• 한국입자에어로졸학회지
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• 제13권2호
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• pp.53-63
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• 2017

As semiconductor process was highly integrated, particle contamination became a major issue. Because particle contamination is related with process yields directly, particles with a diameter larger than half pitch of gate should be controlled. PBMS (Particle beam mass spectrometry) is one of powerful nano particle measurement device. It can measure 5~500 nm particles at ~ 100 mtorr condition in real time by in-situ method. However its usage is restricted to research filed only, due to its big device volume and high price. Therefore aperture changeable aerodynamic lenses (ACALs) which can control particle focusing characteristics by changing its aperture diameter was proposed in this study. Unlike conventional aerodynamic lenses which changes particle focusing efficiency when operating condition is changed, ACALs can maintain particle focusing efficiency. Therefore, it can be used for a multi-monitoring system that connects one PBMS and several process chambers, which greatly improves the commercialization possibility of the PBMS. ACALs was designed based on Stokes number and evaluated by numerical method. Numerical analysis results showed aperture diameter changeable aerodynamic lenses can focus 5 to 100 nm standard particles at 0.1 to 10 torr upstream pressure.

• Archives of Pharmacal Research
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• 제3권2호
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• pp.65-74
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• 1980

Analysis of particle size distribution of a sample of fine aluminum hydroxide powder was carried out by four different methods, i. e., conductivity, air permeability, gas-adsorption and sedimentation. Each method was reproducible. The results obtained by Coulter counter and sedimentation balance were similar, and the data obtained by Lea and Nurse permeameter and Stroehlein areameter were also similar. But the results differ considerabley between the former and the latter. The advantages and disavantages of each method were discussed briefly and a means of comparing the results with those obtianed by surface area measurements was shown.

• 한국유체기계학회 논문집
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• 제14권5호
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• pp.18-23
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• 2011

A CFD analysis method is developed and applied for investigating the gas flow and the byproduct particle trajectory in Roots type vacuum pump. The internal fluid flow and thermal fields between the rotors and the housing of vacuum pump are analyzed by using the dynamic mesh, the numerical methods for unsteady 2-D Navier-Stokes equation and the standard k-$\varepsilon$ turbulence model of the Fluent code. Coupled with the flow simulation results, the particle trajectory of the byproduct flowing into the pump with gas stream is analyzed by using discrete phase modeling technique. The CFD analysis results show the pressure, the velocity and the temperature distributions in pump change abruptly due to the rotation of rotors, and back flows are produced due to the strong reverse pressure gradients at rotor/rotor and rotor/housing clearances. The predicted byproduct particle trajectory results also show the particles impinge on the clearance surfaces between the housing and the rotor of pump and then may form the deposit layer causing the failure of pump.

• Tribology and Lubricants
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• 제24권6호
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• pp.297-301
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• 2008

In many dynamic seals such as lip seal and compression packings, it is well known that wear occur at the surface of heat treated steel shaft as results of the intervened wear particle. It is widely understood that the dominant wear mechanism related in sealing surfaces is abrasive wear. However, little analytical and experimental studies about this problems have been done until now. In this paper, a contact analysis is carried out using MARC to investigate the wear mechanism in contact seal applications considering elastomeric seal, a elastic perfect-plastic micro-spherical particle and steel surface. Deformed seal shapes, contact and von-Mises stress distributions for various particle sizes and interference are showed. The maximum von-Mises stress within steel shaft was exceeded its yield strength and plastic deformation occurred at steel surface. Therefore, the sealing surface can be also worn by sub-surface fatigue due to wear particles together with well known abrasion. The numerical methods and models used in this paper can be applied in design of dynamic sealing systems, and further intensive studies are required.

• 환경영향평가
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• 제2권1호
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• pp.57-63
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• 1993

An analysis for particle settling effects via of plume centerline tilted exponentially under the influence of panicle settling velocity is carried out for particle of $30{\mu}m$ diameter with $1g/cm^3$ density and 0.02m/s settling velocity corresponding to its particle characteristic according to various wind speeds, atmospheric stabilities. Characteristic analysis of surface concentration distribution simulated by Lagrangian model also are carried out under the influence of plume centerline tilted exponentially at 10m stack height emitted 200 particles per second. This study reveals that plume centerline at the nearby source is sharply tilted exponentially under the condition of stable, weakly wind speed, therefore the lower concentration at the nearby source, the higher concentration at the downwind distance far away from source than actual one is brought out, if not apply the effect of plume centerline tilted exponentially to diffusion Model.

• Structural Engineering and Mechanics
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• 제89권4호
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• pp.383-397
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• 2024

To improve the vibration control performance and applicability of traditional particle tuned mass damper (PTMD) and realize the significant characteristic of lightweight design, this study proposes a novel particle tuned mass inerter system (PTMIS) by introducing inerter system (IS) to the PTMD. In the study, the motion equation of single degree of freedom (SDOF) structure attached with PTMIS is established first, then the variation law of the system's vibration reduction performance (VRP) is discussed through parameter analysis, and it is compared with the PTMD to analyze its VRP advantages. Finally, its vibration reduction (VR) mechanism from the perspective of core control force and energy analysis is explored, and its cavity relative displacement from the application perspective is analyzed. The results show that the PTMIS can remarkably improve the vibration control effectiveness of the PTMD. The reason is that the inerter can store energy and transfer the energy to the cavity and particles, which further stimulates the interaction between the two parts, thereby improving the nonlinear energy consumption effectiveness. Also, the IS can amplify the damping element's energy dissipation efficiency. In addition, the PTMIS can effectively reduce the working stroke of the PTMD, and through the analysis of the lightweight characteristics of the PTMIS, it is found that its lightweight advantage can reach nearly 100%.

• Tribology and Lubricants
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• 제23권6호
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• pp.301-305
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• 2007

The wear particle analysis has been known as very effective method to foreknow and decide a moving situation and a damage of machine parts by using the digital computer image processing. But it was not laid down and trusted to calculate shape parameters of wear particle and wear volume. In order to apply image processing method in the foreknowledge and decision of lubricated condition, it needs to verify the reliability of the calculated data by the image processing and to lay down the number of images and the amount of wear particle in one image. In this study, the lubricated friction experiment was carried out in order to establish the optimum image capture with the SM45C specimen under experiment condition. The wear particle data were calculated differently according to the number of image and the amount of wear particle in one image.

• 한국연소학회:학술대회논문집
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• 한국연소학회 1999년도 제19회 KOSCO SYMPOSIUM 논문집
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• pp.241-249
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• 1999

Soot particle temperatures in co-flow diffusion flames have been measured using a two-color pyrometry at the pressure of 0.2 MPa(2 atm). The measured soot particle temperatures along with the integrated soot volume fractions are analyzed to understand soot formation characteristics. At 0.2 MPa, the addition of small amount of air into ethylene do not change the soot particle temperature in soot formation regions. This result showed that the increase of soot formation with addition of air is mostly due to the chemical effect of the added air, such as the increased role of C3 chemistry during the early stage of soot inception process. The addition of sufficient air into ethylene, however, changes soot particle temperatures and the understanding of soot formation characteristics becomes complicated. Measured soot particle temperatures also showed that there is no significant temperature effect for the synergistic effect of ethylene/propane mixture on soot formation.

• 산업기술연구
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• 제26권B호
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• pp.173-181
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• 2006

We analyzed systematically particle growth in the pulsed $SiH_4$ plasmas by a numerical method and investigated the effects of pulse modulations (pulse frequencies, duty ratios) on the particle growth. We considered effects of particle charging on the particle growth by coagulation during plasma-on. During plasma-on ($t_{on}$), the particle size distribution in plasma reactor becomes bimodal (small sized and large sized particles groups). During plasma-off ($t_{off}$), there is a single mode of large sized particles which is widely dispersed in the particle size distribution. During plasma on, the large sized particles grows more quickly by fast coagulation between small and large sized particles than during plasma-off. As the pulse frequency decreases, or as the duty ratio increases, $t_{on}$ increases and the large sized particles grow faster. On the basis of these results, the pulsed plasma process can be a good method to suppress efficiently the generation and growth of particles in $SiH_4$ PCVD process. This systematical analysis can be applied to design a pulsed plasma process for the preparation of high quality thin films.

• 한국대기환경학회지
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• 제21권3호
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• pp.367-375
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• 2005

Low-Z particle Electron Probe X-ray Microanalysis was applied to characterize MSW fly- and bottom -ash particle samples originated from two municipal incinerators (denoted as A and B) in Korea. According to their chemical composition, many distinctive particle types were identified. In A fly ash, the major chemical species are carbon-rich, aluminosilicates and many particles are composed of as a mixture of $ CaCO_3$ and other chemical species such as $CaSO_4$ or $CaCl_2$. For B fly ash, Fe, iron oxide, NaCl and NaCl-containing particles are the most abundant. In bottom ash, A and B were composed of similar chemical species such as carbon-rich, Fe, iron oxide, $CaCO_3$, and aluminosilicates. It was demonstrated that the single-particle characterization using this low-Z particle EPMA technique provided detailed information on various types of chemical species in the MSW ash samples. In addition, the technique has advantage over conventional analytical techniques in the point that both crystalline and glass-like ash particles can be analyzed at the same time.