• Title/Summary/Keyword: Pattern Fabrication

Search Result 713, Processing Time 0.037 seconds

Fabrication of Master for a Spiral Pattern in the Order of 50nm (50nm급 불연속 나선형 패턴의 마스터 제작)

  • Oh, Seung-Hun;Choi, Doo-Sun;Je, Tae-Jin;Jeong, Myung-Yung;Yoo, Yeong-Eun
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.25 no.4
    • /
    • pp.134-139
    • /
    • 2008

  • A spirally arrayed nano-pattern is designed as a model pattern for the next generation optical storage media. The pattern consists off types of embossed rectangular dot, which are 50nm, 100nm, 150nm and 200nm in length and 50nm in width. The height of the dot is designed to be 50nm. The pitch of the spiral track of the pattern is 100nm. A ER(Electron resist) master for this pattern is fabricated by e-beam lithography process. The ER is first spin-coated to be 50nm thick on a Si wafer and then the model pattern is written on the coated ER layer by e-beam. After developing this pattern written wafer in the solution, a ER pattern master is fabricated. The most conventional e-beam machine can write patterns in orthogonal way, so we made our own pattern generator which can write the pattern in circular or spiral way. This program generates the patterns to be compatible with the e-beam machine from Raith(Raith 150). To fabricate 50nm pattern master precisely, a series of experiments were done including the design compensation for the pattern size, optimization of the dose, acceleration voltage, aperture size and developing. Through these experiments, we conclude that the higher accelerating voltages and smaller aperture size are better for mastering the nano pattern which is in order of 50nm. With the optimized e-beam lithography process, a spiral arrayed 50nm pattern master adopting PMMA resist was fabricated to have dimensional accuracy over 95% compared to the designed. Using this pattern master, a metal pattern stamp will be fabricated by Ni electro plating for injection molding of the patterned plastic substrate.

  • PDF KSCI

Collision Behavior of Molten Metal Droplet by Laser Beam (레이저 빔에 의해 생성된 금속액적의 충돌거동)

  • 김용욱;양영수
    • Laser Solutions
    • /
    • v.6 no.1
    • /
    • pp.1-8
    • /
    • 2003

  • A molten metal droplets are deposited onto solid substrate for solid freeform fabrication, Collision dynamic and substrate heat transfer associated with solidification determine the final shape of molten metal droplets. In this study, the experimental model, based on the variational condition with substrate temperature and falling height, was produced reliable optimal data of droplet pattern.

  • PDF

Fabrication of a stamper and injection molding for micro pattern product (미세 패턴 제품 마스터 제작 및 성형 공정 기술 개발)

  • Yoo Y.E;Seo Y.H;Je T.J.;Choi D.S
    • Proceedings of the Korean Society of Precision Engineering Conference
    • /
    • 2005.06a
    • /
    • pp.216-219
    • /
    • 2005

  • In recent, LCD becomes one of the main display devices and expected to have quite good market share during the next couple of years. The demand for low cost and high performance, however, is becoming severe as the competition among other display devices like PDP, OLED increases. To satisfy this demand from market, we need to optimize the parts or modules of the LCD, reduce the number of the assemble and enhance the process for the high brightness and uniformity of the LCD. The LCD consists mainly of LCD panel and Backlight unit(BLU). BLU, which takes big portion of the cost for LCD, consists of light source, light guide panel and many kinds of functional film. Recently light guide panel or film for BLU has micro patterns on its surface and consequently to reduce the number of parts and enhace the brightness and its uniformity. In this study, some methodologies for the fabrication of the master/stamper and molding the light quide panel are introduced for 50um pitch of prizm patterned substrate. Mechanical machining process is adapted and optimized to fabricate micro patterned stamper using the micro cutting tool. Injection molding technology is also developed to obtain uniformly replicated micro patterned products.

  • PDF