• 제목/요약/키워드: Passivation thickness

검색결과 109건 처리시간 0.026초

후면전극형 태양전지의 고효율화를 위한 최적화 연구 (Optimization for High Efficiency of Point Contact Solar Cell)

  • 안병섭;강이구
    • 한국전기전자재료학회논문지
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    • 제24권5호
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    • pp.345-350
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    • 2011
  • This paper was carried about optimization for high efficiency of point contact solar cell. We have studied on the characteristics of power converter according to each parameter for the optimization for high efficiency of point contact solar cell on this study. We have 25.1352% of convert efficiency after adapt optimal parameters as mentioned in point body and superior conclusion is drawn by comparison with general efficiency has within 20%. At this time, the value of parameter is 100 um cell pitch, 0.01 um AR coating, 0.9 um N+ FSF thickness., etc. This study will continue to go on for optimization for efficiency in future, as it looks now, the results of this study would contribute to the business of high efficiency of point contact solar cell.

소성공정에 의한 유리막과 Glass/Silicon 계면특성 (Glass Film and Glass/Silicon Interface Properties by Firing Profiles)

  • 윤세욱;허창수
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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    • pp.729-731
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    • 1998
  • Surface passivation using glass powders results in good reliability for high voltage silicon power devices. In this paper, Zinc borosilicate glass was prepared for the purpose of passivating, and a deposition technique of glass films on the silicon surface by electrophoresis in which acetone is used as a suspension medium and a measurement technique of C-V curve has been investigated. Properties were compared using SEM, XRD, C-V Curve as a function of firing condition, temperature and atmosphere were investigated. Under 100V applied, 1 minute, $700^{\circ}C$ firing temperature, and $O_2$ atmosphere, I can get the fine films $5.8{\mu}m$ thickness with Zinc borosilicate glass. As a result of investigation of glass films, it has been found that pre-firing and annealing play an important role to achieve uniform, fine, reliable glass deposition films and Glass/Silicon interlace.

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RTMOCVD법에 의해 제조된 Ta2O5 박막의 특성 (Characteristics of Ta2O5 thin film prepared by RTMOCVD)

  • 소명기
    • 산업기술연구
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    • 제19권
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    • pp.101-105
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    • 1999
  • Ultra thin $Ta_2O_5$ gate dielectrics were prepared by RTMOCVD (rapid thermal metal organic chemical vapor deposition) using Ta source $TaC_{12}H_{30}O_5N$ and $O_2$ gaseous mixtures. As a result, $Ta_2O_5$ thin films showed significantly low leakage current compared to $SiO_2$ of identical thickness, which was due to the stabilization of the interfacial layer by NO ($SiO_xN_y$) passivation layer. The conduction of leakage current in $Ta_2O_5$ thin films was described by the hopping mechanism of Poole-Frenkel (PF) type.

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1000V 급 바이폴라 접합 트랜지스터에 대한 고내압화의 설계 및 제작 (Design and fabrication for high breakdown voltage on 1000V bipolar junction transistor)

  • 허창수;추은상;박종문;김상철
    • 대한전기학회논문지
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    • 제44권4호
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    • pp.490-495
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    • 1995
  • A bipolar junction transistor which exihibits 1000V breakdown voltage is designed and fabricated using FLR (Field Limiting Rings). Three dimensional effects on the breakdown voltage is investigated in the cylindrical coordinate and the simulation results are compared with the results in the rectangular coordinate. Breakdown voltage of the device with 3 FLR is simulated to be 1420V in the cylindrical coordinate while it is 1580V in rectangular coordinate. Bipolar junction transistor has been fabricated using the epitaxial wafer of which resistivity is 86 .OMEGA.cm and thickness is 105 .mu.m. Si$_{3}$N$_{4}$ and glass are employed for the passivation. Breakdown of the fabricated device is measured to be 1442V which shows better greement with the simulation results in cylindrical coordination.

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전기화학적 식각정지에 의한 SDB SOI의 박막화에 관한 연구 (A Study on thinning of SDB SOI by electrochemical etch-stop)

  • 김일명;이승준;강경두;정수태;주병권;정귀상
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 추계학술대회 논문집
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    • pp.362-365
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    • 1999
  • This paper describes on thinning SDB SOI substrates by SDB technology and electrochemical etch-stop. The surface of the fabricated SDB SOI substrates is more uniform than that grinding or polishing by mechanical method, and this process is possible to accurate SOI thickness control. During Electrochemical etch-stop, leakage current versus voltage curves were measured for analysis of the open current potential (OCP) point and the passivation potential (PP) poin and determinated to anodic substrates were analyzed by using AFM and SEM, respectivelv.

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고율 방전용 $Li/SOCl_2$ 전지의 카본 양극 개선에 관한 연구 (Studies on Improved Carbon Cathode Performance in High Rate $Li/SOCl_2$ Cell)

  • 최정자;조성백;박희숙
    • 한국세라믹학회지
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    • 제34권3호
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    • pp.225-232
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    • 1997
  • 고율 방전용 Li/SOCl2전지의 성능은 카본 양극에 의해 크게 영향을 받는다. 전지가 방전되는 동안 SOCl2의 환원은 다공성 카본 양극에서 일어나고 기공내에 방전반응 생성물-주로 LiCl-이 석출된다. 이러한 현상으로 양극 표면이 부동화되어 전지의 성능이 제한된다. 양극이 성능을 향상시키기 위해 양극이 표면밀도와 두께를 각각 변화시켜 양극 반쪽셀 정전류 방전실험(50mA/$\textrm{cm}^2$)을 행하였다. 실험 결과 0.04g/$\textrm{cm}^2$, 두께 1.4mm의 양극이 가장 좋은 특성을 보였다. 표면 밀도가 0.04 g/$\textrm{cm}^2$로 일정하고 두께가 0.8mm, 1.4mm의 양극에서 분극현상은 두께가 두꺼운 1.4mm양극에서 감소하였으며 방전경과시간과 방전용량(Ah/$\textrm{cm}^2$)이 증가하였다. 두 양극에 대한 기공률 측정 결과 두께 1.4mm양극이 두께 0.8mm양극보다 전체 기공부피가 크고 전지성능과 연관되는 mesopore(0.05 $\mu$m~0.5$\mu$m)와 macropore(>0.5$\mu$m)부피가 더 증가하였다. 방전 후 카본 양극의 표면분석 결과 등방결정과 판상구조 집합체 형태의 LiCl과 소량의 S를 확인하였다.

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Effects of Al2O3 Coating on BiVO4 and Mo-doped BiVO4 Film for Solar Water Oxidation

  • Arunachalam, Maheswari;Yun, Gun;Lee, Hyo Seok;Ahn, Kwang-Soon;Heo, Jaeyeong;Kang, Soon Hyung
    • Journal of Electrochemical Science and Technology
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    • 제10권4호
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    • pp.424-432
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    • 2019
  • Planar BiVO4 and 3 wt% Mo-doped BiVO4 (abbreviated as Mo:BiVO4) film were prepared by the facile spin-coating method on fluorine doped SnO2(FTO) substrate in the same precursor solution including the Mo precursor in Mo:BiVO4 film. After annealing at a high temperature of 450℃ for 30 min to improve crystallinity, the films exhibited the monoclinic crystalline phase and nanoporous architecture. Both films showed no remarkably discrepancy in crystalline or morphological properties. To investigate the effect of surface passivation exploring the Al2O3 layer, the ultra-thin Al2O3 layer with a thickness of approximately 2 nm was deposited on BiVO4 film using the atomic layer deposition (ALD) method. No distinct morphological modification was observed for all prepared BiVO4 and Mo:BiVO4 films. Only slightly reduced nanopores were observed. Although both samples showed some reduction of light absorption in the visible wavelength after coating of Al2O3 layer, the Al2O3 coated BiVO4 (Al2O3/BiVO4) film exhibited enhanced photoelectrochemical performance in 0.5 M Na2SO4 solution (pH 6.5), having higher photocurrent density (0.91 mA/㎠ at 1.23 V vs. reversible hydrogen electrode (RHE), briefly abbreviated as VRHE) than BiVO4 film (0.12 mA/㎠ at 1.23 VRHE). Moreover, Al2O3 coating on the Mo:BiVO4 film exhibited more enhanced photocurrent density (1.5 mA/㎠ at 1.23 VRHE) than the Mo:BiVO4 film (0.86 mA/㎠ at 1.23 VRHE). To examine the reasons, capacitance measurement and Mott-Schottky analysis were conducted, revealing that the significant degradation of capacitance value was observed in both BiVO4 film and Al2O3/Mo:BiVO4 film, probably due to degraded capacitance by surface passivation. Furthermore, the flat-band potential (VFB) was negatively shifted to about 200 mV while the electronic conductivities were enhanced by Al2O3 coating in both samples, contributing to the advancement of PEC performance by ultra-thin Al2O3 layer.

이종접합 태양전지에서의 Bi-Layer 구조를 통한 향상된 개방전압특성에 대한 고찰 (A Study on Improved Open-Circuit Voltage Characteristics Through Bi-Layer Structure in Heterojunction Solar Cells)

  • 김홍래;정성진;조재웅;김성헌;한승용;수레쉬 쿠마르 듄겔;이준신
    • 한국전기전자재료학회논문지
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    • 제35권6호
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    • pp.603-609
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    • 2022
  • Passivation quality is mainly governed by epitaxial growth of crystalline silicon wafer surface. Void-rich intrinsic a-Si:H interfacial layer could offer higher resistivity of the c-Si surface and hence a better device efficiency as well. To reduce the resistivity of the contact area, a modification of void-rich intrinsic layer of a-Si:H towards more ordered state with a higher density is adopted by adapting its thickness and reducing its series resistance significantly, but it slightly decreases passivation quality. Higher resistance is not dominated by asymmetric effects like different band offsets for electrons or holes. In this study, multilayer of intrinsic a-Si:H layers were used. The first one with a void-rich was a-Si:H(I1) and the next one a-SiOx:H(I2) were used, where a-SiOx:H(I2) had relatively larger band gap of ~2.07 eV than that of a-Si:H (I1). Using a-SiOx:H as I2 layer was expected to increase transparency, which could lead to an easy carrier transport. Also, higher implied voltage than the conventional structure was expected. This means that the a-SiOx:H could be a promising material for a high-quality passivation of c-Si. In addition, the i-a-SiOx:H microstructure can help the carrier transportation through tunneling and thermal emission.

$SiN_x$유전 보호막이 이동통신용 고주파 SAW필터의 특성에 미치는 영향 (The Effects of $SiN_x$ Dielectric Thin Films on SAW Properties of the High Frequency SAW Filter for Cellular Communication System)

  • 이용의;이재빈;김형준;김영진;양형국;박종철
    • 한국재료학회지
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    • 제5권6호
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    • pp.650-656
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    • 1995
  • 이동통신용 고주파 표면탄성파(SAW) 필터를 36$^{\circ}$Y-X LiTaO$_3$압전기판과 IIDT 전극구조를 이용하여 제작하였다. 제작한 SAW 필터의 중심주파수는 주파수 응답 특성 측정 결과 설계한 중심주파수보다 낮아짐이 관찰되었다. 이러한 단점을 보완하고 미세한 주파수의 조절을 가능하게 하기 위해 SiN$_{x}$ 유전박막을 보호막으로 증착하여 이에 따른 주파수 특성 변화를 관찰하였다. SAW파장에 대한 SiN$_{x}$ 유전 박막의 두께비를 증가시킬수록 SAW 진행 속도가 증가하여, 제조한 필터의 중심주파수를 높게 이동시킬 수 있었다. 그러나 유전박막의 두께가 증가할수록 필터의 삽입손실이 증가하는 문제점이 존재하였다.

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결정질 실리콘 태양전지를 위한 이층 반사방지막 구조 (Double Layer Anti-reflection Coating for Crystalline Si Solar Cell)

  • 박제준;정명상;김진국;이희덕;강민구;송희은
    • 한국전기전자재료학회논문지
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    • 제26권1호
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    • pp.73-79
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    • 2013
  • Crystalline silicon solar cells with $SiN_x/SiN_x$ and $SiN_x/SiO_x$ double layer anti-reflection coatings(ARC) were studied in this paper. Optimizing passivation effect and optical properties of $SiN_x$ and $SiO_x$ layer deposited by PECVD was performed prior to double layer application. When the refractive index (n) of silicon nitride was varied in range of 1.9~2.3, silicon wafer deposited with silicon nitride layer of 80 nm thickness and n= 2.2 showed the effective lifetime of $1,370{\mu}m$. Silicon nitride with n= 1.9 had the smallest extinction coefficient among these conditions. Silicon oxide layer with 110 nm thickness and n= 1.46 showed the extinction coefficient spectrum near to zero in the 300~1,100 nm region, similar to silicon nitride with n= 1.9. Thus silicon nitride with n= 1.9 and silicon oxide with n= 1.46 would be proper as the upper ARC layer with low extinction coefficient, and silicon nitride with n=2.2 as the lower layer with good passivation effect. As a result, the double layer AR coated silicon wafer showed lower surface reflection and so more light absorption, compared with $SiN_x$ single layer. With the completed solar cell with $SiN_x/SiN_x$ of n= 2.2/1.9 and $SiN_x/SiO_x$ of n= 2.2/1.46, the electrical characteristics was improved as ${\Delta}V_{oc}$= 3.7 mV, ${\Delta}_{sc}=0.11mA/cm^2$ and ${\Delta}V_{oc}$=5.2 mV, ${\Delta}J_{sc}=0.23mA/cm^2$, respectively. It led to the efficiency improvement as 0.1% and 0.23%.