• 제목/요약/키워드: Particle beam

검색결과 386건 처리시간 0.022초

현장입도분석기를 이용한 섬진강하구 부유퇴적물의 특성 연구 (In situ Particle Size and Volume Concentration of Suspended Sediment in Seomjin River Estuary, Determined by an Optical Instrument,'LISST-100')

  • 김석윤;이병관
    • 한국수산과학회지
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    • 제37권4호
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    • pp.323-329
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    • 2004
  • In situ particle size and volume concentration of suspended sediment was measured at the mouth of Seomjin River Estuary In February 2001, using an optical instrument, 'LISST-100'. Time variation of in situ particle size and concentration shows: (1) during ebb tide, Seomjin River supplies relatively fine-grained particles with less-fluctuated, compared to during flood tide, and well-behaved concentrations following the tidal cycle; and (2) during flood tide, relatively coarse-grained particles with highly variable in size distribution and concentration flow upstream from Kwangyang Bay. This explains a poor correlation $(r^{2}=0.10)$ between sediment concentration and beam attenuation coefficient during flood and a high degree of correlation $(r^{2}=0.80)$ during ebb tide. Relatively fine grained and well defined, monotonous size distribution may promote the correlation between concentration and beam attenuation coefficient due to optical homogeneity of particles during ebb tide. Abundance of large aggregates with time-varying size and shape distributions may be mainly responsible for variations in optical properties of the sediment during flood tide, and thus may confound the relationship between the two variables. The difference in particle sizes and shapes between flood and ebb tides can also be observed on SEM images.

저압상태에서 공기역학적 렌즈를 이용한 In-Situ Particle Monitor의 성능특성 분석 (Investigation of the Performance Characteristics of an In-Situ Particle Monitor at Low Pressures Using Aerodynamic Lenses)

  • 배귀남
    • 대한기계학회논문집B
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    • 제24권10호
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    • pp.1359-1367
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    • 2000
  • In-situ particle monitors(ISPMs) are widely used for monitoring contaminant particles in vacuum-based semiconductor manufacturing equipment. In the present research, the performance of a Particle Measuring Systems(PMS) Vaculaz-2 ISPM at low pressures has been studied. We generated the uniform sized methylene blue particle beams using three identical aerodynamic lenses in the center of the vacuum line, and measured the detection efficiency of the ISPM. The effects of particle size, particle concentration, mass flow rate, system pressure, and arrangement of aerodynamic lenses on the detection efficiency of the ISPM were examined. Results show that the detection efficiency of the ISPM greatly depends on the mass flow rate, and the particle Stokes number. We also found that the optimum Stokes number ranges from 0.4 to 1.9 for the experimental conditions.

A simple method to detect cracks in beam-like structures

  • Xiang, Jiawei;Matsumoto, Toshiro;Long, Jiangqi;Wang, Yanxue;Jiang, Zhansi
    • Smart Structures and Systems
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    • 제9권4호
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    • pp.335-353
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    • 2012
  • This study suggests a simple two-step method for structural vibration-based health monitoring for beam-like structures which only utilizes mode shape curvature and few natural frequencies of the structures in order to detect and localize cracks. The method is firstly based on the application of wavelet transform to detect crack locations from mode shape curvature. Then particle swarm optimization is applied to evaluate crack depth. As the Rayleigh quotient is introduced to estimate natural frequencies of cracked beams, the relationship of natural frequencies and crack depths can be easily obtained with only a simple formula. The method is demonstrated and validated numerically, using the numerical examples (cantilever beam and simply supported shaft) in the literature, and experimentally for a cantilever beam. Our results show that mode shape curvature and few estimated natural frequencies can be used to detect crack locations and depths precisely even under a certain level of noise. The method can be extended for health monitoring of other more complicated structures.

저압공정 중 발생하는 나노입자 실시간 측정장비에 관한 연구 (Study on the real-time measurement equipment for nanoparticle in low-pressure processes)

  • 나정길;조대근;최재붕;김영진;김태성
    • 한국진공학회지
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    • 제16권6호
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    • pp.468-473
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    • 2007
  • 본 논문에서는 저압환경에서 실시간으로 나노입자를 측정할 수 있는 PBMS(Particle Beam Mass Spectrometer)의 개발에 대해 서술하였다. 개발된 PBMS의 교정을 위해 NaCl입자를 사용하였다. DMA(Differential Mobility Analyzer)를 통해 +1가로 하전된입자를 1 lpm 발생시켜 그 중 0.086 lpm을 PBMS 입구의 오리피스를 통해 분기하여 유입시켰다. DMA와 PBMS의 전류값을 비교하여 전송효율을 측정한 결과 입자의 크기에 따라 약 50$\sim$60%를 나타내었다. 또한 DMA에서 특정한 크기의 입자를 발생시켜 PBMS로 측정하였으며 그 결과는 입자크기별 농도분포와 잘 일치함을 확인할 수 있었다.

Measurement of EUV (Extreme Ultraviolet) and electron temperature in a hypocycloidal pinch device for EUV lithography

  • Lee, Sung-Hee;Hong, Young-June;Choi, Eun-Ha
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.108-108
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    • 2010
  • We have generated Ne-Xe plasma in dense plasma focus device with hypocycloidal pinch for extreme ultraviolet (EUV) lithography and investigated an electron temperature. We have applied an input voltage 4.5 kV to the capacitor bank of 1.53 uF and the diode chamber has been filled with Ne-Xe(30%) gas in accordance with pressure. If we assumed that the focused plasma regions satisfy the local thermodynamic equilibrium (LTE) conditions, the electron temperature of the hypocycloidal pinch plasma focus could be obtained by the optical emission spectroscopy (OES). The electron temperature has been measured by Boltzmann plot. The light intensity is proportion to the Bolzman factor. We have been measured the electron temperature by observation of relative Ne-Xe intensity. The EUV emission signal whose wavelength is about 6~16 nm has been detected by using a photo-detector (AXUV-100 Zr/C, IRD) and the line intensity has been detected by using a HR4000CG Composite-grating Spectrometer.

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Failure simulation of ice beam using a fully Lagrangian particle method

  • Ren, Di;Park, Jong-Chun;Hwang, Sung-Chul;Jeong, Seong-Yeob;Kim, Hyun-Soo
    • International Journal of Naval Architecture and Ocean Engineering
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    • 제11권2호
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    • pp.639-647
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    • 2019
  • A realistic numerical simulation technology using a Lagrangian Fluid-Structure Interaction (FSI) model was combined with a fracture algorithm to predict the fluid-ice-structure interaction. The failure of ice was modeled as the tensile fracture of elastic material by applying a novel FSI model based on the Moving Particle Semi-implicit (MPS) method. To verify the developed fracture algorithm, a series of numerical simulations for 3-point bending tests with an ice beam were performed and compared with the experiments carried out in an ice room. For application of the developed FSI model, a dropping water droplet hitting a cantilever ice beam was simulated with and without the fracture algorithm. The simulation showed that the effects of fracture which can occur in the process of a FSI simulation can be studied.

Influence of Dangling Bonds on Nanotribological Properties of Alpha-beam Irradiated Graphene

  • Hwang, Jinheui;Kim, Jong Hoon;Kwon, Sangku;Hwang, C.C.;Wu, Junqiao;Park, Jeong Young
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.265-265
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    • 2013
  • We have investigated the influences of dangling bonds generated by alpha particle irradiation on friction and adhesion properties of graphene. Single layer of graphene grown with chemical vapor deposition on copper foil was irradiated by the alpha beam with the average energy of 3.04 MeV and the irradiation dosing between $1{\times}10^{14}$ and $1{\times}10^{15}$/$cm^3$. Raman spectroscopic showed that the ${\pi}$ electron states below Fermi level arises and the $I_D$/$I_G$ increases as increasing the dosing of alpha particle irradiation. The core level X-ray photoelectron (XPS) revealed that these defects represent the creation of various carbon-related defects and dangling bond. The nanoscale tribological properties were investigated with atomic force microscopy in ultrahigh vacuum. The friction appeared to increase remarkably as increasing the amount of dosing, indicating that the dangling bonds on graphene layers enhances the energy dissipations in friction. This trend can be explained by the additional channel of energy dissipation by dangling bond or O- and H- terminated clusters created by alpha particle irradiation.

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저압상태에서 공기역학적 렌즈를 이용한 입자 빔의 생성 및 크기 제어 (Generation and Size Control of Particle Beams at Low Pressures Using Aerodynamic Lenses)

  • 배귀남
    • 대한기계학회논문집B
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    • 제23권10호
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    • pp.1320-1326
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    • 1999
  • Since it is not possible to generate spatially uniform particle distribution at low pressures in which in-situ particle monitors(ISPMs) are normally operated, it is of interest to investigate the response of an ISPM to particle beams at low pressures. The purpose of this study is to develop technique that can control the size of particle beams. In this study, particle beams were generated at low pressures by using identical aerodynamic lenses, and their shape and size were visualized by collecting uniform sized methylene blue aerosol particles on a filter media. It was found that the size of particle beams depends on the number of lens, the distance between lenses, and the downstream distance from the final lens. The size of particle beams decreases with increasing distance between lenses, and increases with increasing downstream distance from the final lens. The experimental results obtained in this work will be used to investigate performance of an ISPM at low pressures.

UAV 자동 편대비행을 위한 디지털 빔포밍 및 ToA 기반의 상대위치 추정 시스템 (A Relative Position Estimation System using Digital Beam Forming and ToA for Automatic Formation Flight of UAV)

  • 김재완;윤준용;주양익
    • 한국멀티미디어학회논문지
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    • 제17권9호
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    • pp.1092-1097
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    • 2014
  • It is difficult to perform automatic formation flight of UAV (Unmanned Aerial vehicle) when GPS (Global Positionig System) is out of order or has a system error, since the relative position estimation in the flight group is impossible in that case. In this paper, we design a relative localization system for the automatic formation flight of UAV. For this purpose, we adopt digital beam forming (DBF) to estimate the angle with the central controller of the flight group and Particle Filtering scheme to compensate the estimation error of ToA (time of arrival) method. Computer simulation results present a proper distance between the central controller and a following unit to maintain the automatic formation flight.

Monte Carlo Calculation for Production Cross-Sections of Projectile's Isotopes from Therapeutic Carbon and Helium Ion Beams in Different Materials

  • Quazi Muhammad Rashed Nizam;Asif Ahmed;Iftekhar Ahmed
    • Journal of Radiation Protection and Research
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    • 제48권4호
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    • pp.204-212
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    • 2023
  • Background: Isotopes of the projectile may be produced along the beam path during the irradiation of a target by a heavy ion due to inelastic interactions with the media. This study analyzed the production cross-section of carbon (C) and Helium (He) projectile's isotopes resulting from the interactions of these beams with different materials along the beam path. Materials and Methods: In this study, we transport C and He ion beams through different materials. This transportation was made by the Monte Carlo simulation. Particle and Heavy Ion Transport code System (PHITS) has been used for this calculation. Results and Discussion: It has been found that 10C, 11C, and 13C from the 12C ion beam and 3He from the 4He ion beam are significant projectile's isotopes that have higher flux than other isotopes of these projectiles. The 4He ion beam has a higher projectile's isotope production cross-section along the beam path, which adds more impurities to the beam than the 12C ion beam. These projectile's isotopes from both the 12C and 4He ion beams have higher production cross-sections in hydrogenous materials like water or polyethylene. Conclusion: It is important to distinguish these projectile's isotopes from the primary beam particles to obtain a precise and accurate cross-section result by minimizing the error during measurement with a nuclear track detector. This study will show the trend of the production probability of projectile's isotopes for these ion beams.