• Korean Journal of Optics and Photonics
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• v.14 no.4
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• pp.392-398
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• 2003

We present a novel concept of a phase-shifting diffraction-grating interferometer, which is intended for the optical testing of concave mirrors with high precision. The interferometer is configured with a single reflective diffraction grating, which performs multiple functions of beam splitting, beam recombination, and phase shifting. The reference and test wave fronts are generated by means of reflective diffraction at the focal plane of a microscope objective with large numerical aperture, which allows testing fast mirrors with low f-numbers. The fiber-optic confocal design is adopted for the microscope objective to focus a converging beam on the diffractive grating, which greatly reduces the alignment error between the focusing optics and the diffraction grating. Translating the grating provides phase shifting, which allows measurement of the figure errors of the test mirror to nanometer accuracy.

• Korean Journal of Optics and Photonics
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• v.15 no.4
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• pp.313-320
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• 2004

We present a null testing method fer aspheric surfaces, utilizing a phase-shifting diffraction grating interferometer along with a binary amplitude computer generated hologram (CGH). The binary amplitude CGH is designed to compensate for the wavefront between a point source and the aspheric surface under test. The fringe visibility of the grating interferometer is controlled easily by selecting suitable grating diffraction orders for the measurement and reference wavefronts or by optimizing the groove shape of the grating used. The binary amplitude CGH is designed by numerical analysis of ray tracing and fabricated using e-beam lithography for autostigmatic testing. Experimental results of a large-scale aspheric mirror surface are discussed to verify the measurement performance of the proposed diffraction grating interferometer.

• Korean Journal of Optics and Photonics
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• v.14 no.6
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• pp.643-648
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• 2003

The phase-shifting diffraction-grating interferometer proposed in the investigation uses a diffraction grating that performs manifold functions of beam splitting, beam recombination, and phase shifting. The reference and measurement waves generated by means of diffraction have different amplitudes depending on their orders of diffraction, so the interference fringe pattern resulting from the two waves tends to yield poor visibility. To cope with this problem, we select a phase grating of reflection type and attempt to improve the interference visibility with optimization of the groove shape of the grating through electromagnetic analysis.

• Korean Journal of Optics and Photonics
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• v.15 no.1
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• pp.56-62
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• 2004

We present a diffraction grating interferometer of large equivalent wavelength specially designed for flatness testing of rough surfaces. Two transmission diffraction gratings are illuminated on the object under test by use of two measurement beams with different angles of incidence, which yields a large equivalent wavelength. This interferometer design minimizes unnecessary diffraction rays and the systematic error caused by the diffraction gratings, and provides a large working distance and easy alignment. To improve the measurement accuracy, phase shifting technique is applied and the equivalent wavelength error caused by defocus is calibrated. Test results obtained from mirror surfaces and machined rough surfaces are discussed.

• Proceedings of the Optical Society of Korea Conference
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• 2003.07a
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• pp.148-149
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• 2003

렌즈와 거울의 형상을 정밀하게 측정하고 평가하는 광학시험에 많은 형태의 광간섭계가 개발되고 사용되어왔다. 그 중, 회절격자를 광선분할기로 사용하는 광간섭계들을 통칭하여 회절격자 간섭계라 부른다. 회절격자 간섭계는 별개의 광학표면을 사용하지 않고 회절격자에서 회절된 파면을 직접 기준파면으로 사용할 수 있으므로, 격자의 형태, 주기를 선정하여 기준파면과 측정파면을 원하는 방향으로 재생하여 다양한 형태의 간섭계를 만들 수 있다.(중략)