Diffraction grating interferometer of large equivalent wavelength for flatness testing of rough surfaces |
황태준
(한국과학기술원 기계공학과 BUPE연구단)
김승우 (한국과학기술원 기계공학과 BUPE연구단) |
1 |
Grating interferometer for flatness testing
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DOI |
2 |
General algorithm of phase-shifting interferometry by iterative lease-squares fitting
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DOI ScienceOn |
3 |
The interferoscope : a new type of interferometer with variable fringe separation
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4 |
Method and means for interferometric surface topography
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5 |
Characterization of a geometrically desensitized interferometer for flatness testing
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6 |
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7 |
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8 |
Oblique incidence interferometry applied to non-optical surfaces
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DOI ScienceOn |