• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 춘계학술대회 논문집
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• pp.14-14
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• 2010

Recently, low temperature co-fired ceramic (LTCC) technology has gained a remarkable application potential in sensors, actuators and micro systems fields because of its very good electrical and mechanical properties, high reliability and stability as well as possibility of making 3D micro structures. In this study, we investigated the effects of annealing treatment on the electrical properties of $Pb(ZrTi)O_3$ (PZT) thin films deposited on LTCC substrate. PZT thin films were deposited on Au / LTCC substrates by RF magnetron sputtering method. Then, the change of the crystallization of the films were investigated under various annealing temperatures and times. The results showed that the crystallization of the films were enhanced as increasing annealing temperatures. The film, annealed at $700^{\circ}C$, 3min, was well crystallized in the perovskite structure.

• 한국재료학회지
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• 제27권3호
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• pp.155-160
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• 2017

Doped-$LaCrO_3$ perovskites, because of their good electrical conductivity and thermal stability in oxidizing and/or reducing environments, are used in high temperature solid oxide fuel cells as a gas-tight and electrically conductive interconnection layer. In this study, perovskite $(La_{0.8}Ca_{0.2})(Cr_{0.9}Co_{0.1})O_3$ (LCCC) coatings manufactured by atmospheric plasma spraying followed by heat treatment at $1200^{\circ}C$ have been investigated in terms of microstructural defects, gas tightness and electrical conductivity. The plasma-sprayed LCCC coating formed an inhomogeneous layered structure after the successive deposition of fully-melted liquid droplets and/or partially-melted droplets. Micro-sized defects including unfilled pores, intersplat pores and micro-cracks in the plasma-sprayed LCCC coating were connected together and allowed substantial amounts gas to pass through the coating. Subsequent heat treatment at $1200^{\circ}C$ formed a homogeneous granule microstructure with a small number of isolated pores, providing a substantial improvement in the gas-tightness of the LCCC coating. The electrical conductivity of the LCCC coating was consequently enhanced due to the complete elimination of inter-splat pores and micro-cracks, and reached 53 S/cm at $900^{\circ}C$.

• 한국수소및신에너지학회논문집
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• 제24권1호
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• pp.29-35
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• 2013

A dense mixed ionic and electronic conducting ceramic membrane is one of the most promising materials because it can be used for separation of oxygen from the mixture gas. The $ABO_3$ perovskite structure shows high chemical stability at high temperatures under reduction and oxidation atmospheres. $BaCo_{1-x-y}Fe_xZr_yO_{3-{\delta}}$ (BCFZ) was well-known material as high mechanical strength, low thermal conductivity and stability in the high valence state. Glycine Nitrate Process (GNP) is rapid and effective method for powder synthesis using glycine as a fuel and show higher product crystallinity compared to solid state reaction and citrate-EDTA method. BCFZ was fabricated by modified glycine nitrate process. In order to control the burn-up reaction, $NH_4NO_3$ was used as extra nitrate. According to X-Ray Diffraction (XRD) results, BCFZ was single phase regardless of Zr dopants from y=0.1 to 0.3 on B sites. The green compacts were sintered at $1200^{\circ}C$ for 2 hours. Oxygen permeability, methane partial oxidation rate and hydrogen production ability of the membranes were characterized by using Micro Gas Chromatography (Micro GC) under various condition. The high oxygen permeation flux of BCFZ 1-451 was about $1ml{\cdot}cm^{-2}s^{-1}$. Using the humidified Argon gas, BCFZ 1-433 produced hydrogen about $1ml{\cdot}cm^{-2}s^{-1}$.

• 센서학회지
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• 제10권3호
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• pp.173-179
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• 2001

현재 사용되어지는 반도체형 압력센서에는 압저항형과 용량형이 있다. 특히 반도체 마이크로 압력센서는 크기도 작고 신호처리회로를 동일칩 위에 집적화 할 수 있어 많은 관심을 모아왔다. 그러나 이러한 형태의 센서들은 제조공정이 복잡해서 생산성이 낮다. 기존의 센서들이 가지는 단점들을 극복하기 위해 새로운 형태의 FET형 압력센서(PSFET : pressure sensitive field effect transistor)를 제안하고 그 동작특성을 조사하였다. 압력 감지 물질은 PZT(Pb(Zr,Ti)$O_3$)를 사용하였다. RF 마그네트론 스퍼터링법을 사용하여 MOSFET의 게이트 절연막 위에 PZT 압전 박막을 증착하였다. PZT의 안정적 상태인 perovskite 구조를 형성하기 위하여 PbO 분위기에서 열처리하는 기법을 도입하였다. 제작된 PSFET의 감도는 0.38 mV/mmHg이다.

• 전기화학회지
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• 제11권2호
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• pp.89-94
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• 2008

GNP(Glycine Nitrate Process)을 이용하여$(La_{0.75}Sr_{0.25})_{1-x}FeO_{3-\delta}$를 합성하고, perovskite의 A-site deficiency에 따른 특성을 분석하기 위해 x=0, 0.02, 0.04, 0.06, 0.08로 바꾸어 합성하였다. SEM과 XRD분석을 통하여 균질하고 결정성이 높은 분말이 합성된것을 확인하였으며, 4단자법과 AC impedance spectroscopy를 통하여 전도도는 x = 0.02가 $750^{\circ}C$ $155{\Omega}cm^2$로 가장 우수하였으며, AC impedance결과 역시 x = 0.02가 가장 낮은 분극저항과 활성화 에너지를 가지고 있었다. 이 결과 Perovskite의 A-site deficiency를 가함에 따라 산소 결핍 및 구조의 변화가 생겼으며 이로 인해 전도도와 분극 저항, 활성화 에너지에 영향을 미친 것을 알 수 있었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.189.1-189.1
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• 2014

Lead zirconium titanate (PZT) is usually used as bulk and thin films. Due to high flexibility and piezoelectric, ferroelectric and pyroelectric properties, PZT fiber has attracted in a variety of fields such as sensor devices, non-electromechanical systems and non-volatile ferroelectric memory devices. And PZT fiber can be numerously synthesized and almost with the diameter of PZT fiber thicker than $10{\mu}m$. However, the electrospinnig method is cost effective and convenient. PZT obtained by electrospinning methodhas the diameter from sub-micro to nanometer. In this paper, the PZT/PVP nanofibers were synthesized with three precursors, lead nitrate, zirconium ethoxide and titanium isopropoxide. And the PZT nanofibers were fabricated after removal of PVP by annealing process at various temperature. The obtained PZT nanofibers were characterized by means of X-ray photoelectron spectroscopy (XPS) for chemical properties, X-ray diffraction (XRD) for crystallinity and phase, scanning electron microscopy (SEM) for morphologies. The diameter of PZT nanofibers were measured with SEM. From the SEM images, we confirmed that diameter of PZT nanofibers was hundreds of nanometers and decreased with increasing the annealing temperature. When the annealing temperature increased, the crystallinity of PZT nanofibers changed from pyrochlore to perovskite structure.

• 한국전기전자재료학회논문지
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• 제19권11호
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• pp.1014-1019
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• 2006

The influence of the number of solution coatings on the densification of the PZT thick films was studied. PZT powder and PZT precursor solution was prepared by a sol-gel method and PZT thick films were fabricated by the screen-printing method on the alumina substrates. The powder and solution of composition were (A) PZT(80/20)/PZT(20/80), (B) PZT(70/30)/PZT(30/70) and (C) PZT(60/40)/PZT(40/60), (D) PZT(52/48)/PT. The coating and drying procedure was repeated 4 times. And then the PZT precursor solution was spin-coated on the PZT thick films. A concentration of a coating solution was 0.5 moth and the number of coating was repeated from 0 to 6. The porosity of the thick films was decreased with increasing the number of coatings and the PZT thick films with 6-times coated showed the dense microstructure and thickness of about $60{\mu}m$. A grain size was increased with increasing the coating number. All PZT thick films showed the typical XRD patterns of a typical perovskite polycrystalline structure. The relative dielectric constant of PZT thick films was improved 30-100% as the number of coatings.

• 대한기계학회논문집B
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• 제28권3호
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• pp.265-270
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• 2004

Experiment study on a down scaled two-phase catalytic reactor is presented. As a preliminary step for the development of catalytic reactor, nano-particulate catalyst was prepared. Perovskite La$\_$0.8/Sr$\_$0.2/CoO$_3$is chosen and synthesized as a catalyst considering superior catalytic performance in reduction and oxidation process where oxygen is involved among the reagent. Reactor that has a scale of 2${\times}$10${\times}$25mm was made by machining of A1 block as a layered structure considering further extension to micro-machining. Hydrogen peroxide of 70wt% was adopted as reactant and was provided to the reactor loaded with 1.5 g of catalyst. Reactant flow rate was varied by precision pump with a range of 0.15cc/min to 17.2cc/min. Temperature distribution within reactor was recorded by 3 thermocouples and total amount of liquid product was measured. Temperature distribution and factors that affect temperature were observed and relation between temperature distribution and production rate was also analyzed. Relative time scale plays a significant role in the performance of the reactor. To obtain steady state operation, appropriate ratio of flow rate, catalyst mass and reactor geometry is required and furthermore to get more efficient production rate temperature distribution should be evenly distributed. The database obtained by the experiment will be used as a design parameter for micro reactor.

• 대한화학회지
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• 제39권9호
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• pp.685-691
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• 1995

결정 분자 궤도함수[EHTB]를 계산할 수 있는 VAX 컴퓨터용 EHMACC와 EHPC 프로그램을, 마이크로-소프트 포트란을 이용하는 PC로 계산할 수 있도록 변환하였다. 이 프로그램을 이용하여 perovskit 구조의 $LaNiO_3$ 단위세포와 ($2{\times}2{\times}1$)으로 확장된 구조에 대한 띠 구조를 계산한 결과, ${\Gamma}{\rightarrow}H,\;H{\rightarrow}N$ 및 $N{\rightarrow}{\Gamma}$ 방향(2차원)에서는 bend gap이 0.35eV인 반도체의 성질을 나타내고, ${\Gamma}{\rightarrow}P$와 $P{\rightarrow}N$ 방향(3차원)에서는 금속성의 성질을 나타내었다. 또 이들 결정에 관한 DOS와 COOP를 고찰한바, $LaNiO_3$에서 산소원자의 DOS는 니켈원자의 결함보다는 산소원자의 위치에 영향을 받아 서로 다른 종류의 산소원자로 존재할수 있음을 알았다.

• 한국재료학회지
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• 제19권4호
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• pp.198-202
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• 2009

For use in ultrasonic actuators, we investigated the structural and piezoelectric properties of $(1\;-\;x)Pb(Zr_{0.515}Ti_{0.485})O_3$ - $xPb(Sb_{1/2}Nb_{1/2})O_3$ + 0.5 wt% $MnO_2$ [(1 - x)PZT - xPSN + $MnO_2$] ceramics with a variation of x (x = 0.02, 0.04, 0.06, 0.08). All the ceramics, which were sintered at $1250^{\circ}C$ for 2 h, showed a typical perovskite structure, implying that they were well synthesized. A homogeneous micro structure was also developed for the specimens, and their average grain size was slightly decreased to $1.3{\mu}m$ by increasing x to 0.8. Moreover, a second phase with a pyrochlore structure appeared when x was above 0.06, which resulted in the deterioration of their piezoelectric properties. However, the 0.96PZT-0.04PSN+$MnO_2$ ceramics, which corresponds with a morphotropic phase boundary (MPB) composition in the (1 - x)PZT - xPSN + $MnO_2$ system, exhibited good piezoelectric properties: a piezoelectric constant ($d_{33}$) of 325 pC/N, an electromechanical coupling factor ($k_p$) of 70.8%, and a mechanical quality factor ($Q_m$) of 1779. The specimens with a relatively high curie temperature ($T_c$) of $305^{\circ}C$ also showed a significantly high dielectric constant (${\varepsilon}_r$) value of 1109. Therefore, the 0.96PZT - 0.04PSN + $MnO_2$ ceramics are suitable for use in ultrasonic vibrators.