• Particle and aerosol research
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• v.5 no.3
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• pp.123-131
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• 2009

This paper presents simulation results of particle transport in low-pressure, low-temperature plasma environment. The size dependent transport of particles in the plasma is investigated with a two-dimensional simulation tool developed in-house for plasma chamber analysis and design. The plasma model consists of the first two and three moments of the Boltzmann equation for ion and electron fluids respectively, coupled to Poisson's equation for the self-consistent electric field. The particle transport model takes into account all important factors, such as gravitational, electrostatic, ion drag, neutral drag and Brownian forces, affecting the motion of particles in the plasma environment. The particle transport model coupled with both neutral fluid and plasma models is simulated through a Lagrangian approach tracking the individual trajectory of each particle by taking a force balance on the particle. The size dependant trap locations of particles ranging from a few nm to a few ${\mu}m$ are identified in both electropositive and electronegative plasmas. The simulation results show that particles are trapped at locations where the forces acting on them balance. While fine particles tend to be trapped in the bulk, large particles accumulate near bottom sheath boundaries and around material interfaces, such as wafer and electrode edges where a sudden change in electric field occurs. Overall, small particles form a "dome" shape around the center of the plasma reactor and are also trapped in a "ring" near the radial sheath boundaries, while larger particles accumulate only in the "ring". These simulation results are qualitatively in good agreement with experimental observation.

• Journal of Industrial Technology
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• v.26 no.B
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• pp.173-181
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• 2006

We analyzed systematically particle growth in the pulsed $SiH_4$ plasmas by a numerical method and investigated the effects of pulse modulations (pulse frequencies, duty ratios) on the particle growth. We considered effects of particle charging on the particle growth by coagulation during plasma-on. During plasma-on ($t_{on}$), the particle size distribution in plasma reactor becomes bimodal (small sized and large sized particles groups). During plasma-off ($t_{off}$), there is a single mode of large sized particles which is widely dispersed in the particle size distribution. During plasma on, the large sized particles grows more quickly by fast coagulation between small and large sized particles than during plasma-off. As the pulse frequency decreases, or as the duty ratio increases, $t_{on}$ increases and the large sized particles grow faster. On the basis of these results, the pulsed plasma process can be a good method to suppress efficiently the generation and growth of particles in $SiH_4$ PCVD process. This systematical analysis can be applied to design a pulsed plasma process for the preparation of high quality thin films.

• Journal of the Korean Ceramic Society
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• v.53 no.1
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• pp.93-98
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• 2016

Cold plasma and heat treatment were selected as technologies to reduce unburned carbon in fly ash to less than 1.0%. Both cold plasma and heat treatment made it possible to eliminate unburned carbon to less than 1.0%. In the case of fly ash, which almost entirely eliminated unburned carbon with an ignition loss of 0.5%, heat treatment caused adhesion among particles and the BET specific surface area rapidly decreased as the mean particle size increased. On the other hand, with cold plasma, unburned carbon elimination caused the BET specific surface area to decrease and, as no adhesion occurred among particles, the mean particle size became small. Also, cold plasma treatment allowed small spherical particles confined within the unburned carbon particles to be released with the elimination of the unburned carbon frame, so that the quantity of fine particles had a tendency to slightly increase.

• Journal of the Semiconductor & Display Technology
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• v.2 no.4
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• pp.9-12
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• 2003

This paper describes a newly developed simulation environment for analysis and design of a plasma processing chamber based on first principles including complicated physical and chemical interactions of plasma, fluid dynamics of neutrals, and transport phenomena of particles. Capabilities of our simulator, named VIP-SEPCAD (Virtual Integrated Prototyping Simulation Environment for Plasma Chamber Analysis and Design), are demonstrated through a two dimensional simulation of an oxygen plasma chamber. VIP-SEPCAD can provide plasma properties such as spatiotemporal profiles of plasma density and potential, electron temperature, ion flux and energy, etc. By coupling neutral and particle transport models with a three moment plasma model, VIP-SEPCAD can also predict spatiotemporal profiles of chemically reactive species and particles exist in plasma.

• Journal of the Korean Society of Industry Convergence
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• v.7 no.1
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• pp.115-120
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• 2004

An indoor air cleaner consisting of a dielectric barrier discharge system and an electrostatic precipitator (ESP) was experimentally investigated. The function of the dielectric barrier discharge is to precharge particles by producing nonthermal plasma before indoor air enters ESP, leading to an enhancement in dust collection efficiency. The dependence of particle size distribution on the plasma discharge was examined to understand the mechanism of the particle precharging. The plasma discharge was found to increase the electrical force of the particles, rather than agglomerate them. Coarse particles in the range of 0.5 to $5.0{\mu}m$ were observed to be easily collected by this indoor air cleaner, and the present study laid emphasis on the removal of fine particles of $0.3{\mu}m$. The collection efficiency of the fine particles was largely enhanced by the plasma discharge.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.18 no.1
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• pp.52-59
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• 2004

Recently, many researches for fine particles plasma have been focused on the fabrication of the new devices and materials in micro-electronic industry, although reduction or elimination of fine particles was interested in plasma processing until now on. In order to enhance their utilization, it is necessary to control and analyze fine particle behavior. Therefore, we developed simulation model of fine particles in RF Ar plasmas. This model consists of the calculation parts of plasma structure using a two-dimensional fluid model and of fine particle behavior. The motion of fine particles was derived from the charge amount on the fine particles and forces applied to them. In this paper, Ar plasma properties using two-dimensional fluid model without fine particles were calculated at power source voltage 15[V] and pressure 0.5[Torr]. Time-averaged spatial distributions of Ar plasma were shown. The process on the formation of Coulomb crystal of fine particles was investigated and it was explained by combination of ion drag and electrostatic forces. And also analysis on the forces of fine particles was presented.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.65 no.3
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• pp.216-218
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• 2016

In this study, we used not chemical and physical synthesis method but the solution plasma sputtering method in the synthesis of silver nano-particles. Synthesis of all the silver nano-particles was conducted for 1hour in 360 ml of distilled water and characteristics of changing the input voltage and frequency of the synthesised silver nano-particles by using the solution plasma sputtering method were analyzed through FE-SEM(Field Emission-Scanning Electron Microscope). We changed the input voltage from 8 kV to 10 kV in steps of 1 kV, input frequency from 20 kHz to 30 kHz in steps of 5 kHz in the solution plasma reactor with the advanced device which can control the DC voltage and frequency. We confirmed that the size of silver nano-particles were larger according to the change of the input voltage and frequency.

• Journal of the Korean Vacuum Society
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• v.9 no.2
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• pp.172-178
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• 2000

We developed the model equations to investigate the particle movement and growth theoretically in a-Si plasma CVD reactor, where those particles act as the source of contamination. We included the effects of fluid convection, particle diffusion and external forces (ion drag force, electrostatic force and gravitational force) onto the particles to analyze the movements of particles in plasma reactor. Taking into account the particle charge distribution, the particle growth by coagulation between the charged particles was investigated. Most of those particles are located in the region near the sheath boundaries by the balance between the ion drag and electrostatic forces. The particle concentrations in the sheath region and in the bulk plasma region are almost zero. The sizes of the predator particles increase with time by the coagulation with protoparticles and, as a result, the surface area and the average charge of predator particles also increase with time.

• Journal of Sensor Science and Technology
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• v.15 no.4
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• pp.284-290
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• 2006

This study uses neon, xenon, and helium gas mixture microdischarge to determine the effects of priming particles on the neon emission characteristics in an alternate current plasma display panel (AC PDP). The infrared (823 nm) and neon emission (585 nm) intensities are measured and compared in the blue cells in the case of new discharge with priming particles or conventional discharge without priming particles, respectively. It is found that the priming particles can produce a plasma discharge effectively even under the weak electric field condition, thereby resulting in reducing the neon emission intensity remarkably without sacrificing the IR emission intensity. As a result, it is found that the Ne emission intensity is reduced by about 46.4 % but the blue visible emission intensity is increased by about 15.2 % when compared with the conventional discharge without priming particles.

• Nuclear Engineering and Technology
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• v.51 no.7
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• pp.1860-1865
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• 2019

The confinement degradation of the energetic particles during RMP would be a key issue in success of realizing the successful energy production using fusion plasma, because a 3.5 MeV energetic alpha particle should be able to sustain the burning plasma after the ignition. As KSTAR recent results indicate the generation of high-performance plasma(${\beta}_p{\sim}3$), the confinement of the energetic particles is also an important key aspect in neutral beam driven plasma. In general, the measured absolute value of the neutron intensity is generally used for to estimating the confinement time of energetic particles by comparing it with the theoretical value based on transport calculations. However, the availability of, but for its calculation process, many accurate diagnostic data of plasma parameters such as thermal and incident fast ion density, are essential to the calculation process. In this paper, the time evolution of the neutron signal from an He3 counter during the beam blank has permitted to facilitate the estimation of the slowing down time of energetic particles and the method is applied to investigate the fast ion effect on ELM suppressed KSTAR plasma which is heated by high energy deuterium neutral beams.