• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1400-1403
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• 2007

The 3DP(three dimensional printing) technology is one of the SFF(solid freeform fabrication) technologies which has recently come into a spotlight due to its suitability to various field. A manufacturing process of product is using many pattern formation technology. The 3DP technology uses multi nozzle that can fabricate three dimensional object of high speed and accuracy. In this paper, we introduce a development of the office type solid freeform fabrication system. This system is used UV resin and multi-piezo head.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1249-1253
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• 2007

Experimental studies on the fabrication of sub-30 nm nanofibers using weakly two-photon induced photopolymerized region have been carried out. For the generation of nanofibers inside or outside microstructures, an over-polymerizing method involving a long exposure technique (LET) was proposed. Such nanofibers can find meaningful applications as bio-filters, mixers, and many other uses in diverse research field. A multitude of nanofibers with a notably high resolution (about 22 nm) in two-photon polymerization was achieved using the LET. Furthermore, it was demonstrated that the LET can be employed for the direct fabrication of various embossing patterns by controlling the exposure duration and the interval between voxels. Thin interconnecting networks are formed regularly in the boundary of the over-polymerized region, which allows for the creation of various pattern shapes. Overall of this work, some patterns including nanofibers are fabricated by the LET.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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• pp.989-992
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• 2008

X-ray lithography is one of the most powerful processes in the fabrication of nano/micro structures with a high aspect ratio. This process enables the fabrication of ultra-thin barrier ribs for PDP using X-ray sensitive paste. In this paper, organic material including photo-monomers, photo-oligomers, binder polymer and additives as well as inorganic powders with different size were optimized to fabricate high aspect ratio barrier rib pattern for PDP.

• Journal of electromagnetic engineering and science
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• 제17권4호
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• pp.228-232
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• 2017

The radiation properties and fabrication precautions of a 3D printed, electrically small folded spherical meander wire monopole antenna are investigated. The antenna is self-resonant and shows sufficiently high radiation efficiency at an electrical size ka of 0.4, with the radiation quality factor Q approaching the lower physical bound. In antenna fabrication, the possible structural deformation due to gravity is examined before the antenna frame is 3D-printed. The required conductivity is achieved by multiple manual paintings of a silver paste. The radiation efficiency and pattern show very good agreement with the computed expectations, whereas the resonant frequency deviates by 11.8%. The method to minimize such a fabrication error when using 3D printing technology for wire antennas is discussed.

• Macromolecular Research
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• 제12권5호
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• pp.474-477
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• 2004

We present simple, low-cost methods for the fabrication of polymeric waveguides that have large core sizes for use as optical interconnects. We have used both hot embossing and micro-contact printing techniques for the fabrication of multimode waveguides using the same materials. Rectangular and large-core (60${\times}$60 $\mu\textrm{m}$$^2$) channels were readily prepared when using these methods. The dimensions of the embossed and printed channels were the same as those of the pattern on the original master. The polymeric waveguides that we fabricated with large core sizes exhibited a low propagation loss of 0.1 dB/cm at 850 nm, which indicates that hot embossing and micro-contact printing are suitable techniques for the fabrication of optical waveguides having large-core.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 제6회 학술대회 논문집 일렉트렛트 및 응용기술연구회
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• pp.35-38
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• 2004

Ozone is useful oxidizing gas for the fabrication of oxide thin films. Accordingly researching on oxidizing gas is required. In order to obtain high quality oxide thin films, higher ozone concentration is necessary. In this paper oxidation property was evaluated relation between oxide gas pressure and inverse temperature(CuO reaction). The obtained condition was formulated by the fabrication of Cu metal thin film by co-deposition using the Ion Beam Sputtering method. Because the CuO phase peak appeared at the XRD evaluation of the CuO thin film using ozone gas, this study has succeeded in the fabrication of the CuO phase at $825^{\circ}C$.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.587-588
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• 2005

Ozone is useful oxidizing gas for the fabrication of BSCCO thin films. In order to obtain high quality oxide BSCCO thin films, higher ozone concentration is necessary. The growth rates of the films was set in the region from 0.17 to 0.27 nm/min. MgO(100) was used as a substrate. In this paper oxidation property was evaluated relation between oxide gas pressure and inverse temperature(CuO reaction). The obtained condition was formulated by the fabrication of Cu metal thin film by co-deposition using the Ion Beam Sputtering method. Because the CuO phase peak appeared at the XRD evaluation of the CuO thin film using ozone gas, this study has succeeded in the fabrication of the CuO phase at $825^{\circ}C$.

• 한국광학회지
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• 제33권6호
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• pp.267-274
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• 2022

쉴리렌 이미징을 위한 랜덤 도트 배열 투영용 이진 회절광학소자를 설계하고 제작하였다. 이 연구에서 적용된 회절광학소자는 단 두 단계의 위상 및 10 ㎛의 피치를 갖는 이진 위상 회절 격자로, 제작 단가 및 제작 공정의 용이성을 위하여 선택되었다. 회절광학소자의 설계는 최종 패턴의 밝기 정보를 목적 함수로 사용하는 iterative Fourier transform algorithm을 적용하였다. 먼저 균일 밝기의 랜덤 도트 이미지를 생성하였고, 이를 최종 목표 이미지(패턴)로 적용한 결과, 위치(시야)에 따른 랜덤 도트의 밝기 변화를 확인하였다. 이를 해결하기 위하여 최종 목표 패턴에 가우시안 가중치를 적용한 개선 설계를 적용하였고, 그 결과 패턴 밝기 균일도를 52.7%에서 90.8%까지 향상시켰다. 이후, 바이너리 회절 소자 및 이를 적용한 빔 투사기를 제작하여 설계 결과를 검증하였다. 검증 결과 투사 거리 5 m에서 설계 목표인 430 mm × 430 mm 투광면적, 10,000개 이상의 랜덤 도트 패턴의 생성을 확인하였다. 측정된 균일도는 시뮬레이션에서 예상되었던 균일도보다 다소 적은 84.5%이나, 이는 회절 격자 형상, 특히 모서리 뭉개짐 및 간격 오류에 의한 것으로 추정된다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 춘계학술대회 논문집 전자세라믹스 센서 및 박막재료 반도체재료 일렉트렛트 및 응용기술
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• pp.35-38
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• 2000

In this study, the rise throughput and the stability in fabrication of device can be obtained by applying of CMP process to STI structure in 0.l8um semiconductor device. Through reverse moat pattern process, reduced moat density at high moat density, STI CMP process with low selectivity could be to fit polish uniformity between low moat density and high moat density. Because this reason, in-situ motor current end point detection method is not fit to the current EPD technology with the reverse moat pattern. But we use HSS without reverse moat pattern on STI CMP and take end point current sensing signal.[1] To analyze sensing signal and test extracted signal, we can to adjust wafer difference within $110{\AA}$.

• 전기학회논문지
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• 제64권2호
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• pp.310-314
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• 2015

To improve the optical performance of the backlight unit with light guide plate(LGP), we investigated the effects of LGP patterns on the brightness and viewing angles properties of the backlight unit. We designed several patterns of LGP and calculated their optical properties by the optical simulation. The results reveal that the highest brightness and wide viewing angle was achieved with the extended-closed-polygon diffusion pattern and upper triangle prism pattern of the LGP.