• 한국전기전자재료학회논문지
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• 제18권3호
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• pp.231-236
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• 2005

To investigate the electrical properties at the single grainboundary of ZnO varistors, micro-electrodes were fabricated on the surface which was polished and thermally etched. Our micro-electrode had 2000 $\AA$ silicon nitride layer between micro-electrode and ZnO surface. This layer was deposited by PECVD and etched by RIE after photoresistor pattering process using by mask 1. The metal patterning of micro-electrodes used lift-off method. We found that the breakdown voltage of single grainboundary is about 3.5∼4.2 V at 0.1 mA on I-V curves. Also, capacitance-voltage measurement at single grainboundary gave several parameters( $N_{d}$, $N_{t}$, $\Phi$$_{b}$, t) which were related with grainboundary.ary.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 춘계학술발표대회
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• pp.238.1-238.1
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• 2011

본 연구에서는 non-contact deposition method의 일환인 ESD (electroctatic deposition)의 박막공정을 이용하여 Conductive layer 위에 Gold nanoparticles 및 Silver nanoparticles 등 organic/inorganic nano particle conductive ink system의 단분산 2D 박막을 제조를 연구하였다. ESD head를 통해 여러가지 organic / inorganic nano particle conductive ink system을 Deposition하였으며 분산도가 높고 균일한 단분산의 2차원 박막 구조를 얻을 수 있었으며, 전도성 PEDOT과의 Hybridization을 통해 균일상의 표면 Morphology를 갖는 고 전도성 투명 필름을 제작하였다. ESD technique를 이용하는 박막공정 기술은 나노입자 및 나노구조물의 박막화 패턴화를 포함하는 새로운 Deposition 기술로써 이를 응용하여 금속 나노입자의 2차원의 패턴화된 박막 구현을 통해 유기반도체 및 전자소자에의 응용성을 증거할 수 있었다.

• 한국고분자학회:학술대회논문집
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• 한국고분자학회 2006년도 IUPAC International Symposium on Advanced Polymers for Emerging Technologies
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• pp.189-189
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• 2006

The self-assembly of supramolecular dendrimers allows the rapid construction of nanosized structures with regularly ordered features that depend on the shape of the molecules and the relative strength of the intra-and intermolecular interactions. Here we report on a dramatic improvement in the degree of control and selectivity in the orientation of fan-shaped supramolecular molecules over a large area, which has been achieved by confined geometries and applied fields. The order and orientation of supramolecular dendrimers can be controlled by surface anchoring in confined geometries. POM, SEM, TEM, AFM and XRD results show that the molecules form the complicated defect-ordering in the microchannels with different feature sizes. We show that these defect domains are strongly influenced by the boundary and feature size of the surfaces. This technique can be used to create a grain size in the plane of the film that is much larger than that which can be achieved using previously reported soft-material based pattering.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.1154-1157
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• 2006

Organic thin-film transistors (OTFTs) based on a semiconducting polymer have been fabricated using an organic patterning methodology. Laser assisted lift-off (LALO) technique, ablating selectively the hydrophobic layer by an excimer laser, was used for producing a semiconducting polymer channel in the OTFT with high resolution. The selective wettability of a semiconducting polymer, poly (9-9-dioctylfluorene-co-bithiophene) (F8T2), dissolved in a polar solvent was found to define precisely the pattering resolution of the active channel. It is demonstrated that in the F8T2 TFTs fabricated using the LALO technique and is applicable for the larger area display.

• 한국철도학회:학술대회논문집
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• 한국철도학회 2007년도 춘계학술대회 논문집
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• pp.1227-1232
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• 2007

The objective of this study is to develop qualification analysis preliminary frame for railway personal injury accident. In this research, we develop accident scenarios to analyze systematically and evaluate quantitatively fatality accident scenarios for railway personal. The accident scenario analysis first identifies the hazardous events and explains the hazardous conditions that surround the accident and cause railway accidents. This method includes a feasibility test, a clustering process and a pattering process for a clearer understanding of the accident situation. Since this method enables an accident scenario analysis to be performed systematically as well as objectively, this method is useful in building better accident prevention strategies. Therefore, this study could serve to reduce railway accidents and could be an effective tool for a hazard analysis.

• 한국레이저가공학회지
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• 제12권4호
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• pp.1-5
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• 2009

Conventional patterning based on wet-process for multi-layered film is a relatively complex and costly process though it is a necessary step for fabrication of TFT-LCD module. Recently, a direct pattering by laser has been studied because it is low cost and simple process compared to the wet process. In this work, the selective removal process of multi-layered film (polyimide/indium tin oxide/glass) is studied by modeling the thermal and mechanical behavior for multi-layered structure. Especially, the effects of thickness of polyimide layer are examined.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.459-460
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• 2008

Zinc oxide micro rods were fabricated using as chemical bath deposition ok photolithography. Vertically aligned Zinc Oxide rod array as grown by chemical bath deposition method on Zinc Oxide template layer. The ZnO template layer was deposited on glass and the pattering was made by standard photolithography technique. The selective growth of ZnO micro rods were achieved with the masked ZnO template layer substrate. The fabricated ZnO micro rods were found to be single crystalline and have grown along hexagonal c-axis direction of (0002) which is same as the preferred growth orientation of ZnO template layer. The ZnO micro-rod array structure was implemented as a window layer in Cu(InGa)Se2 solar cell and its effect on photovoltaic efficiency was examined.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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• pp.1393-1398
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• 2009

We once have announced that we developed a horizontal large-area alignment system with an alignment accuracy of < ${\pm}3{\mu}m$ and an alignment time of < 30 seconds, a core process module for RGB direct pattering by using a fine metal mask, which can process a Gen 4 ($730{\times}920mm^2$) substrate for high resolution OLED products. In this article, we presents a brand-new vertical alignment system for a even larger substrate of Gen 5 and beyond which can provide a better alignment accuracy and a higher throughput. The newly developed system exhibits an alignment accuracy of < ${\pm}2{\mu}m$ and an alignment time of < 20 seconds which, we believe, can open a new era for manufacturing large-size OLED monitors and TVs.

• E2M - 전기 전자와 첨단 소재
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• 제8권5호
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• pp.648-657
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• 1995

정보처리의 다양화, 고속화를 위하여 장래의 집적회로는 다량의 정보를 단시간에 처리하지 않으면 안된다. 종래, 3년에 4배의 고집적화가 실현되어 LSI개발에 기술 견인차의 역할을 하고 있는 DRAM(Dynamic Random Access Memory)은 미세화기술의 한계를 우려하면서도 오히려 개발에 박차를 가하고 있다. 이러한 DRAM의 미세, 대용량화에는 미세가공 기술, 새로운 메모리 셀과 트랜지스터 기술, 새로운 회로 기술, 그 이외에 재료박막기술, Computer aided design/Design automation(CAD/DA) 기술, 검사평가기술 혹은 소형팩키지(package)기술등의 광범위한 기술발전이 뒷받침되어 왔다. 그 중에서 미세가공 기술 및 새로운 트랜지스터 기술과 메모리 셀 기술을 중심으로 개발 동향을 살펴보고 최근에 발표된 1Gbit DRAM의 시제품 기술에 대하여 분석해 보기로 한다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1999년도 추계학술대회 논문집
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• pp.173-176
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• 1999

Continuing improvement of microprocessor performance involves in the devece size. This allow greater device speed, an increase in device packing density, and an increase in the number of functions that can reside on a single chip. However this has led to propagation delay, crosstalk noise, and power dissipation due to resistance-capacitance(RC) coupling become significant due to increased wiring capacitance, especially interline capacitance between the metal lines on the same metal level. Becase of pattering MSSQ (Methylsilsequioxane), we use RIE(Reactive ton Etching) which is a good anisotrgpy. In this study, according as we control a flow rate of CF$_4$/O$_2$ gas, RF power, we analysis by using ${\alpha}$ -step, SEM and AFM,