Particle and aerosol research (한국입자에어로졸학회지)
- Volume 5 Issue 3
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- Pages.123-131
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- 2009
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- 1738-8716(pISSN)
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- 2287-8130(eISSN)
Numerical analysis of particle transport in low-pressure, low-temperature plasma environment
- Kim, Heon Chang (Department of Chemical Engineering, Hoseo University)
- Received : 2009.10.07
- Accepted : 2009.10.10
- Published : 2009.09.30
Abstract
This paper presents simulation results of particle transport in low-pressure, low-temperature plasma environment. The size dependent transport of particles in the plasma is investigated with a two-dimensional simulation tool developed in-house for plasma chamber analysis and design. The plasma model consists of the first two and three moments of the Boltzmann equation for ion and electron fluids respectively, coupled to Poisson's equation for the self-consistent electric field. The particle transport model takes into account all important factors, such as gravitational, electrostatic, ion drag, neutral drag and Brownian forces, affecting the motion of particles in the plasma environment. The particle transport model coupled with both neutral fluid and plasma models is simulated through a Lagrangian approach tracking the individual trajectory of each particle by taking a force balance on the particle. The size dependant trap locations of particles ranging from a few nm to a few
Keywords
- Particle transport;
- Non-thermal plasma;
- Three-moment model;
- Electropositive plasma;
- Electronegative plasma