Fabrication of Master for a Spiral Pattern in the Order of 50nm |
Oh, Seung-Hun
(부산대학교 나노융합기술학과)
Choi, Doo-Sun (한국기계연구원 나노기계연구본부 나노공정팀) Je, Tae-Jin (한국기계연구원 나노기계연구본부 나노공정팀) Jeong, Myung-Yung (부산대학교 나노시스템 공정공학과) Yoo, Yeong-Eun (한국기계연구원 나노기계연구본부 나노공정팀) |
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