은 약 4㏈와 19V였으며, S 파라미터를 측정하여 특성임피던스 Z$_{c}$=45 Ω M/W 유효굴절률 N$_{eff}$=2.20, 그리고 감쇠상수 $\alpha$$_{0}$=0.055/cm√GHZ 등의 진행파 전극 파라미터를 추출하였다. 추출된 진행파 전극 파라미터를 이용하여 이론적인 주파수 응답 R($\omega$)을 계산하였으며, Photo Detector로 측정된 주파수 응답과 비교하였다. 주파수 응답 측정 결과, 3㏈ 변조대역폭은 13 GHz로 측정되었다.
