• Journal of the Korean Society for Precision Engineering
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• v.23 no.1 s.178
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• pp.129-135
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• 2006

In this study, a two-axis ultra-precision stage driven by piezoelectric elements is presented. The stage has a flexure-type parallel linear guide mechanism consisting of quad-symmetric simple parallel linear springs and quad-symmetric double compound linear springs. While the simple parallel linear springs guide the linear motion of a moving plate in the stage, the double compound linear springs follow the motion of the simple parallel linear spring as well as compensate the parasitic motions caused by the simple parallel linear springs. The linear springs are designed by rectangular beam type flexures that are deformed by bending deflection rather than axial extension, because the axial extension is smaller than the bending deflection at the same force. The designed guide mechanism is analyzed by finite element method(FEM). Then two-axis parallel linear stage is implemented by the linear guide mechanism combined with piezoelectric elements and capacitance type displacement sensors. It is shown that the manufactured ultra-precision stage achieves 3 nm of resolution in x- and y-axis within 30 ${\mu}m$ of operating range.

• Journal of Institute of Control, Robotics and Systems
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• v.4 no.3
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• pp.360-371
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• 1998

In this paper, output precision characteristics of a planar 6 degree-of-freedom parallel mechanisms are investigated, where the 6 degree-of-freedom mechanism is formed by adding an additional link along with an actuated joint in each serial subchain of the planar 3 degree-of-freedom parallel mechanism. Kinematic analysis for the parallel mechanism is performed, and its first-order kinematic characteristics are examined via kinematic isotropic index, maximum and minimum input-output velocity transmission ratios of the mechanisms. Based on this analysis, two types of planar 6 degrees-of-freedom parallel manipulators are selected. Then, dynamic characteristics of the two selected planar 6 degree-of-freedom parallel mechanisms, via Frobenius norms of inertia matrix and power modeling array, are investigated to compare the magnitudes of required control efforts of both three large actuators and three small actuators when the link lengths of three additional links are changed. It can be concluded from the analysis results that each of these two planar 6 degrees-of-freedom parallel mechanisms has an excellent control-in-the-small characteristics and therefore, it can be very effectively employed as a high-precision macro-micro manipulator when both its link lengths and locations of small and large actuators are properly chosen.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.3
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• pp.48-54
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• 2012

This paper introduces the kinematic calibration method to improve the positioning accuracy of a parallel mechanism. Since all the actuators in the parallel mechanism are controlled simultaneously toward the target position, the volumetric errors originated from each motion element are too complicated. Therefore, the exact evaluation of the error sources of each motion element and its calibration is very important in terms of volumetric errors. In the calibration processes, the measurement of the errors between commands and trajectories is necessary in advance. To do this, a digitizer was used for the data acquisition in 3 dimensional space rather than arbitrary planar error data. After that, the optimization process that was used for reducing the motion errors were followed. Consequently, Levenberg-Marquart algorithm as well as the error data acquisition method turned out effective for the purpose of the calibration of the parallel mechanism.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.33 no.9
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• pp.982-989
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• 2009

Parallel Kinematic Mechanism (PKM) is a device to perform the various motion in three-dimensional space and it calls for six degree of freedom. For example, Parallel Kinematic Mechanism is applied to machine tools, medical equipments, MEMS, virtual reality devices and flight motion simulators. Recently, many companies have tried to develop new Parallel Kinematic Mechanism in order to improve the cycle time and the precisional tolerance. Parallel Kinematic Mechanism uses general universal joint and spherical joint, but such joints have accumulated tolerance problems. Therefore, it causes position control problem and dramatically life time reduction. This paper focused on the rolling element to improve sliding precision in new sliding ball joint development. Before the final design and production, it was confirmed that new sliding ball joint held a higher load and a good geometrical structure. FEM analysis showed a favorable agreement with tensile and compressive testing results by universal testing machine. In conclusions, a new sliding ball joint has been developed to solve a problem of accumulated tolerance and verified using tensile and compressive testing as well as FEM analysis.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.10
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• pp.56-64
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• 2009

This paper presents a parallel typed walking robot which can walk in omni-direction and climb from a floor to a wall. We design a six D.O.F leg mechanism composed of three legs, which form a parallel mechanism with a base and a ground to generate arbitrary poses. Optimal design is conducted to maximize the walking space and the dexterity, which are normalized by the stroke of leg. Kinematic parameters are found to maximize the weighted optimal objectives. We design a triple parallel mechanism robot by inserting Stewart platform between the upper leg mechanism and the lower leg mechanism and examine the gaits when the robot walks on the ground and climbs from a floor to a wall. The analysis of walking space and dexterity for each gait shows that the triple parallel walking robot has a large walking space with a large stability region. We explore the possibility that the robot can climb from a floor to a wall. Investigating the gaits for the six steps proves that the robot can lift the foot up to the wall by combining the orientational walking space generated by three parallel mechanisms.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.299-303
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• 2004

In our pervious paper, a new parallel-type spherical 3-degree-of-freedom mechanism consisting of a two-degree-of-freedom parallel module and a serial RRR subchain was proposed[1]. In this paper, its improved version is suggested and implemented. Differently from the previous 3-dof spherical mechanism, gear chains are incorporated into the current version of the mechanism to drive the distal revolute joint of the serial subchain from the base of the mechanism and in fact, the modification significantly improves kinematic characteristics of the mechanism within its workspace. Firstly, after a brief description on its structure, the closed-form solutions of both the forward and the reverse position analysis are derived. Secondly, the first-order kinematic model of the mechanism for the inputs which are assumed to be located at the base is derived. Thirdly, through the simulations of the kinematic analysis via. kinematic isotropic index, it is confirmed that the mechanism has much more improved isotropic properties throughout the workspace of the mechanism than the previous mechanism in [1]. Lastly, the proposed mechanism is implemented to verify the results from this analysis.

• Journal of Institute of Control, Robotics and Systems
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• v.12 no.5
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• pp.464-472
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• 2006

This paper presents the two degree-of-freedom (DOF) planar parallel mechanism, called the $2{\underline{R}}RR-RP$ manipulator, whose degree-of-freedom is dependent on an additional passive constraining leg connecting the base and the platform. First, the kinematic analysis of the mechanism is performed: the inverse and forward kinematic problems are analytically solved, the workspace is systematically derived, and all of the singular configurations are examined. Then, in order to determine the geometric parameters the optimization of the mechanism is performed considering its dexterity, stiffness, and space utilization. Finally, the kinematic performances of the optimized mechanism are evaluated through the comparison study to the conventional 5-bar parallel manipulator.

• Journal of Institute of Control, Robotics and Systems
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• v.5 no.3
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• pp.324-337
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• 1999

In this work, a new 3-PSP type spatial 3-degree-of-freedom parallel mechanism is proposed. And a 6 DOF hybrid manipulator which consists of a 3-PPR type planar 3 DOF parallel mechanism and a new 3-PSP type spatial 3-degree-of-freedom parallel mechanism is proposed. Both 3 DOF mechanism modules have closed-form forward position solutions and particularly, 3-PSP spatial module has unique forward position solution. Firstly, the closed-form position analysis and first-order kinematic analysis for the proposed 3-PSP type module are carried out, and the first-order kinematic characteristics are examined via maximum singular value and the isotropic index of the mechanism. It is shown through these analyses that the mechanism has excellent isotrpic property throughout the workspace. Secondly, position and kinematic analysis of the 3-PPR planar module are briefly described. Thirdly, the forward position analysis for the 3-PPR 3-PSP type 6 degree-of-freedom hybrid mechanism consisting of a 3-PPR planar module and a 3-PSP spatial module is performed along with the analysis of the workspace size and first-order kinematic characteristics. The kinematic characteristics of the proposed hybrid manipulator are compared to those of geometrically similar Stewart manipulator.

• Journal of Mechanical Science and Technology
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• v.16 no.6
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• pp.799-809
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• 2002

In order to utilize a parallel mechanism as a machine tool component, it is important to estimate the errors of its end-effector due to the uncertainties in parts. This study proposes an error analysis for a new parallel device, a cubic parallel mechanism. For the parallel device, we consider two kinds of errors. One is a static error due to link stiffness and the other is a dynamic error due to clearances in the parts. In this study, we propose a stiffness model for the cubic parallel mechanism under the assumption that the link stiffness is a linear function of the link length. Also, from the fact that the errors of u-joints and spherical joints are changed with the direction of force acting on the link, they are regarded as a part of link errors, and then the error model is derived using forward kinematics. Lastly, both the error models are integrated into the total error, which is analyzed with a test example that the platform moves along a circular path. This analysis can be used in predicting the accuracy of other parallel devices.

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.429-429
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• 2000

Micro positioning mechanism is the key technology in many fields, such as scanning electron microscopy (SEM), x-ray lithography, mask alignment and micro-machining. In the paper, a 3DOF parallel-type micro-positioning mechanism is proposed. This mechanism uses piezo-actuators and Flexure hinge to control x, y and $\theta$ motion. It is shown both analytically and numerically that 2 DOF flexure hinge model was better precision than 1 DOF flexure hinge design.