• Title/Summary/Keyword: Patterning

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A Study on Fabrication of La0.5Sr0.5CoO3Thin Films as an Electrode for Ferroelectric Memory by Self-patterning Technique (Self-patterning 기술을 이용한 강유전체 메모리 전극용La0.5Sr0.5CoO3박막의 제조에 관한 연구)

  • 손현수;김병호
    • Journal of the Korean Ceramic Society
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    • v.40 no.2
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    • pp.153-158
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    • 2003

  • Self-patterning of thin films using photosensitive sol solution has advantages such as simple manufacturing process compared to photoresist/dry etching process. In this study,$La_{0.5}SR_{0.5}CoO_3$(LSCO) thin films as an electrode material for ferroelectric memories have been prepared by spin coating method using photosensitive sol solution. La-2methoxyethoxide, Sr-ethoxide, Co-2methoxyethoxide were used as starting materials. As UV exposure time to the LSCO gel thin film increased, the UV absorption peak intensity of metal${beta}$-diketonate decreased due to reduced solubility by M(metal)-O-M bond formation. Solubility difference by UV irradiation on LSCO gel thin film allows to obtain a fine patterning of thin film. The LSCO thin films annealed over$680{\circ}C$ in air showed perovskite phase and the lowest resistivity$(4{ imes}10^{-3}{Omega}cm)$ of the thin films were obtained by annealing at$740{\circ}C$.

  • https://doi.org/10.4191/KCERS.2003.40.2.153 인용 PDF KSCI

Implementation of Biosensor Pattern Using Micro Patterning Technique (미세전극 패터닝 기술을 이용한 바이오센서 패턴 구현)

  • Ko, Jeong Beom;Kim, Hyung Chan;Yang, Young Jin;Kim, Hyun Bum;Yang, Seong Wook;Oh, Seung Ho;Doh, Yang Hoi;Choi, Kyung Hyun
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.15 no.6
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    • pp.122-128
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    • 2016

  • The Biosensor biosensor pattern was developed by via an EHD (electro-hydro-dynamics (EHD) patterning process that was performed under atmospheric pressure at room temperature in a single step. The drop diameter was smaller than nozzle diameter and applied high viscosity conductive ink was applied in the EHD patterning method to provide a clear advantage over the piezo and thermal inkjet printing techniques. The Biosensor's biosensor's micro electrode pattern was printed by via a continuous EHD patterning method using 3three- type types of control parameters parameter (input voltage, patterning speed, nozzle pressure). High viscosity (1000 cps) conductive ink with 75 wt% of silver nanoparticles was used for experimentation. The incremental result of impedance of biosensor impedance was measured between the antibody ($10ug{\mu}g/ml$) to spore (0.1 ng/ml, 10 ng/ml, and $1ug{\mu}g./ml$) reaction at frequency 493 MHz frequency.

  • https://doi.org/10.14775/ksmpe.2016.15.6.122 인용 PDF KSCI

A Study on Fabrication of Photosensitive Sr0.9Bi2.1Ta2O9 Thin Film by Sol-gel Self-patterning Technique (Sol-gel Self-patterning 기술을 이용한 광감응성 Sr0.9Bi2.1Ta2O9 박막의 제조기술에 관한 연구)

  • Yang, Ki-Ho;Park, Tae-Ho;Lim, Tae-Young;Auh, Keon-Ho;Kim, Byong-Ho
    • Journal of the Korean Ceramic Society
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    • v.39 no.8
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    • pp.750-757
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    • 2002

  • Self-patterning of thin films using photosensitive sol solution has advantages such as simple manufacturing process compared to photoresist/dry etching process. In this study, ferroelectric $Sr_{0.9}Bi_{2.1}Ta_2O_9$ thin films have been prepared by spin coating method using photosensitive sol solution. Strontium ethoxide, tertramethylheptanedionato bismuth and tantalum ethoxide were used as starting materials. As UV exposure time to the SBT thin film increased, the UV absorption peak intensity of metal ${\beta}$-diketonate decreased due to reduced solubility by M-O-M bond formation. Solubility difference by UV irradiation on SBT thin film allows to obtain a fine patterning of thin film. Also, The ferroelectric properties of the UV irradiated SBT thin films were superior to those of the no-UV irradiated films.

  • https://doi.org/10.4191/KCERS.2002.39.8.750 인용 PDF KSCI