• Journal of the Semiconductor & Display Technology
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• v.21 no.2
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• pp.32-37
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• 2022

As semiconductors become finer, equipment must perform precise and accurate processes to achieve the desired wafer fabrication requirement. Radio frequency power delivery system in plasma system plays a critical role to generate the plasma, and the role of impedance matching unit is critical to terminate the reflected radio frequency power by modifying the impedance of the matching network in the plasma equipment. Impedance matching unit contains one fixed inductor and two variable vacuum capacitors whose positions are controlled two step motors. Controlling the amount of vacuum variable capacitor should be made as soon as possible when the mismatched impedance is detected. In this paper, we present the impedance matching algorithm using the phase sensor.

• Journal of Power Electronics
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• v.3 no.3
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• pp.185-196
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• 2003

In this paper, the single-phase static VAR compensator (SVC) is applied to regulate and stabilize the generated terminal voltage of the single-phase self-excited induction generator (single-phase SEIG) driven by a variable-speed prime mover (VSPM) under the conditions of the independent inductive load variations and the prime mover speed changes The conventional fixed gain PI controller-based feedback control scheme is employed to adjust the equivalent capacitance of the single-phase SVC composed of the fixed excitation capacitor FC in parallel with the thyristor switched capacitor TSC and the thyristor controlled reactor TCR The feedback closed-loop terminal voltage responses in the single-phase SEIG coupled by a VSPM with different inductive passive load disturbances using the single-phase SVC with the PI controller are considered and discussed herem. A VSPM coupled the single-phase SEIG prototype setup is established. Its experimental results are illustrated as compared with its simulation ones and give good agreements with the digital simulation results for the single-phase SEIG driven by a VSPM, which is based on the SVC voltage regulation feedback control scheme.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.60 no.1
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• pp.48-52
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• 2011

Over the years, traditionally, six-switch three-phase inverters have been widely utilized for variable speed alternating current motor drives. Recently, some efforts have been made on the application of four-switch three phase inverter for uninterruptible power supply and variable speed drives. This is due to some advantages of the four-switch three phase inverter over the conventional six-switch three-phase inverters such as reduced price due to reduction in number of switches, reduced switching losses, reduced number of interface circuits to supply logic signals for the switches, simpler control algorithms to generate logic signals, less chances of destroying the switches due to lesser interaction among switches, and less real-time computational burden. However such as slow di/dt and speed limitation, are the inherent characteristics and main drawbacks of the four-switch configuration. Those problems can be overcome in conjugation with Voltage-doublers which has additional advantage, such as unity power factor correction.

• Journal of electromagnetic engineering and science
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• v.13 no.2
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• pp.137-139
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• 2013

A compact metamaterial (MTM)-based tunable phase shifter consisting of four unit cells with a simple DC bias circuit has been designed at 2.4 GHz. The variable series capacitors and shunt inductors that are required to be loaded periodically onto a host transmission line are realized employing only chip variable capacitors (varactors). In addition, the proposed phase shifter requires only one DC bias source to control the varactors, with the matching condition of the MTM line automatically satisfied. The measured phase shifting range is $285.2^{\circ}$ (from $-74.2^{\circ}$ to $211^{\circ}$). The measured insertion loss is approximately 1.5 dB. The circuit/electromagnetic-simulated and measured results are in good agreement.

• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3117-3119
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• 1999

In this paper, a new phase detector which can detect phase difference of variable input frequency and represent as a DC voltage is designed. The proposed phase detector has detection range from $-180^{\circ}$ to $180^{\circ}$. It is implemented by digital electronic circuit. It operates from 125 kHz to 4 MHz frequency of input signal and it's maximum phase error is $360/256^{\circ}$.

• Proceedings of the KIEE Conference
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• 1995.07a
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• pp.227-230
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• 1995

This paper presents continuous control concept of unsymmetrical 2 phase induction machine(I.M.). For 2 phase driving of the unsymmetrical I.M., variable voltage and variable frequency inverter is needed. In this paper, a new 12 step PWM 2 phase inverter was proposed. And then, proposed inverter fed 2 phase driving of unsymmetrical I.M. was studied, expecially on average torque and pulsation torque. This system has merits like higher fundamental component and better harmonic characteristics. The simulation was done on this issue and experimental research is on the way.

• Journal of Power Electronics
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• v.7 no.3
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• pp.222-232
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• 2007

This paper presents the application of a single phase AC-to-DC converter using a three-phase series parallel (SPRC) resonant converter to variable speed dc-drive. The improved power quality converter gives the input power factor unity over a wide speed range, reduces the total harmonic distortion (THD) of ac input supply current, and makes very low ripples in the armature current and voltage waveform. This soft-switching converter not only possesses the advantages of achieving high switching frequencies with practically zero switching losses but also provides full ranges of voltage conversion and load variation. The proposed drive system is the most appropriate solution to preserve the present separately excited de motors in industry compared with the use of variable frequency ac drive technology. The simulation and experimental results are presented for variable load torque conditions. The variable frequency control scheme is implemented using a DSP- TMS320LF2402. This control reduces the switching losses and current ripples, eliminates the EMI and improves the efficiency of the drive system. Experimental results confirm the consistency of the proposed approach.

• Journal of Power Electronics
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• v.14 no.6
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• pp.1243-1253
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• 2014

The phase inductance of a switch reluctance motor (SRM) is significantly nonlinear. With different saturation conditions, the phase inductance shape is clearly changed. This study focuses on the relationship between coefficient and current in an inductance model with ignored harmonics above the order of 3. A position estimation method based on the variable coefficient inductance model is proposed in this paper. A four-quadrant sensorless control system of the SRM drive is constructed based on the relationship between variable coefficient inductance and rotor position. The proposed algorithms are implemented in an experimental SRM test setup. Experimental results show that the proposed method estimates position accurately in operating two/four-quadrants. The entire system also has good static and dynamic performance.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.31 no.1C
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• pp.65-73
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• 2006

The purpose of this study is to design and analyze the pre-modulation filter with the variable -3dB cutoff frequency and linear phase response for bandlimiting the allocation of radio frequency bandwidth in PCM/FM transmission system. For the implementation of this required filter, the digital FIR filter, DAC and variable 2nd order LPF have been constructed with the filter block which designed and analyzed by each stage in order to satisfy the attenuation characteristic requirement of the analog 7th order bessel filter. The paper also concerned the linear phase properties for the filter block. Especially we have carried out the linear phase simulation with real parts for variable 2nd order LPF and compared this simulation results with the one of the fixed bandwidth 2nd order bessel filter for validating the linear phase requirement.

• Proceedings of the KIPE Conference
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• 2003.07b
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• pp.532-535
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• 2003

In this paper, a Pl controlled feedback closed-loop voltage regulation scheme of the three-phase squirrel cage rotor self-excited induction generator (SEIG) driven by a variable-speed prime mover (VSPM) such as a wind turbine is designed on the basis of the static VAR compensator (SVC) and discussed in experiment fer the promising stand-alone power independent conditioner. The simulation and experimental results of the three-phase SEIG with the simple SVC controller for its stabilized voltage regulation prove the practical effectiveness of the additional SVC control loop scheme including the PI controller with fast response characteristics and steady-sate performance improvement.