• Journal of the Semiconductor & Display Technology
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• v.9 no.1
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• pp.5-10
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• 2010

Among a variety of cleaning processes, the cryogenic carbon dioxide ($CO_2$) cleaning has merits because it is highly efficient in removing very fine particles, innoxious to humans and does not produce residuals after the cleaning, which enables us to extend its area of coverage in the semi-conductor fabrication society. However, the cryogenic carbon dioxide cleaning method has some technical research issues in aspect to particles' adhesion and removal. To resolve these issues, performing an analysis for the identification of particle adhesion mechanism is needed. In this study, a research was performed by a theoretical approach. To this end, we extended the G-T (Greenwood-Tripp) model by applying the JKR (Johnson-Kendall-Roberts) and Lennard-Jones potential theories and the statistical characteristics of rough surface to investigate and identify the contact, adhesion and deformation mechanisms of soft or hard particles on the rough substrate. The statistical characteristics of the rough surface were taken into account through the employment of the normal probability distribution function of the asperity peaks on the substrate surface. The effects of surface roughness on the pull-off force for these particles were examined and discussed.

• Journal of the Semiconductor & Display Technology
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• v.7 no.4
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• pp.29-33
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• 2008

Rapid increase of integrity for recent semiconductor industry highly demands the development of removal technology of contaminated particles in the scale of a few microns or even smaller. It is known that the surface cleaning technology using $CO_2$ snow has its own merits of high efficiency. However, the detailed removal mechanism of particles using this technology is not yet fully understood due to the lack of sophisticated research endeavors. The detachment mechanism of particles from the substrates is known to be belonged in four types; rebounding, sliding, rolling and lifting. In this study, a modeling effort is performed to explain the detachment mechanism of a contaminant particle due to the rebounding caused by the vertical collision of the $CO_2$ snow. The Hertz and Johnson-Kendall-Roberts(JKR) theories are employed to describe the contact, adhesion and deformation mechanisms of the particles on a substrate. Numerical simulations are followed for several representative cases, which provide the perspective views on the dynamic characteristics of the particles as functions of the material properties and the initial inter-particle collision velocity.

• Journal of Adhesion and Interface
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• v.3 no.4
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• pp.19-26
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• 2002

In order to study the toughening mechanism of rubber modified polycarbonate, the sequence of development of micro-voids was investigated by real-time small angle X-ray scattering with Synchrotron radiation (SR-SAXS). The used test method was wedge test. The scattering intensity increases with increasing penetration depth of wedge, i.e. applied strain. The increase is due to the micro-void formation during deformation. This micro-void was uniformly developed in matrix and was different from large-void due to internal cavitation of rubber particle and/or debonding between rubber particle and polycarbonate matrix. The micro-void was developed at the critical strain and the radius of micro-void is around $600{\AA}$. Above the critical strain the size of micro-void remains almost constant with increasing applied strain. However, the population of micro-void increased with applied strain.

• Corrosion Science and Technology
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• v.9 no.6
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• pp.247-253
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• 2010

The characteristics of selective oxidation prior to hot-dip galvanizing with the annealing atmosphere dew point and chemical composition in dual-phase steels and their effect on the inhibition layer formation relevant to coating adhesion have been studied using a combination of electron microscopic and surface analytical techniques. The annealed and also galvanized samples of 3 kinds of Si/Mn ratios with varied amounts of Si addition were prepared by galvanizing simulator. The dew point was controlled at soaking temperature $800^{\circ}C$ in 15%$H_2$ -85%$N_2$ atmosphere. It was shown that good adhesion factors were mainly uniformity of oxide particle distribution of low number density and low Si/Mn ratio prior to hot-dip galvanizing. Their effect was the greatly reduced coating bare spots and the formation of uniform inhibition layer leading to good adhesion of Zn overlay. The mechanism of good adhesion is suggested by two processes: the formation of inhibition layer on the oxide free surface uncovered with no $SiO_2$-containing particles in particular, and the inhibition layer bridging of oxide particles. The growth of inhibition layer was enhanced markedly by the delayed reaction of Fe and Al with the increase of Si/Mn ratio.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.2
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• pp.114-118
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• 2009

PVA (polyvinyl alcohol) brush cleaning method is a typical cleaning method for semiconductor cleaning process especially post-CMP cleaning. PVA brush contacts with the wafer surface and abrasive particle, generating the contact rotational torque of the brush, which is the removal mechanism. The brush rotational torque can overcome theoretically the adhesion force generated between the abrasive particle and wafer by zeta potential. However, after CMP (chemical mechanical polishing) process, many particles remained on the wafer because the brush was contaminated in previous post-CMP cleaning step. The abrasive particle on the brush redeposits to the wafer. The level of the brush contamination increased according to the cleaning run time. After cleaning the brush, the level of wafer contamination dramatically decreased. Therefore, the brush cleanliness effect on the cleaning performance and it is important for the brush to be maintained clearly.

• Journal of the Korean Wood Science and Technology
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• v.46 no.2
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• pp.189-201
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• 2018

Intumescent system is a highly effective flame retardant technology that takes advantage of the mechanism of foaming and carbonization. In order to materialize Intumescent system, it is necessary to use reinforcement material to improve the strength of the material. In this study, we used kenaf as a natural fiber to manufacture intumescent/EVA (ethylene vinyl acetate) composites to improve mechanical and flame retardant performance. Finally two materials with different particle shape are applied to one system. Therefore, the influence factors of the particles with different shapes on the composite material were analyzed based on the tensile test. For this purpose, we have used the tensile strength analysis model and confirmed that it can only act as a partial strength reinforcement due to weak binding force between the matrix and particles. In the combustion characteristics analysis using cone calorimeter and UL 94, the combustion characteristics were enhanced as the content of Intuemscent was increased. As the content of kenaf increased, combustion characteristics were strengthened and carbonization characteristics were weakened. Through the application of kenaf, it can be confirmed that elastic modulus improvement and combustion characteristics can be strengthened, which confirmed the possibility of development of environmentally friendly flame retardant materials.

• KSTLE International Journal
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• v.3 no.1
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• pp.68-73
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• 2002

A fretting wear experiment in roam temperature air was performed to evaluate the wear mechanism of fuel rod using a fretting wear tester, which has been developed for experimental study, The main focus was to compare the wear behaviors of fuel rod against support springs with different contact contours (i.e. concave and convex). Wear volume, degree or surface hardening and adhesion tendency of wear particle were examined by the surface roughness tester. The result indicated that with a change of contact condition from contact force of 5 N to 0.1 mm gap, the wear volume of tube increased in the condition of concave spring, but slowly decreased in convex spring. From the results of SEM observation, wear mechanism of each test condition was also dependent on the spring shapes. The wear mechanism of each test condition in room temperature air is discussed.

• Smart Structures and Systems
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• v.7 no.3
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• pp.199-211
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• 2011

Using computational modeling, we design a pair of biomimetic microcapsules that exploit chemical mechanisms to communicate and alter their local environment. As a result, these synthetic objects can undergo autonomous, directed motion. In the simulations, signaling microcapsules release "agonist" particles, while target microcapsules release "antagonist" particles and the permeabilities of both capsule types depend on the local particle concentration in the surrounding solution. Additionally, the released nanoscopic particles can bind to the underlying substrate and thereby create adhesion gradients that propel the microcapsules to move. Hydrodynamic interactions and the feedback mechanism provided by the dissolved particles are both necessary to achieve the cooperative behavior exhibited by these microcapsules. Our model provides a platform for integrating both the spatial and temporal behavior of assemblies of "artificial cells", and allows us to design a rich variety of structures capable of exhibiting complex dynamics. Due to the cell-like attributes of polymeric microcapsules and polymersomes, material systems are available for realizing our predictions.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.22 no.3
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• pp.529-539
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• 1998

A quantitative study of impact damage of ${Al_2}}O_3}-TiO_2$ plasma coated soda-lime glasses was carried out and compared with that of the uncoated smooth glass specimen. The shape of cracks by the impact of steel ball was observed by stereo-microscope and the decrease of the bending strength due to the impact of steel ball was measured through the 4-point bending test. At the low velocity, cone cracks were occurred. As the impact velocity increases, initial lateral cracks were propagated on the slanting surface of a cone crack, and radial cracks were generated at the crushed site. When the impact velocity of steel ball exceeds the critical velocity, the contact site of specimen was crushed due to plastic deformation and then radial and lateral cracks were largely grown. Crack length of coated specimens was smaller than that of uncoated smooth specimen due to the effect of coating layer on the substrate surface. According to impact velocity, the bending strength of coated specimens had no significant difference, compared with that of the uncoated smooth specimen. But this represents that the bending strength of coated specimens was increased, considering the effect of sand blasting damage which was performed to increase the adhesion force of coating layer.

• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.269-271
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• 2009

We investigated on the sintering behaviors and electrical properties of photo-sensitive aluminum (Al) electrode materials in plasma display panels. General characteristics of Al electrodes was totally different to that of conventional Ag materials; resistivity was decreased with the increasing of metal particle sizes and the amount of frit content and there is almost no width difference between developed and fired electrodes layers. Microstructures of fired electrodes revealed that Al electrodes had different mechanism on necking between metal particles and making electrical conducting path. Chemical durability (especially, antialkalinity) and adhesion of Al electrodes must be carefully controlled. Nevertheless there are difficulties of processing Al electrodes, we developed and optimized photo-sensitive Al materials as address electrodes without any changes of existing patterning equipment and sintering conditions.