• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.118.2-118.2
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• 2016

3D NAND 제조에 있어 high-aspect-ratio etch 공정을 견뎌낼 수 있는 hardmask 소재로서 amorphous carbon layer (ACL) 가 각광받고 있으며 hardmask로서의 특성을 향상시키기 위해 다양한 연구가 진행중에 있다 [1]. 본 연구팀의 기존 연구에서 질소 및 붕소 doping 된 ACL 박막의 etch rate 및 Raman 분석을 통해 박막 특성을 확인한 바 있었으나, 공정 중 arcing이 일어나는 등 의도치 않은 문제로 인해 공정 최적화에 일부 문제가 존재하였다. 본 연구에서는 plasma enhanced chemical vapor deposition (PECVD) 공정을 통해 C6H12 기체 및 doping을 위한 NH3 와 B2H6 두 기체를 이용하여 특성 개선된 ACL을 증착하는 과정에서 발생하는 arcing 및 증착 특성을 규명하고자 진공 내 입자의 수농도를 실시간 측정할 수 있는 particle beam mass spectrometer(PBMS)를 적용, 특정 공정 사건 진단 및 해당 사건에서 발생하는 입자를 분석, 증착된 박막의 Raman spectroscopy 결과와 비교 분석하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.70.2-70.2
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• 2015

현재 반도체 및 디스플레이이 공정 분야는 1 um 이상의 입자에서부터 10 nm이하 크기의 오염입자를 제어해야 한다. 현재 오염원인을 파악하기 위해서 사용하는 방법은 공정 완료 후 대상물(웨이퍼 및 글래스)을 CD-SEM (Critical Dimension Scanning Electron Microscope)와 같은 첨단 분석장비를 사용하여 사후 (Ex-situ) 진행하고 있다. 이러한 방법은 오염원이 이미 공정 대상물을 오염시키고 난 후 그 원인을 분석하는 방법으로 그 원인을 찾기가 어려울 뿐만 아니라, 최근 공정관리가 공정 진행 중(In-situ) 행해져야 하는 추세로 봤을 때 합당한 방법이라 할 수 없다. 이를 해결하기 위해 진공공정 중 레이저를 이용하여 측정하고자 하는 여러 시도들이 있었지만, 여전히 긍정적인 답변을 보여주지 못하고 있다. 본 발표에서 소개하는 PCDS (Particle Characteristic Diagonosis System)은 PBMS (Particle Beam Mass Spectrometer)와 SEM (Scanning Electron Microscope), 그리고 EDS (Energy Dispersive X-ray Spectroscopy)를 통합하여 만든 시스템으로 진공공정 중 (In-situ) 챔버 내부에서 발생하고 있는 입자의 크기 분포, 입자의 형상, 그리고 입자의 성분을 실시간으로 분석할 수 있는 방법을 제공한다. 이러한 방법 (PCDS)에 대한 개념과 원리, 그리고 현재까지 개발된 단계에서 얻어진 결과에 대해 소개할 것이다.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2009년도 하계학술발표대회 논문집
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• pp.853-856
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• 2009

Test models which have geometrical similarities with a real room air conditioner (RAC) have been manufactured including visualization windows so that a laser beam can pass through a cross flow fan. Then, flow distributions of the RAC have been investigated using a visualization technique such as a Particle Image Velocimetry (PIV) to analyze an efficiency and noise of the RAC. Pitot tubes have also been used to measure the flow velocity inside the RAC with various positions to confirm the measurement accuracy of the PIV technique. The measured flow velocities have been analyzed and new designs of the RAC have been proposed to improve the efficiency and to reduce the noise for the RAC in this study.

• Nuclear Engineering and Technology
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• 제37권3호
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• pp.279-286
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• 2005

A prototype of a relativistic proton generation system, based on laser-induced plasma interaction, has been designed and fabricated. The system is composed of three major parts: a fs TW laser; a target chamber, including targets and controls; and a diagnostic system for charged particles and lasers. An Offner-type pulse stretcher for chirped pulse amplification (CPA) and eight pass pre-amplifier are installed. The main amplifier will be integrated with a new pumping laser. The design values of the laser at the first stage are 1 TW in power and 50 fs in pulse duration. We expect to generate protons with their maximum energy of approximately 3 MeV and the flux of at least $10^6$ per pulse using a 10 $\mu$m Al target. A prototype target chamber with eight 8-inch flanges, including target mounts, has been designed and fabricated. For laser diagnostics, an adaptive optics based on the Shack-Hartmann type, beam monitoring, and alignment system are all under development. For a charged particle, CR-39 detectors, a Thomson parabola spectrometer, and Si charged-particle detectors will be used for the density profile and energy spectrum. In this paper, we present the preliminary design for laser-induced proton generation. We also present plans for future work, as well as theoretical simulations.

• 조명전기설비학회논문지
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• 제27권5호
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• pp.89-94
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• 2013

The fire testing performed for smoke detector model approval in Korea tests only one kind of fire smoke. A photoelectric spot-type smoke detector using Mie scattering is affected by the wavelength of light beam and the particle diameter. According to UL (Underwriters Laboratories Inc.) 268 standard, this paper analyze the characteristic of the response for a photoelectric spot-type smoke detector on sale in Korea using various fire smokes. Probability that the response time is included in non-defective range is 100% in paper fire, 90% in wood fire and 75% in flammable liquid fire, 90% in wood fire and 75% in flammable liquid fire. According to the estimation for population mean of the response time choosing a confidence level of 99%, a maximum of 19% for wood fire and that of 38% for flammable liquid fire are defective. As the result of analysis of smoke particle, this paper is found that these results are caused by the smoke particles are wide variations in size or have very black.

• 한국광학회지
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• 제7권3호
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• pp.219-226
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• 1996

빛의 입자 파동 이중성을 수용하는 양자 광학은 때때로 파동성에만 바탕을 둔 고전 광학과 상이한 결과를 보여준다. 본 논문에서는 빛이 빛살 가르개를 통과하면서 그 세기와 위상에 대한 요동이 어떻게 변화하는가를 고찰하고 고전 이론과 양자 이론이 보이는 차이점을 기술하였다. 측정 가능량을 나타내는 세가지 연산자를 통하여 고전 이론과는 달리 양자 이론에서는 빛살 가르개를 통과한 후 빛의 세기와 위상에 대한 불확실도가 증가함을 보이고 이를 진공 요동에 의한 효과로 정량적으로 분석하였다. 한편 진공효과를 배제하는 과정으로서 정규 차례를 따르는 연산자에 대한 기대치는 고전적 파동 이론의 결과와 일치함을 보임으로써 고전적 파동 이론과의 대응성을 추구하였다. 또한 이러한 결과로부터 진공 효과를 포함하는 실제의 측정 위상과 고전 이론에 대응하는 추측 위상의 구분 및 그 관계를 보였다.

• 한국군사과학기술학회지
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• 제12권6호
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• pp.760-767
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• 2009

This thesis focuses on the study of high-power, coupled-cavity traveling-wave tube(CCTWT) for radar applications. The CCTWT employed a reentrant double-slot staggered RF cavity structure. Computational analysis of the X-band, double-slot staggered structures is carried out through the use of HFSS code, which solves Maxwell's equations fully in three-dimensions. The non-linear, large-signal performance of CCTWTs are predicted from numerical simulations using a three-dimensional particle-in-cell code, MAGIC3D. With beam voltage set to 12.7~13kV and beam current at 300mA, the CCTWT produces a saturated radiation power of 350~430W, corresponding to an electronic efficiency of 8.9~11.2% and a gain of 23.7~24.2dB within a frequency range of 7.9~8.4GHz.

• 한국연소학회지
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• 제1권1호
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• pp.75-82
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• 1996

Laser induced incandescence, LII, recently developed technique for measuring soot concentration in flames, can overcome most of limitations of conventional laser extinction measurement. In this study, experiments were performed to investigate the effect of laser intensity, detection wavelength, and also laser beam quality on both LII signal at a particular position and peak-to-centerline LII signal ratio. The results of LII signal with increasing laser intensity shows its near-independence of laser intensity once threshold level of laser intensity has been reached. However, this near-independence depends on laser beam quality and the incident optical setup. The peak-to-centerline LII signal ratio slowly but continuously increases with laser power. This fact is due to the dependence of LII signal on particle mean diameter. LII signal is attenuated during it passes through the flame containing soot particles. The attenuation rate is inversely proportional to detection wavelength. In this study, LII signal at 680 nm band is 10% greater than the signal at 400 nm band.

• 한국의학물리학회:학술대회논문집
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• 한국의학물리학회 2002년도 Proceedings
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• pp.94-96
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• 2002

In order to achieve the radiotherapy more precisely using highly energetic heavy charged particles, it is important to know the distribution of the electron density in a human body, which is highly related to the range of charged particles. We can directly obtain the 2-D distribution of the electron density in a sample from a heavy ion CT image. For this purpose, we have developed a heavy ion CT system using a broad beam. The performance, especially the position resolution, of this system is estimated in this work. All experiments were carried out using the heavy ion beam from the HIMAC. We have obtained the projection data of polyethylene samples with various sizes using He 150 MeV/u, C 290 MeV/u and Ne 400 MeV/u beams. The used targets are the cylinders of 40, 60 and 80 mm in diameter, each of them has a hole of 10 mm in diameter at the center of it. The dependence of the spatial resolution on the target size and the kinds of beams will be discussed.

• 천문학회보
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• 제37권2호
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• pp.118.2-118.2
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• 2012

In particle-in-cell (PIC) simulation studies related to ion-ion two-stream instability, a reduced ion-to-electron mass ratio is often employed to save computation time. But it was not clearly verified how electrons dynamics are coupled with the slower evolution of ion-ion interactions under the external electric field. We have studied the ion beam driven instability using a 1D electrostatic PIC code by comparing different rescaling of parameter with real ion mass from the reference simulation with reduced ion mass. As the external electric field is stronger, the excited unstable mode range was more sensitively affected by the system size with the real mass ratio than the reduced ion mass. The results show that the reduced mass ratio should be used cautiously in PIC code as the electron dynamics can modify the ion instabilities. Additionally we found the formation of electron flat-top distribution in the final saturation stage. Simulation results show that in the early phase electrostatic solitary waves are quasi-periodically formed, but later they are fully dissipated resulting in heated, flat-top distributions. New electron beam components are occasionally formed. These are a consequence of the interaction with solitary wave structures. We parametrically investigate the development of electron phase space distributions for various drift speeds of ion beams and temperature ratios between ions and electrons