• Laser Solutions
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• v.6 no.3
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• pp.29-35
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• 2003

In semiconductor processing, there are two types of particle contaminated onto the wafer, i.e. dry and wet state particles. In order to evaluate the cleaning performance of laser shock wave cleaning method, the removal of 1 m sized alumina particle at different particle conditions from silicon wafer has been carried out by laser-induced shock waves. It was found that the removal efficiency by laser shock cleaning was strongly dependent on the particle condition, i.e. the removal efficiency of dry alumina particle from silicon wafer was around 97％ while the efficiencies of wet alumina particle in DI water and IPA are 35％ and 55％ respectively. From the analysis of adhesion forces between the particle and the silicon substrate, the adhesion force of the wet particle where capillary force is dominant is much larger than that of the dry particle where Van der Waals force is dominant. As a result, it is seen that the particle in wet condition is much more difficult to remove from silicon wafer than the particle in dry condition by using physical cleaning method such as laser shock cleaning.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1505-1509
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• 2004

A novel technique for fine particle beam focusing under the atmospheric pressure is introduced using a radiation pressure assisted aerodynamic lens. To introduce the radiation pressure in the aerodynamic focusing system, a 25 mm plano-convex lens having 2.5 mm hole at its center is used as an orifice. The particle beam width is measured for various laser power, particle size, and flow velocity. In addition, the effect of the laser characteristics on the beam focusing is evaluated comparing an Ar-Ion continuous wave laser and a pulsed Nd-YAG laser. For the pure aerodynamic focusing system, the particle beam width was decreased as increasing particle size and Reynolds number. For the particle diameter of 0.5 ${\mu}m$, the particle beam was broken due to the secondary flow at Reynolds number of 694. Using the Ar-Ion CW laser, the particle beam width becomes smaller than that of the pure aerodynamic focusing system about 16 %, 11.4 % and 9.6 % for PSL particle size of 2.5 ${\mu}m$, 1.0 ${\mu}m$, and 0.5 ${\mu}m$ respectively at the Reynolds number of 320. Particle beam width was minimized around the laser power of 0.2 W. However, as increasing the laser power higher than 0.4 W, the particle beam width was increased a little and it approached almost a constant value which is still smaller than that of the pure aerodynamic focusing system. The radiation pressure effect on the particle beam width is intensified as Reynolds number decreases or particle size increases relatively. On the other hand, using 30 Hz pulsed Nd-YAG laser, the effect of the radiation pressure on the particle beam width was not distinct unlike Ar-Ion CW laser.

• Journal of Korean Society for Atmospheric Environment
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• v.16 no.2
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• pp.165-178
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• 2000

In this study the effects of block distance have been investigated on the particle deposition efficiency in the collecting cell of two-stage electrostatic precipitator by numerical analysis. Particle trajectories have been changed by the electrostatic and inertial force of particle with the inlet velocity electrostatic number and particle diameter. The total deposition efficiency has a minimum value by the interaction between the effect of particle inertial force and electrostatic force in the collecting cell. The increase of block distance makes the total deposition efficiency decrease under the range of the particle size which has the minimum deposition efficiency. However beyond the range of particle size which has minimum deposition efficiency total deposition efficiency has no trend with the variation of block distance.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.10
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• pp.1359-1367
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• 2000

In-situ particle monitors(ISPMs) are widely used for monitoring contaminant particles in vacuum-based semiconductor manufacturing equipment. In the present research, the performance of a Particle Measuring Systems(PMS) Vaculaz-2 ISPM at low pressures has been studied. We generated the uniform sized methylene blue particle beams using three identical aerodynamic lenses in the center of the vacuum line, and measured the detection efficiency of the ISPM. The effects of particle size, particle concentration, mass flow rate, system pressure, and arrangement of aerodynamic lenses on the detection efficiency of the ISPM were examined. Results show that the detection efficiency of the ISPM greatly depends on the mass flow rate, and the particle Stokes number. We also found that the optimum Stokes number ranges from 0.4 to 1.9 for the experimental conditions.

• Proceedings of the Korean Vacuum Society Conference
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• 2009.08a
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• pp.97-97
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• 2009

• Transactions of the Korean Society of Mechanical Engineers B
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• v.22 no.11
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• pp.1564-1570
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• 1998

In-situ particle monitors(ISPMs) are widely used for monitoring contaminant particles in vacuum-based semiconductor manufacturing equipment. In the present research, the performance of a Particle Measuring Systems(PMS) Vaculaz-2 ISPM at subatmospheric pressures has been studied. We created uniform upstream conditions of particle concentration and measured the detection efficiency, the lower detection limit, and the size response of the ISPM using uniform sized methylene blue aerosol particles. The effect of particle size, particle velocity, particle concentration, and system pressure on the detection efficiency was examined. Results show that the detection efficiency of the ISPM decreases with decreasing chamber pressure, and with increasing mass flow rate. The lower detection limit of the ISPM, determined at 50 % of the measured maximum detection efficiency, was found to be about $0.15{\sim}0.2{\mu}m$, which is similar to the minimum detectable size of $0.17{\mu}$ given by the manufacturer.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.10 s.253
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• pp.929-934
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• 2006

The digital HPTV(holographic particle tracking velocimetry) velocity field measurement system consists of four steps: recording, numerical reconstruction, particle extraction and velocity extraction. In the velocity extraction process, we improved the two frame PTV algorithm to extract 3-D displacement information of each particle located in 3D space. Because a digital CCD camera was used, some factors such as spatial resolution, numerical aperture, and particle concentration influenced on the performance of the developed digital HPTV. Especially, the particle concentration $(C_o)$ affected the reconstruction efficiency and recovery ratio in the numerical reconstruction and particle extraction procedure. In this paper, the effect of particle concentration reconstruction efficiency and recovery ratio were analyzed experimentally. Optimal particle concentration was found to be in the range of $C_o=11{\sim}17\;particles/mm^3$.

• 연구논문집
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• s.28
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• pp.39-47
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• 1998

Industrial electrostatic precipitation is a very complex process, which involves multiple-way interaction between the electric field, the fluid flow, and the particulate motion. This paper describes a strongly coupled calculation procedure for the rigorous computation of particle dynamics during electrostatic precipitation. The turbulent gas flow and the particle motion under electrostatic forces are calculated by using the commercial computational fluid dynamics (CFD) package FLUENT linked to a finite-volume solver for the electric field and ion charge. Particle charge is determined from both local electrical conditions and the cell residence time which the particle has experienced through its path. Particle charge density and the particle velocity are averaged in a control volume to use Lagrangian information of the particle motion in calculating the gas and electric fields. The turbulent particulate transport and the effects of particulate space charge on the electrical current flow are investigated. The calculated results for poly-dispersed particles are compared with those for mono-dispersed particles, and significant differences are demonstrated.

• Particle and aerosol research
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• v.14 no.2
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• pp.41-47
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• 2018

Numerical analysis was conducted to characterize particle deposition onto a heated horizontal semiconductor wafer in vacuum environment. In order to calculate the properties of gas surrounding the wafer, the gas was assumed to obey the ideal gas law. Particle transport mechanisms considered in the present study were convection, Brownian diffusion, gravitational settling and thermophoresis. Averaged particle deposition velocities on the upper surface of the wafer were calculated with respect to particle size, based on the numerical results from the particle concentration equation in the Eulerian frame of reference. The deposition velocities were obtained for system pressures of 1000 Pa~1 atm, wafer heating of 0~5 K and particle sizes of $2{\sim}10^4nm$. The present numerical results showed good agreement with the available experimental ones.

• Journal of Korean language education
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• v.28 no.3
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• pp.153-180
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• 2017

This research examined compound particles, which have not been properly addressed in existing studies on particle combination education, from the perspective of Korean language education as a second language. First, existing research was examined with the understanding of the issue that there is a lack of discussion in existing studies on the education method of either including the compound particle in particle combination or excluding it all together. In the next chapter, an examination was made on the concept and usage of terminology for compound particles in the field of Korean linguistics. Following a summary of this information, a review was made on the list of compound particles established in Korean linguistics. Thus, seven compound particles were identified for Korean language education considering discriminant standard and educational effectiveness from the perspective of Korean language education. The researcher proposes that the compound particle should be taught as an extension of particle combination education and that its concept should be clearly outlined as a direction for future education.