• Title/Summary/Keyword: Particle deposition

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Particle Deposition, PD Process - New Potential in Material Processing -

  • Fukumoto, Masahiro
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09a
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    • pp.47-48
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    • 2006
  • Oridinal thermal spray process has developed into two ways, namely, temperature dominated represented by plasma spraying, and velocity dominated represented by HVOF. It is common for both that the particle materials sprayed are basically in melted or half melted condition. New process has developed recently, that is, Cold Spray and Aerosol Deposition. Particle's heating is limited in CS lower than half of the material's melting point. Moreover, exactly no heating is loaded in AD process. Through the investigation on common feature for these three spraying processes, potential of new material process - Particle Deposition, PD - is considered and proposed.

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Real-time Contaminant Particle Monitoring for Chemical Vapor Deposition of Borophosphosilicate and Phosphosilicate Glass Film by using In-situ Particle Monitor and Particle Beam Mass Spectrometer (ISPM 및 PBMS를 이용한 BPSG 및 PSG CVD 공정 중 발생하는 오염입자의 실시간 측정)

  • Na, Jeong Gil;Choi, Jae Boong;Moon, Ji Hoon;Lim, Sung Kyu;Park, Sang Hyun;Yi, Hun Jung;Chae, Seung Ki;Yun, Ju Young;Kang, Sang Woo;Kim, Tae Sung
    • Particle and aerosol research
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    • v.6 no.3
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    • pp.139-145
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    • 2010
  • In this study, we investigated the particle formation during the deposition of borophosphosilicate glass (BPSG) and phosphosilicate glass (PSG) films in thermal chemical vapor deposition reactor using in-situ particle monitor (ISPM) and particle beam mass spectrometer (PBMS) which installed in the reactor exhaust line. The particle current and number count are monitored at set-up, stabilize, deposition, purge and pumping process step in real-time. The particle number distribution at stabilize step was measured using PBMS and compared with SEM image data. The PBMS and SEM analysis data shows the 110 nm and 80 nm of mode diameter for BPSG and PSG process, respectively.

Simulation of fluid flow and particle transport around two circular cylinders in tandem at low Reynolds numbers (낮은 레이놀즈 수에서 두 개의 원형 실린더 주위 유동 및 입자 거동 해석)

  • Khalifa, Diaelhag Aisa Hamid;Jeong, S.;Kim, D.
    • Particle and aerosol research
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    • v.17 no.4
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    • pp.81-89
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    • 2021
  • Understanding particle-laden flow around cylindrical bodies is essential for the better design of various applications such as filters. In this study, laminar flows around two tandem cylinders and the motions of particles in the flow are numerically investigated at low Reynolds numbers. We aim to reveal the effects of the spacing between cylinders, Reynolds number and particle Stokes number on the characteristics of particle trajectories. When the cylinders are placed close, the unsteady flow inside the inter-cylinder gap at Re = 100 shows a considerable modification. However, the steady recirculation flow in the wake at Re = 10 and 40 shows an insignificant change. The change in the flow structure leads to the variation of particle dispersion pattern, particularly of small Stokes number particles. However, the dispersion of particles with a large Stokes number is hardly affected by the flow structure. As a result, few particles are observed in the cylinder gap regardless of the cylinder spacing and the Reynolds number. The deposition efficiency of the upstream cylinder shows no difference from that of a single cylinder, increasing as the Stokes number increases. However, the deposition on the downstream cylinder is found only at Re = 100 with large spacing. At this time, the deposition efficiency is generally small compared to that of an upstream cylinder, and the deposition location is also changed with no deposited particles near the stagnation point.

Measurement of Atmospheric Dry Deposition and Size Distribution of Particulate PCBs in 1999 at Seoul

  • Park, Seong-Suk;Shin, Hye-Joung;Yi, Seung-Muk;Kim, Yong-Pyo
    • Journal of Korean Society for Atmospheric Environment
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    • v.22 no.E1
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    • pp.35-43
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    • 2006
  • Ambient particle size distributions of PCBs and their dry deposition fluxes were measured at a site in Seoul to quantify dry deposition fluxes of PCBs and size characteristics of PCBs in the air, and to estimate ambient concentrations of gaseous PCBs and dry deposition fluxes. The dry deposition plate was used to measure dry deposition fluxes of particulate mass and PCBs and a cascade impactor and rotary impactor were used to measure ambient particle size distributions for small ($D_p<9{\mu}m$) and large ($D_p>9{\mu}m$) particles, respectively. Six sample sets were collected from April to July 1999. The fluxes of particulate total PCBs (the sum of 43 congeners) ranged from 160 to $607ng\;m^{-2}day^{-1}$. The size distribution of total PCBs was bimodal with two peaks in small particle size ($D_p{\sim}0.6\;and\;6{\mu}m$, respectively) and, thus, mass concentration being dominant in small particles. The mean particulate PCBs concentration was $6.9{\mu}g$ PCBs/g. The concentrations of PCB homologues in the gas phase were estimated based on the particle/gas partition coefficient ($K_p$) with the measured values of particulate PCBs in this study and they were comparable to those observed in other previous studies. Dry deposition fluxes were estimated by calculating dry deposition velocities.

The Numerical Simulation of Ultrafine $SiO_2$ Particle Fabrication and Deposition by Using the Tube Furnace Reactor (튜브형 가열로 반응기를 이용한 초미립 $SiO_2$ 입자의 제조 및 증착에 대한 수치모사)

  • 김교선;현봉수
    • Journal of the Korean Ceramic Society
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    • v.32 no.11
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    • pp.1246-1254
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    • 1995
  • A numerical model for fabrication and deposition of ultrafine SiO2 particles were proposed in the simplified horizontal MCVD apparatus using tube furnace reactor. The model equations such as energy and mass balance equations and the 0th, 1st and 2nd moment balance equations of aerosols were considered in the reactor. The phenomena of SiCl4 chemical reaction, SiO2 particle formation and coagulation, diffusion and thermophoresis of SiO2 particles were included in the aerosol dynamic equation. The profiles of gas temperature, SiCl4 concentration and SiO2 particle volume were calculated for standard conditions. The concentrations, sizes and deposition efficiencies of SiO2 particles were calculated, changing the process conditions such as tube furnace setting temperature, total gas flow rate and inlet SiCl4 concentration.

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Effect of Torch Speed and Solid Layer Thickness on Heat Transfer and Particle Deposition During modified Chemical Vapor Deposition Process (수정된 화학증착과정에서 토치이송과 고체층이 열전달과 입자부착에 미치는 영향)

  • 박경순;최만수
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.18 no.5
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    • pp.1301-1309
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    • 1994
  • A study of heat transfer and thermophoretic particle deposition has been carried out for the Modified Chemical Vapor Deposition(MCVD) process. A new concept utilizing two torches is suggested to simulate the heating effects from repeated traversing torches. Calculation results for the wall temperatures and deposition efficiency are in good agreement with experimental data. The effects of variable properties are included and heat flux boundary condition is used to simulate the moving torch heating. A conjugate heat transfer which includes heat conduction through solid layer and heat teansfer in a gas in a tube is analyzed. Of particular interests are the effects of torch speeds and solid layer thicknesses on the deposition efficiency, rate and the tapered entry length.

Measurement of Dry Deposition of Polycyclic Aromatic Hydrocarbons in Jeoniu (전주지역에서 다환방향족 탄화수소의 건식 침적 측정)

  • Kim, Hyoung-Seop;Kim, Jong-Guk;Ghim, Young-Sung
    • Journal of Korean Society for Atmospheric Environment
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    • v.23 no.2
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    • pp.242-249
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    • 2007
  • Deposition fluxes of polycyclic aromatic hydrocarbons (PAHs) were measured at the Chonbuk National University located in Jeonju between June and November 2002. Fluxes of gaseous and particulate PAHs were separately obtained using a water surface sampler (WSS) and a dry deposition plate (DDP). Most of PAHs were deposited in the gaseous form since the low molecular weight PAHs dominates in the atmosphere. The deposition velocity of particulate PAHs was higher than that of gaseous PAHs when the molecular weight was low, but substantially decreased as the fine particle fraction increased with molecular weight. The deposition velocity was generally higher at high wind speeds. However, increase in the deposition velocity in unstable atmospheric conditions was also observed for gaseous PAHs of intermediate molecular weight.

A Study on the Deposition Characteristics of Ultrafine SiO2 Particles by Temperature Control in Deposition Zone (증착 구간에서의 온도 제어에 따른 SiO2 초미립자의 증착 특성 고찰)

  • You, Soo-Jong;Kim, Kyo-Seon
    • Journal of Industrial Technology
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    • v.16
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    • pp.157-168
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    • 1996
  • The deposition characteristics of ultrafine $SiO_2$ particles were investigated in a tube furnace reactor theoretically and experimentally controlling tube wall temperature in deposition zone. The model equations such as mass and energy balance equations and aerosol dynamic equations inside reactor and deposition tube were solved to predict the particle growth and deposition. The particle size and deposition efficiencies of $SiO_2$ particles were calculated, changing the process conditions such as tube furnace setting temperature, total gas flow rate inlet $SiCl_4$ concentration and were compared with the experimental results.

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A Study on the Characteristics of Deposition in Nakdong Estuary (낙동강 하구역의 퇴적특성에 관한 연구)

  • 류승우;김종인;류청로
    • Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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    • 2001.05a
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    • pp.154-159
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    • 2001
  • Nakdong estuary is located at south-eastern coast of the Korea. A lot of sediment from upper river was deposited at this area. It has caused many problems such as changes in topography and tidal current. In this paper, field observation data on tidal currents and sediments were investigated as well as historical topographic changes by dredging and reclamation of the foreshore. Then, the numerical model considered the settling velocity of the suspended solids according to the particle size was applied to examine the characteristic of deposition. The results are as follows : 1. Changes of characteristics of deposition were caused by topographic changes of Nakdong estuary 2. Characteristics of deposition were influenced by river plume and tidal currents. 3. Numerical model which considers settling velocity reappeared distribution of deposition by particle-size. 4. Used model is only resonable for discussion in the quality, so, it is strongly suggested that the new model development is needed including the quatitative deposition processes.

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