• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.3
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• pp.195-202
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• 1998

The LPCVD system of batch type for the massproduction of semiconductor fabrication has a problem of phosphorous concentration uniformity in the boat. In this paper we study an improvement of the uniformity for phosphorous concentration and sheet resistance. These property was improved by using the nitrogen process and modified long nozzle for gas injection tube in the doped polysilicon deposition system. The phosphorous concentration and its uniformity for polysilicon film are measured by XRF(X-ray Fluorescence) for the conventional process condition and nitrogen process. In conventional process condition, the phosphorous concentration, it uniformity and sheet resistance for polysilicon film are in the range of 3.8~5.4$\times$10\ulcorner atoms/㎤, 17.3% and 59~$\Omega$/ , respectively. For the case of nitrogen process the corresponding measurements exhibited between 4.3~5.3$\times$10\ulcorner atoms/㎤, 10.6% and 58~81$\Omega$/ . We find that in the nitrogen process the uniformity of phosphorous concentration improved compared with conventional process condition, however, the sheet resistance in the up zone of the boat increased about 12 $\Omega$/ . In modified long nozzle, the phosphorous concentration, its uniformity and sheet resistance for polysilicon films are in the range of 4.5~5.1$\times$10\ulcorner atoms/㎤, 5.3% and 60~65$\Omega$/ respectively. Annealing after $N_2$process gives the increment of grain size and the decrement of roughness. Modification of nozzle gives the increment of injection amount of PH$_3$. Both of these suggestion result in the stable phosphorous concentration and sheet resistance. The results obtained in this study are also applicable to process control of batch type system for memory device fabrication.

• Journal of Nutrition and Health
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• v.26 no.8
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• pp.974-981
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• 1993

The longitudinal changes on contents of calcium, phosphorous and magnesium of breast milk of 23 Korean lacto-ovo-vegetarians(primiparae=11, multiparae=12) at 0.5, 1, 2 and 3 months postpartum have been studied. The mean ash content of breast milk per 100ml was 0.21g in total lactating women(n=23), and it decreased significantly during lactation(p<0.05). The mean calcium, phosphorous and magnesium contents of breast milk per 100ml were 26.83mg, 14.01mg and 2.72mg, respectively. Body calcium and phosphorous contents decreased significantly during lactation(p<0.05), but magnesium content tended to increase during lactation. There were no significant differences in ash, calcium, phosphorous and magnesium contents between primiparae and multiparae. The ratio of calcium to phosphorus was about 1.95:1 in breast milk and 0.62 : 1 in maternal dietary intake. In calcium and phosphorous, no correlation was found between maternal dietary intake and the concentration in breast milk. This study suggests that the contents of calcium, phosphorous and magnesium in lacto-ovo-vegetarian breast milk are not different from the concentrations of those in non-vegetarian.

• Journal of the Korean institute of surface engineering
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• v.19 no.2
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• pp.31-43
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• 1986

The properties of the electroless nickel deposit mainly depends on the pH of the bath, the plating temperature, and the molar ratio of nickel to hypophosphite but they are also affected by its formulation and concentration of complexing and buffering agents. According to changeing the concentration of triethanolamine and boric acid, phosphorous contents, microsturcture, crystalline, hardness and wear resistance of deposits obtained from ammoniacal alkaline bath were investigated by EPMA, differential thermal analyser, X-ray diffractometer and wear tester. The results are as follows; (1) Increasing concentration of triethanolamine in the bath, the deposits is slightly inclined to increase its phosphorous content(3.7% P). (2) In the as-plated state, the deposits are not crystallized state but they are thermally unstable phase, and they are crystallized with precipitating $Ni_3P$ at 400$^{\circ}C$. (3) The deposit containing 2.3% P has higher hardness value in the as plated and heat treated state at below 300$^{\circ}C$ than those of 3.7% phosphorous deposit (1090Hk). But in the case of heat treating at 400$^{\circ}C$, the former has lower hardness value (1000Hk) than the latter and has remarkably Ni(III) orientation by heat treatment. (4) The 3.7% phosphorous deposit heat treated at 400$^{\circ}C$ has better wear resistance than hard chromium plating.

• 한국신재생에너지학회:학술대회논문집
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• 2009.06a
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• pp.111-113
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• 2009

This paper shows that you can achieve high quality N+ emitter layers using a screen printable phosphorous diffusion paste and firing in an infrared belt furnace. Spreading resistance measurement from a beveled sample is used to measure carrier concentration as a function of depth for different phosphorous concentrations. Contours of estimated sheet resistance are shown for different processing conditions. This paper describes newly developed low cost phosphorous pastes. It shows the characterization of the newly developed phosphorous paste (DP99-038). This low cost pastes can easily be printed and make 16% efficiency.

• Journal of the Korean Society of Environmental Restoration Technology
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• v.5 no.6
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• pp.30-36
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• 2002

A 0.19 hectare natural-type wetland for stream water treatment demonstration was constructed and planted with cattails from April 2001 to May 2001. Part of its bottom surfaces adjacent to levees have a variety of slope of 1 : 4~1 : 15. Two small open water areas were installed, in which emergent plants could not grow. Removal of nutrients from stream waters was a major objective of the wetland. Waters of Sinyang Stream flowing into Kohung Estuarine Lake were pumped and funneled into the wetland. The lake had been formed by a salt marsh reclamation project and was located southern coastal region of Korean Peninsula. Volumes and water quality of inflow and outflow were analyzed from July 2001 through December 2001. Inflow and outflow averaged $120.4m^3/day$ and $112.1m^3/day$, respectively. Hydraulic retention time was about 3.1 days. Average total phosphorous concentration of influent and effluent was $0.19mg/{\ell}$ and $0.075mg/{\ell}$, respectively. Total phosphorous loading rate of inflow and outflow averaged $12.05mg\;m^{-2}\;day^{-1}$ and $4.44mg\;m^{-2}\;day^{-1}$, respectively. Average total phosphorous removal rate in the wetland was $7.61mg\;m^{-2}\;day^{-1}$. Seasonal changes of phosphorous retention rates were observed. The wetland acted as effective phosphorous sinks in the initial stage of the constructed wetland.

• Journal of the Korean Institute of Telematics and Electronics
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• v.22 no.2
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• pp.90-96
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• 1985

The properties of plasma-enhanced CVD phosphorous silicate glass (PECVD PSG) for passivation layer are studied . Phosphorous contentration was analyzed with X-ray fluores-cence. As a result, PECVD PSG has a limiting phosphors concentration of about 8 mole%. Curves relating to etcll rate, infrared absorption ratio, and sheet resistivity were adapted to monitor phosphorous concentration indirectly Dielectric properties, step coverage, crack resistance, and gettering effect are discussed in both of atmospheric pressure CVD (APCVO) and PECVD oxide. PECVD SiO2 film have density of about 2.4 g/㎤ at deposition rate of 450$\AA$/min, refractive index of about 1.53, and breakdown at fields of II-13 MV/cm. Crack resistance of PECVD oxide is greater than APCVD oxide. PECVD PSG films contained with 2 mole % phosphorous show good step coverage and gettering ability. The obtained results show more advantages in PECVD PSG than in APCVD PSG for device passivation.

• Korean Journal of Environmental Agriculture
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• v.20 no.3
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• pp.180-185
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• 2001

Control effects of phosphorous acid were investigated on Phytophthora blight of red pepper plants in greenhouse and field. In vitro test, the mycelial growth of Phytophthora capsici was inhibited by the phosphorous acid more than 97% at 1,000 ${\mu}g$ and 10,000 ${\mu}g$ a.i./mL in the liquid and solid culture, respectively. At concentration of 10 ${\mu}g$ a.i./mL of phosphorous acid, in the liquid culture the mycelial growth of P. capsici was inhibited 46.2%, however inhibited only 4.9% on the soild culture. Zoosporangial formation was also inhibited 89.1% by phosphorous acid at 100 ${\mu}g$ a.i./mL. Phosphorous acid affected more zoosporangial formation of P. capsici than its mycelial growth. At the concentrations of 10,000, 1,000 and 100 ${\mu}g$ a.i./mL of phosphorous acid, germination of zoosporangia was inhibited 100, 84.3 and 44.2%, respectively. Mycelial growth and zoosporangial formation of P. capsici were little affected at the concentration of 10 ${\mu}g$ a.i./mL of phosphorous acid. Cermination of zoosporangia was also little affected at this concentration, however growth of the germ tubes was inhibited and the abnormal mycelial growth was observed. Phosphorous acid suppressed the incidence of Phytophthora blight of red pepper plants up to $77.0{\sim}62.0%$, in greenhouse. Phosphorous acid suppressed the incidence of Phytophthora blight of red pepper plants up to 54.0% at the conventional culture in field. Treatments of phosphorous acid increased up to 113% in height, 135% in number of fruit, and 129% in weight of fruit.

• Journal of the Korean Society of Environmental Restoration Technology
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• v.6 no.6
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• pp.49-55
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• 2003

Total phosphorous removal rate was examined of a subsurface-flow treatment wetland system which was constructed on floodplain in the down reach of the Kwangju Stream in Korea from May to June 2001. Its dimensions were 29 meter in length, 9 meter in width and 0.65 meter in depth. A bottom layer of 45 cm in depth was filled with crushed granite with about 15~30 mm in diameter and a middle layer of 10 cm in depth had pea pebbles with about 10 mm in diameter. An upper layer of 5 cm in depth contained course sand. Reeds(Phragmites australis) were transplanted on the surface of the system. They were dug out of natural wetlands and stems were cut at about 40 cm height from their bottom ends. Water of the Kwangju Stream flowed from a submerged dam into it via a pipe by gravity flow and treated effluent was funneled back into the Stream. The number of reed stems increased from 80 stems/$m^2$ in July 2001 to 136 stems/$m^2$ in September 2001. The hight of stems was 44.2 cm in July 2001 and 75.3 cm in September 2001. The establishment of reeds at early operating stage of the system was good. Volume and water quality of inflow and outflow were investigated from July 2001 through December 2001. The average inflow was 40 $m^3$/day and hydraulic detention time was about 1.5 days. The concentration of total phosphorous n influent and effluent was 0.83 and 0.33 mg/L, respectively. The removal rate of total phosphorous averaged about 60%. The removal efficiency was slightly higher, compared with that of subsurface-flow wetlands operating in North America, whose retention rate of total phosphorous was reported to be about 56%. The good abatement rate could be attributed to sedimentation of particle phosphorous in pores of the media and adsorption of phosphorous to the biofilm developed on the surface of them. Increase of standing density of reeds within a few years will develop root zones which may lead to increment in the phosphorous retention rate.

• The Korean Journal of Pesticide Science
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• v.4 no.1
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• pp.64-70
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• 2000

Control effects of phosphorous acid were investigated on three diseases. For Phytophthora blight of red pepper, protective and curative effects of phosphorous acid at the concentration of $1,408{\mu}g$ a. i./mL were 91.0% and 80.0%, respectively. In case of late blight of tomato, caused by Phytophthora infestans, protective and curative effects were 63.4% and 13.0% at the same concentration, respectively. However, the protective and curative effects of phosphorous acid increased by decreasing inoculum density of Phytophthora infestans. The protective effects of phosphorous acid on control of Phytophthora blight of red pepper was persisted for 4 days with high control efficacy (94.0%). The protective and curative effects of phosphorous acid ($1,408{\mu}g$ a. i./mL) on cucumber downy mildew were 82.0% and 62.0% respectively. The foliar application of phosphorous acid also promoted shoot growth and fresh weight of red pepper.

• Korean Journal of Environmental Agriculture
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• v.22 no.4
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• pp.251-254
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• 2003

Phosphorous removal rate and emergent plant growth were examined of a surface-flow constructed treatment wetland system, whose dimensions were 31 meter in length and 12 meter in width. The system was established on floodplain in the down reach of the Kwangju Stream in Korea in one and half months from May to June 2001. Cattails(Typha angustiflora) were transplanted in the system. They were dug out of natural wetlands and stems were cut at about 40 cm height from their bottom ends. Water of the Kwangju Stream were funneled into it via a pipe by gravity flow and its effluent were discharged back into it. The stems of cattails grew from 45.2 cm in July 2001 up to 186 cm in September 2001 and the number of cattail stems per square meter increased from 22 in July 2001 to 53 in September 2001. The early establishment of cattails was good. Volume and water quality of inflow and outflow were analyzed from July 2001 through December 2001. Inflow averaged $40\;m^3/day$ and hydraulic retention time was about 1.5 days. The concentration of total phosphorous in influent and effluent was 0.85 mg/L, 0.41 mg/L, respectively. The average removal rate of total phosphorous in the system was about 52%. The retention efficiency was slightly lower, compared with that in surface-flow wetlands operating in North America, whose retention efficiency was reported to be about 57%. The lower abatement rate could result from the initial stage of the system and inclusion of two cold months into the six-month monitoring period. Root rhizosphere in wetland soils and litter-soil layers on bottoms were not properly developed. Increase of standing density of cattails within a few years will establish both root zones and substrates beneficial to the removal of phosphorous, which may lead to increase of the phosphorous retention rate. The system was submerged one time by heavy storm during the monitoring period. The inundation, however, scarcely disturb its environment.