• Proceedings of the Materials Research Society of Korea Conference
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• 2009.11a
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• pp.44.2-44.2
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• 2009

Polycrystalline materials suchas yttria and alumina have been applied as a plasma resisting material for the plasma processing chamber. However, polycrystal line material may easily generate particles and the particles are sources of contamination during the plasma enhanced process. Amorphous material can be suitable to prevent particle generation due to absence of grain-boundaries. We manufactured nitrogen-containing $SiO_2-Al_2O_3-Y_2O_3$ based glasses with various contents of silicon and fixed nitrogen content. The thermal properties, mechanical properties and plasma etching rate were evaluated and compared for the different composition samples. The plasma etching behavior was estimated using XPS with depth profiling. From the result, the plasma etching rate highly depends on the silicon content and it may results from very low volatile temperature of SiF4 generated during plasma etching. The silicon concentration at the plasma etched surface was very low besides the concentration of yttrium and aluminum was relatively high than that of silicon due to high volatile temperature of fluorine compounds which consisted with aluminum and yttrium. Therefore, we conclude that the samples having low silicon content should be considered to obtain low plasma etching rate for the plasma resisting material.

• Nuclear Engineering and Technology
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• v.49 no.3
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• pp.645-650
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• 2017

This technical note demonstrates the feasibility of using laser ablation inductively coupled plasma mass spectrometry for the characterization of U-7Mo/Ale5Si dispersion fuel. Our measurements show 5.0% Relative Standard Deviation (RSD) for the reproducibility of measured $^{98}Mo/^{238}U$ ratios in fuel particles from spot analysis, and 3.4% RSD for $^{98}Mo/^{238}U$ ratios in a NIST-SRM 612 glass standard. Line scanning allows for the distinction of U-7Mo fuel particles from the Al-5Si matrix. Each mass spectrum peak indicates the presence of U-7Mo fuel particles, and the time width of each peak corresponds to the size of that fuel particle. The size of the fuel particles is estimated from the time width of the mass spectrum peak for $^{98}Mo$ by considering the scan rate used during the line scan. This preliminary application clearly demonstrates that laser ablation inductively coupled plasma mass spectrometry can directly identify isotope ratios and sizes of the fuel particles in U-Mo/Al dispersion fuel. Once optimized further, this instrument will be a powerful tool for investigating irradiated dispersion fuels in terms of fission product distributions in fuel matrices, and the changes in fuel particle size or shape after irradiation.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.5
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• pp.150-156
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• 2009

The removal of tiny particles adhered to surfaces is one of the crucial prerequisite for a further increase in IC fabrication, large area displays and for the process in nanotechnology. Various cleaning techniques (wet chemical cleaning, scrubbing, pressurized jets and ultrasonic processes) currently used to clean critical surfaces are limited to removal of micrometer-sized particles. Therefore the removal of sub-micron sized particles from silicon wafers is of great interest. For this purpose various cleaning methods are currently under investigation. In this paper, we report on experiments on the cleaning effect of 100nm sized fluorescence particles on silicon wafer using the plasma shockwave occurred by femtosecond laser. The plasma shockwave is main effect of femtosecond laser cleaning to remove particles. The removal efficiency was dependent on the gap distance between laser focus and surface but in some case surface was damaged by excessive laser intensity. These experiments demonstrate the feasibility of femtosecond laser cleaning using 100nm size fluorescence particles on wafer.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.1
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• pp.151-155
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• 2007

A compact discharge plasma system with a photocatalyst has been proposed and investigated experimentally for application to air conditioners. It was found that there was intense ultra violet radiation with high energy of 3.2 eV from the corona discharge due to the DC-biased pulse voltage applied on a wire. An electrophotochemical reaction took place apparently on the surfaces of the photocatalyst of $TiO_2$ irradiated ultra violet front the discharge plasma in the proposed plasma system. The proposed discharge plasma system with the photocatalyst of $TiO_2$ showed very high removal efficiency of VOCs by tile additional electrophotochemical reactions on the photocatalyst. The proposed discharge plasma system also showed very high removal efficiency of particles such as smokes, suspended bacteria, and pollen and mite allergens by the electrostatic precipitation part. This type of corona discharge plasma system with a photocatalyst can be used as an effective means of removing both indoor pollutant gases and particles including suspended allergens.

• Journal of the Korean Vacuum Society
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• v.7 no.3
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• pp.261-266
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• 1998

Since the particles are highly charged in process plasmas, the dynamics of the particles are concerned principally with the effect of the charging amount and polarity. In order to investigate the charging effect of the particles in the plasmas, the known sizes of the mono-dispersed particles with 0.05$\mu\textrm{m}$, 0.07$\mu\textrm{m}$, 0.1$\mu\textrm{m}$and 0.2$\mu\textrm{m}$ diameter are introduced into the DC air-plasmas. The characteristics of the charged particles are measured with a Faraday cup. Results show that the particle charging polarity depends on the concentrations and sizes of the particles and the condition of plasma generation, operating pressure, and power. It is also found that the number of charges per a particle is in the ranges of $10^3$~$ 10^5$.

• Journal of Advanced Marine Engineering and Technology
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• v.40 no.10
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• pp.894-898
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• 2016

Solution plasma is a unique method which provides a direct discharge in solutions. It is one of the promising techniques for various applications including the synthesis of metallic/non-metallic nanomaterials, decomposition of organic compounds, and the removal of microorganism. In the context of nanomaterial syntheses, solution plasma has been utilized to produce carbon nanoparticles and metallic-carbon nanoparticle systems. The main purpose of this study was to synthesize nickel nanoparticles embedded in a matrix of carbon particles by solution plasma in one-step using waste vegetable oil as the carbon source. The experimental setup was done by simply connecting a bipolar pulsed power generator to nickel electrodes, which were submerged in the waste vegetable oil. Black powders of the nickel nanoparticles-embedded carbon (NiNPs/Carbon) particles were successfully obtained after discharging for 90 min. The morphology of the synthesized NiNPs/Carbon was investigated by a scanning electron microscope, which revealed a good dispersion of NiNPs in the carbon-particle matrix. The X-ray diffraction of NiNPs/Carbon clearly showed the co-existence of crystalline Ni nanostructures and amorphous carbon. The crystallite size of NiNPs (through the Ni (111) diffraction plane), as calculated by the Scherrer equation was found to be 64 nm. In addition, the catalytic activity of NiNPs/Carbon was evaluated by cyclic voltammetry in an acid solution. It was found that NiNPs/Carbon did not show a significant catalytic activity in the acid solution. Although this work might not be helpful in enhancing the activity of the fuel cell catalysts, it is expected to find application in other processes such as the CO conversion (by oxidation) and cyclization of organic compounds.

• Korean Journal of Materials Research
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• v.21 no.2
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• pp.106-110
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• 2011

A high thermal conductive AlN composite coating is attractive in thermal management applications. In this study, AlN-YAG composite coatings were manufactured by atmospheric plasma spraying from two different powders: spray-dried and plasma-treated. The mixture of both AlN and YAG was first mechanically alloyed and then spray-dried to obtain an agglomerated powder. The spray-dried powder was primarily spherical in shape and composed of an agglomerate of primary particles. The decomposition of AlN was pronounced at elevated temperatures due to the porous nature of the spray-dried powder, and was completely eliminated in nitrogen environment. A highly spherical, dense AlN-YAG composite powder was synthesized by plasma alloying and spheroidization (PAS) in an inert gas environment. The AlN-YAG coatings consisted of irregular-shaped, crystalline AlN particles embedded in amorphous YAG phase, indicating solid deposition of AlN and liquid deposition of YAG. The PAS-processed powder produced a lower-porosity and higher-hardness AlN-YAG coating due to a greater degree of melting in the plasma jet, compared to that of the spray-dried powder. The amorphization of the YAG matrix was evidence of melting degree of feedstock powder in flight because a fully molten YAG droplet formed an amorphous phase during splat quenching.

• Journal of Industrial Technology
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• v.30 no.A
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• pp.127-132
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• 2010

We analyzed the effects of several process variables on the $SO_2$ removal and particle growth by the dielectric barrier discharge - photocatalysts hybrid process. In this process, $SO_2$ was converted into the ammonium sulfate ($(NH_4)_2SO_4$) particles. The size and crystallinity of ammonium sulfate particles were examined by using TEM and XRD analysis. The dielectric barrier discharge reactor consisted of two zones: the first is for plasma generation and the second is for ammonium sulfate particles formation and growth. The first zone of reactor was filled with glass beads as a dielectric material. To enhance $SO_2$ removal process, the $TiO_2$ photocatalysts were coated on glass beads by dip-coating method. As the voltage applied to the plasma reactor or the pulse frequency of applied voltage increases, the $SO_2$ removal efficiency increases. Also as the initial concentration of $SO_2$ decreases or as the residence time increases, the $SO_2$ removal efficiency increases. $(NH_4)_2SO_4$ particles continue to grow by particle coagulation and surface reaction, moving inside the reactor. Larger particles in site are produced according to the increase of residence time or $SO_2$ concentrations.

• Journal of the Korean Society of Combustion
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• v.8 no.1
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• pp.9-16
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• 2003

Carbon soot emission from combustion processes, especially from diesel engines, is a subject of growing concern since soot is known to seriously affect human health. Efforts have been made to oxidize soot particles utilizing Non-Thermal Plasma(NTP) techniques. When oxygen is carried into a plasma device, electrons generated by the plasma dissociate the oxygen, resulting in the formation of oxygen atoms. These highly activated atoms, called O radicals, are known as strong oxidizing agent. This paper presents concentration variations of CO and $CO_2$ at the exit of the plasma device, resulting from the soot oxidation by O radicals, with variations of inlet oxygen concentration, gas temperature, and gas flow rate. Based on the data, Arrehenious rate constants of reactions between C(s)+O and C(s)+O+O were proposed.

• Journal of Powder Materials
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• v.14 no.2 s.61
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• pp.140-144
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• 2007

Using Spark Plasma Sintering process (SPS), consolidation behavior of gas atomized $Mg_{97}Zn_1Y_2$ alloys were investigated via examining the microstructure and evaluating the mechanical properties. In the atomized ahoy powders, fine $Mg_{12}YZn$ particles were homogeneously distributed in the ${\alpha}-Mg$ matrix. The phase distribution was maintained even after SPS at 723 K, although $Mg_{24}Y_5$ particles were newly precipitated by consolidating at 748 K. The density of the consolidated bulk Mg-Zn-Y alloy was $1.86g/cm^3$. The ultimate tensile strength (UTS) and elongation were varied with the consolidation temperature.