• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.31-31
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• 2008

고주파 잡음 발생과 고집적화 문제 해결을 위해 고용량 디커플링 캐패시터를 기판에 내장하는 연구가 활발히 진행되고 있다. 본 연구에서는 초고주파 환경에서 고용량 기판 내장형 디커플링 캐패시터로의 응용을 위해 $BaTiO_3$박막을 에어로졸 데포지션 법을 이용하여 12~0.2 ${\mu}m$의 두께로 제조하였고 그 유전특성을 조사하였다. 그결과, 1 MHz에서 permittivity가 70, loss tangent은 3% 이하였으며, capacitance density는 $1{\mu}m$의 두께에서 59 nF/$cm^2$이었다. 하지만, 박막의 두께가 $1{\mu}m$ 이하에서는 XRD를 통해 결정성이 확인 되었음에도 큰 누설전류로 인해 유전특성을 확인할 수 없었다. 이 누설전류의 발생 원인을 조사하기 위해 $BaTiO_3$박막의 표면의 미세구조를 SEM으로 관찰한 결과 여러 결함들이 확인되었으며, 또한 전극 직경의 크기를 1.5 mm에서 0.33 mm로 작게 변화시킴으로서 그 유전특성을 조사하여 박막의 불균일성과 박막화의 가능성을 확인하였다.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.12
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• pp.555-559
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• 2006

Using the $Ba_{0.5}Sr_{0.5}TiO_3$(BST) powders prepared by the Sol-Gel method, the BST thick films were fabricated on the $Al_2O_3 $substrates coated with Pt by the screen printing method. Compared with pure BST thick films, the structural and dielectric properties of the BST thick films doped with $1{\sim}10$ wt % MgO were investigated. It was observed that the Mg substitution into BST causes a shift in the cubic-tetragonal BST phase transition peak to a lower temperature. The microstructure of the BST substituted with Mg was homogeneous and dense. Mg substitution into BST had a significant effect on the grain size reduction. Dielectric constant was decreased with increasing the MgO content and temperature. In the case of BST thick films doped with 1 wt% MgO, the relative permittivity and dielectric loss were 1581 and 1.4 % at 1 MHz.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.11a
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• pp.132-135
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• 1999

Recently, the ceramics of high permittivity are applied to DRAM and FRAM. In this study, (B $a_{x}$ S $r_{l-x}$)Ti $O_3$(BST) ceramics thin films were prepared by Sol-Gel method. BST solution was made and spin-coated on Pt/ $SiO_2$/Si substrate at 4000 [rpm] for 10 seconds. Coated specimens were dried at 150[$^{\circ}C$] for 5 minutes. Coating process was repeated 3 times and then sintered at 750[$^{\circ}C$] for 30 minutes. Each specimen was analyzed structure and electrical characteristics. Thickness of BST ceramics thin films are about 2000($\AA$). Dielectric constant and loss of thin films was little decreased at 1[KHz] ~1[KHz]. Dielectric constant and loss to frequency were 250 and 0.02 in $Ba_{0.7}$S $r_{0.3}$Ti $O_3$. The properly of leakage current as the realation between the current and the voltage was that change of the leakage current was stable when the applied voltage was 0~3[V].

• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.5-6
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• 2006

Using the $(Ba_{0.5}Sr_{0.5}){TiO_3}$(BST) powders prepared by the Sol-Gel method, the EST thick films were fabricated on the ${Al_2}{O_3}$ substrates coated with Pt by the screen printing method. Compared with pure EST thick films, the structural and dielectric properties of the EST thick films doped with 1${\sim}$10 wt % MgO were investigated. It was observed that the Mg substitution into EST causes a shift in the cubic-tetragonal EST phase transition peak to a lower temperature. The microstructure of the EST substituted with Mg was homogeneous and dense. Mg substitution into EST had a significant effect on the grain size reduction. Dielectric constant was decreased with increasing the MgO content and temperature. In the case of EST thick films doped with 1 wt% MgO, the relative permittivity and dielectric loss were 158] and 1.4 % at 1 MHz.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1621-1623
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• 1996

The dielectric and polarizable properties of 0.85Pb$Mg_{1/3}Nb_{2/3}$)$O_3$-$0.125PbTiO_3$-$0.25BaTiO_3$ Ceramics have been investigated as a addition of the amount of $La_{2}O_{3}$($0{\leq}x{\geq}0.05$). The Temperature-dependant electrostictive characteristics of 0.85PMN-0.125PT-0.25BT relaxor ferroelectic system were improved by enhencing the extent of the diffuse phase transition(DPT). This was achieved using PMN-PT-BTceramics by the partial substitution of La at the Pb site. The curie temperature and the maximum dielectic permittivity decreased by substituting $La_{2}O_{3}$ and the electic field-related hysteresis phenomena decreased with increasing $La_{2}O_{3}$ substitution amount. It is showed decreasing in induced strain for electric field with increasing $La_{2}O_{3}$ substitution.

• Proceedings of the KIEE Conference
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• 1997.07d
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• pp.1537-1539
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• 1997

In this study, the dielectric properties of $Pb(Mg_{1/3}Nb_{2/3})O_3-PbTiO_3$ Ceramics have been investigated as a addition of the amount of $MnO_2(0{\leq}x{\leq}0.9wt%)$. The Temperature-dependant dielectric characteristics of 0.9PMN-0.1PT relaxor ferroelectric system were improved by enhencing the extent of the diffuse phase transition(DPT). The maximum dielectric permittivity decreased by substitution $MnO_2$ and the dielectric loss decreased with increasing $MnO_2$ substitution amount. It is expected decreasing in inner heat energy for temperature with increasing $MnO_2$ substitution.

• Journal of the Korean Ceramic Society
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• v.40 no.10
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• pp.925-930
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• 2003

The dielectric polarizability-related factors contributing to the $\tau$$_{\varepsilon}$ have been analysed in terms of dielectric permittivity $\varepsilon$, Tolerance Factor (TF), and octahedron tilt angles in (1-x)CaTi $O_3$-x[A(B', B″) $O_3$] (A=Ca, La, Li, B'=Al, Fe, Mg, B″=Nb, Ta) and (S $r_{0.2}$C $a_{0.8}$)( $Ti_{1-x}$ Z $r_{x}$) $O_3$. All the compounds have the orthorhombic Pbnm structure except the end members A(B', B″) $O_3$ and the solid solutions of x$\geq$0.8. The additional dipole field effect is suggested as a dominant factor contributing to $\tau$$_{\varepsilon}$ in CaTi $O_3$-based ceramics having relatively large $\varepsilon$, which has not been generally considered in the previous reports dealing with the $\tau$$_{\varepsilon}$. This study has been focussed on delineating the dipole field effect on the $\tau$$_{\varepsilon}$ in comparison to the octahedron tilt effect in CaTi $O_3$-based ceramics.cs..cs.

• Korean Journal of Crystallography
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• v.11 no.4
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• pp.191-194
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• 2000

Bi/sub 12/SiO/sub 20/, Bi/sub 12/GeO/sub 20/ and Bi/sub 12/O/sub 20/ compounds with the sillenite crystal structure were synthesized and sintered into the dense ceramic bodies. An analyses of the microwave dielectric properties of the Si, Ge and Ti sillenites showed a permittivity (e) of ∼40 and a negative temperature coefficient of the resonant frequency for all analogues (from -20 to -40 ppm/K). The Qxf value of the Si and Ge sillenites was measured to be ∼8.000 GHz. The Ti analogue shows a significantly lower Qxf value(∼2.500 GHz) and is sensitive to the heat-treatment conditions. By increasing the sintering temperature the size of the grains increases, which correlates with an increase in the Qxf value.

• Proceedings of the KIEE Conference
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• 2001.11a
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• pp.100-102
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• 2001

In this paper, the piezoelectric and dielectric properties of $Pb(Zr_xTi_{1-x)O_3$ - $Pb(Co_{1/3}Nb_{1/3})O_3)$ piezoelectric ceramics have been investigated as a function of Zr/Ti mole ratio. From the results, when Zr/Ti mole ratio is 49/51, electromechanical coupling coefficient($k_p$), piezoelectric strain constant($d_{33}$) mechanical quality factor($Q_m$), and Permittivity(${{\varepsilon}_{33}}^T/{\varepsilon}_0$) is 64[%], 469[PC/N], 360 and 2000, respectively. Morphotropic Phase Boundary is Zr/Ti mole ratio(49/51) from XRD analysis. Also. From SEM observation, when sintering temperature is 1150[$^{\circ}C$], grain size is about $1{\sim}2[{\mu}m]$ and maximum sintering density is 7.85[$g/cm^3$].

• Korean Journal of Materials Research
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• v.12 no.2
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• pp.160-165
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• 2002

High-frequency dielectric and microwave absorbing properties have been investigated in ferroelectric materials (BaTiO$_3$(BT), (1-x)Pb$Mg_{\frac{1}{3}}Nb_{\frac{2}{3}}$)O$_3$-xPbTiO$_3$(PMN-PT), (1-x)Pb$Mg_{\frac{1}{3}}Nb_{\frac{2}{3}}$O$_3$-xPb(Zn_{\frac{1}{3}}Nb_{\frac{2}{3}}$)O$_3$(PMN-PZN) for the aim of thin microwave absorbers in the frequency range of mobile telecommunication. The specimenns are prepared by conventional ceramic processing and complex permittivity has been measured by transmission/reflection method. The ferroelectric materials show high dielectric constant and dielectric loss in the microwave range and their domiant loss mechanism is considered to be domain wall relaxation. The microwave absorbance of BT 0.9PMN-0.1PT, and 0.8PMN-0.2PZN specimen (determined at 2) are found to be 99.5% (at a thickness of 4.5 mm), 50% (2.5 mm), and 30% (2.5 mm), respectively. It is suggested that PMN-PT or PMN-PZN ferroelectrics are good candidate materials for the spacer of λ/4 absorber. The use of ferroelectric materials is effective in reducing the thickness of absorber with their advantage of high dielectric constant.