• 한국전기전자재료학회논문지
• /
• 제11권3호
• /
• pp.195-202
• /
• 1998

The LPCVD system of batch type for the massproduction of semiconductor fabrication has a problem of phosphorous concentration uniformity in the boat. In this paper we study an improvement of the uniformity for phosphorous concentration and sheet resistance. These property was improved by using the nitrogen process and modified long nozzle for gas injection tube in the doped polysilicon deposition system. The phosphorous concentration and its uniformity for polysilicon film are measured by XRF(X-ray Fluorescence) for the conventional process condition and nitrogen process. In conventional process condition, the phosphorous concentration, it uniformity and sheet resistance for polysilicon film are in the range of 3.8~5.4$\times$10\ulcorner atoms/㎤, 17.3% and 59~$\Omega$/ , respectively. For the case of nitrogen process the corresponding measurements exhibited between 4.3~5.3$\times$10\ulcorner atoms/㎤, 10.6% and 58~81$\Omega$/ . We find that in the nitrogen process the uniformity of phosphorous concentration improved compared with conventional process condition, however, the sheet resistance in the up zone of the boat increased about 12 $\Omega$/ . In modified long nozzle, the phosphorous concentration, its uniformity and sheet resistance for polysilicon films are in the range of 4.5~5.1$\times$10\ulcorner atoms/㎤, 5.3% and 60~65$\Omega$/ respectively. Annealing after $N_2$process gives the increment of grain size and the decrement of roughness. Modification of nozzle gives the increment of injection amount of PH$_3$. Both of these suggestion result in the stable phosphorous concentration and sheet resistance. The results obtained in this study are also applicable to process control of batch type system for memory device fabrication.

• Journal of Nutrition and Health
• /
• 제26권8호
• /
• pp.974-981
• /
• 1993

The longitudinal changes on contents of calcium, phosphorous and magnesium of breast milk of 23 Korean lacto-ovo-vegetarians(primiparae=11, multiparae=12) at 0.5, 1, 2 and 3 months postpartum have been studied. The mean ash content of breast milk per 100ml was 0.21g in total lactating women(n=23), and it decreased significantly during lactation(p<0.05). The mean calcium, phosphorous and magnesium contents of breast milk per 100ml were 26.83mg, 14.01mg and 2.72mg, respectively. Body calcium and phosphorous contents decreased significantly during lactation(p<0.05), but magnesium content tended to increase during lactation. There were no significant differences in ash, calcium, phosphorous and magnesium contents between primiparae and multiparae. The ratio of calcium to phosphorus was about 1.95:1 in breast milk and 0.62 : 1 in maternal dietary intake. In calcium and phosphorous, no correlation was found between maternal dietary intake and the concentration in breast milk. This study suggests that the contents of calcium, phosphorous and magnesium in lacto-ovo-vegetarian breast milk are not different from the concentrations of those in non-vegetarian.

• 한국표면공학회지
• /
• 제19권2호
• /
• pp.31-43
• /
• 1986

The properties of the electroless nickel deposit mainly depends on the pH of the bath, the plating temperature, and the molar ratio of nickel to hypophosphite but they are also affected by its formulation and concentration of complexing and buffering agents. According to changeing the concentration of triethanolamine and boric acid, phosphorous contents, microsturcture, crystalline, hardness and wear resistance of deposits obtained from ammoniacal alkaline bath were investigated by EPMA, differential thermal analyser, X-ray diffractometer and wear tester. The results are as follows; (1) Increasing concentration of triethanolamine in the bath, the deposits is slightly inclined to increase its phosphorous content(3.7% P). (2) In the as-plated state, the deposits are not crystallized state but they are thermally unstable phase, and they are crystallized with precipitating $Ni_3P$ at 400$^{\circ}C$. (3) The deposit containing 2.3% P has higher hardness value in the as plated and heat treated state at below 300$^{\circ}C$ than those of 3.7% phosphorous deposit (1090Hk). But in the case of heat treating at 400$^{\circ}C$, the former has lower hardness value (1000Hk) than the latter and has remarkably Ni(III) orientation by heat treatment. (4) The 3.7% phosphorous deposit heat treated at 400$^{\circ}C$ has better wear resistance than hard chromium plating.

• 한국신재생에너지학회:학술대회논문집
• /
• 한국신재생에너지학회 2009년도 춘계학술대회 논문집
• /
• pp.111-113
• /
• 2009

This paper shows that you can achieve high quality N+ emitter layers using a screen printable phosphorous diffusion paste and firing in an infrared belt furnace. Spreading resistance measurement from a beveled sample is used to measure carrier concentration as a function of depth for different phosphorous concentrations. Contours of estimated sheet resistance are shown for different processing conditions. This paper describes newly developed low cost phosphorous pastes. It shows the characterization of the newly developed phosphorous paste (DP99-038). This low cost pastes can easily be printed and make 16% efficiency.

• 한국환경복원기술학회지
• /
• 제5권6호
• /
• pp.30-36
• /
• 2002

A 0.19 hectare natural-type wetland for stream water treatment demonstration was constructed and planted with cattails from April 2001 to May 2001. Part of its bottom surfaces adjacent to levees have a variety of slope of 1 : 4~1 : 15. Two small open water areas were installed, in which emergent plants could not grow. Removal of nutrients from stream waters was a major objective of the wetland. Waters of Sinyang Stream flowing into Kohung Estuarine Lake were pumped and funneled into the wetland. The lake had been formed by a salt marsh reclamation project and was located southern coastal region of Korean Peninsula. Volumes and water quality of inflow and outflow were analyzed from July 2001 through December 2001. Inflow and outflow averaged $120.4m^3/day$ and $112.1m^3/day$, respectively. Hydraulic retention time was about 3.1 days. Average total phosphorous concentration of influent and effluent was $0.19mg/{\ell}$ and $0.075mg/{\ell}$, respectively. Total phosphorous loading rate of inflow and outflow averaged $12.05mg\;m^{-2}\;day^{-1}$ and $4.44mg\;m^{-2}\;day^{-1}$, respectively. Average total phosphorous removal rate in the wetland was $7.61mg\;m^{-2}\;day^{-1}$. Seasonal changes of phosphorous retention rates were observed. The wetland acted as effective phosphorous sinks in the initial stage of the constructed wetland.

• 대한전자공학회논문지
• /
• 제22권2호
• /
• pp.90-96
• /
• 1985

PECVD장비를 사용하여 PSG를 증착하고 막의 유전 및 보호막 특성을 조사하였다. X-선 형광분석으로 PSG내의 인 농도를 분석한 결과 약 8m/o에서 포화되었다. 인 함량에 대한 PSC의 적외선 홉수율, 식각속도 및 시트저항등의 변화도 비교하였다. APCVD와 PECV각에 대한 유전특성, 스텝 커버리지, 크랙저항과 게터링효과를 검토하였다. PECVD산화막은 비중 2.4g/㎤, 굴절율 1.53, 항복전장 11-13MV/cm의 값을 가졌고 크랙저항도 APCVD산화막 보다 우수하였다 2m/o의 인을 포함하는 PECVD PSG의 경우 양호한 스텝 커버리지와 게터링효과를 보였다. 공정변수에 대한 일련의 실험을 통하여 PECVD PSC 공정으로 보다 개선된 특성의 보초막을 얻을 수 있었다.

• 한국환경농학회지
• /
• 제20권3호
• /
• pp.180-185
• /
• 2001

아인산 (phosphorous acid, $H_3PO_3$) 고추역병균 (Phytophthora capsici)에 대한 생물활성을 in vitro와 in vivo에서 검정하였다. 아인산이 1,000 및 10,000 ${\mu}g$ a.i./mL 농도로 첨가되었을 경우 액체배지와 고체배지에서 무처리구에 비하여 97%이상 균사 생장이 억제되었으나, 10 ${\mu}g$ a.i./mL 농도의 경우 액체배지에서는 무처리구에 비하여 46.2%, 고체배지에서는 4.9% 생장이 억제되었다. 액체배지에서 균사생장에 대한 $EC_{50}$은 12.0 ${\mu}g$ a.i./mL 였다. 아인산의 100 ${\mu}g$ a.i./mL 농도에서 유주자낭의 형성은 무처리구에 비하여 89.1% 억제되었다. 아인산이 10,000 및 1,000 ${\mu}g$ a.i./mL 농도로 첨가되었을 경우에 고추역병균의 유주자낭 발아율은 각각 0% 및 15.3% 발아하여 97.3% 발아한 무처리구에 비하여 100%와 84.3% 발아가 억제되었으며, 100 ${\mu}g$ a.i./mL 농도에서는 54.3%가 발아하여 44.2% 발아가 억제되었다. 10 ${\mu}g$ a.i./mL 농도에서는 90.9% 발아하여 6.6% 발아가 억제되었으나, 유주자낭은 발아하여도 정상적인 발아관의 신장에 이은 균사생장이 이루어지지 않고 균사신장이 극히 저조하거나, 비정상적인 형태를 나타내었다. 온실에서 아인산제제의 고추역병발생억제 효과를 검정한 결과 아인산제제는 $77.0{\sim}62.0%$의 방제가를 보였다. 고추를 포장에서 관행 재배하면서 아인산제제의 효과를 검정한 결과 무처리구와 비교하였을때 54% 역병발생이 억제되어 아인산의 병발생억제효과가 있는 것으로 나타났다. 아인산이 고추 생육에 미치는 영향을 조사한 결과 무처리구에 비해 초장은 108.5%, 한 주당 고추 열매 수는 123.8% 무게는 119.7% 생육이 증진되었다.

• 한국환경복원기술학회지
• /
• 제6권6호
• /
• pp.49-55
• /
• 2003

Total phosphorous removal rate was examined of a subsurface-flow treatment wetland system which was constructed on floodplain in the down reach of the Kwangju Stream in Korea from May to June 2001. Its dimensions were 29 meter in length, 9 meter in width and 0.65 meter in depth. A bottom layer of 45 cm in depth was filled with crushed granite with about 15~30 mm in diameter and a middle layer of 10 cm in depth had pea pebbles with about 10 mm in diameter. An upper layer of 5 cm in depth contained course sand. Reeds(Phragmites australis) were transplanted on the surface of the system. They were dug out of natural wetlands and stems were cut at about 40 cm height from their bottom ends. Water of the Kwangju Stream flowed from a submerged dam into it via a pipe by gravity flow and treated effluent was funneled back into the Stream. The number of reed stems increased from 80 stems/$m^2$ in July 2001 to 136 stems/$m^2$ in September 2001. The hight of stems was 44.2 cm in July 2001 and 75.3 cm in September 2001. The establishment of reeds at early operating stage of the system was good. Volume and water quality of inflow and outflow were investigated from July 2001 through December 2001. The average inflow was 40 $m^3$/day and hydraulic detention time was about 1.5 days. The concentration of total phosphorous n influent and effluent was 0.83 and 0.33 mg/L, respectively. The removal rate of total phosphorous averaged about 60%. The removal efficiency was slightly higher, compared with that of subsurface-flow wetlands operating in North America, whose retention rate of total phosphorous was reported to be about 56%. The good abatement rate could be attributed to sedimentation of particle phosphorous in pores of the media and adsorption of phosphorous to the biofilm developed on the surface of them. Increase of standing density of reeds within a few years will develop root zones which may lead to increment in the phosphorous retention rate.

• 농약과학회지
• /
• 제4권1호
• /
• pp.64-70
• /
• 2000

아인산의 고추 토마토 역병 및 노균병에 대한 방제 효과를 성체 식물체를 이용하여 온실에서 검정한 결과, 고추 역병의 경우 $1,408{\mu}g$ a.i./mL ($H_{3}PO_{3}$) 농도 처리에서 91%와 80%의 예방 및 치료효과를 보였다. 토마토 역병의 경우는 $1,408{\mu}g$ a. i./mL 처리에서 각각 63.4%와 13.0%의 예방 및 치료효과를 보여 고추 역병에 비해 효과가 저조하였다. 토마토 역병균의 유주자낭의 밀도가 $1{\times}10^{3}{\sim}1{\times}10^{4}/mL$일 경우 방제 효과가 높았다. 고추역병균에 대한 약제지속효과에 있어서 아인산은 경엽처리 4일 후에도 94%의 높은 방제 효과를 보여 대조약제인 포롬 수화제에 비해 효과가 지속됨을 알 수 있었다. 오이 노균병에 대해서는 $1,408{\mu}g$ a.i./mL 처리는 82와 62%의 예방 및 치료효과를 보였다. 아인산의 경엽처리는 식물의 생육을 촉진시키는 것으로 나타났다.

• 한국환경농학회지
• /
• 제22권4호
• /
• pp.251-254
• /
• 2003

Phosphorous removal rate and emergent plant growth were examined of a surface-flow constructed treatment wetland system, whose dimensions were 31 meter in length and 12 meter in width. The system was established on floodplain in the down reach of the Kwangju Stream in Korea in one and half months from May to June 2001. Cattails(Typha angustiflora) were transplanted in the system. They were dug out of natural wetlands and stems were cut at about 40 cm height from their bottom ends. Water of the Kwangju Stream were funneled into it via a pipe by gravity flow and its effluent were discharged back into it. The stems of cattails grew from 45.2 cm in July 2001 up to 186 cm in September 2001 and the number of cattail stems per square meter increased from 22 in July 2001 to 53 in September 2001. The early establishment of cattails was good. Volume and water quality of inflow and outflow were analyzed from July 2001 through December 2001. Inflow averaged $40\;m^3/day$ and hydraulic retention time was about 1.5 days. The concentration of total phosphorous in influent and effluent was 0.85 mg/L, 0.41 mg/L, respectively. The average removal rate of total phosphorous in the system was about 52%. The retention efficiency was slightly lower, compared with that in surface-flow wetlands operating in North America, whose retention efficiency was reported to be about 57%. The lower abatement rate could result from the initial stage of the system and inclusion of two cold months into the six-month monitoring period. Root rhizosphere in wetland soils and litter-soil layers on bottoms were not properly developed. Increase of standing density of cattails within a few years will establish both root zones and substrates beneficial to the removal of phosphorous, which may lead to increase of the phosphorous retention rate. The system was submerged one time by heavy storm during the monitoring period. The inundation, however, scarcely disturb its environment.