• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.05a
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• pp.501-504
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• 1999

In the shallow trench isolation(STI) chemical mechanical polishing(CMP) process, the key issues are the optimized thickness control within- wafer-non-uniformity, and the possible defects such as nitride residue and pad oxide damage. These defects after STI CMP process were discussed to accomplish its optimum process condition. To understand its optimum process condition, overall STI related processes including reverse moat etch, trench etch, STI filling and STI CMP were discussed. It is represented that the nitride residue can be occurred in the condition of high post CMP thickness and low trench depth. In addition there are remaining oxide on the moat surface after reverse moat etch. It means that reverse moat etching process can be the main source of nitride residue. Pad oxide damage can be caused by over-polishing and high trench depth.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2009.05a
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• pp.241-244
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• 2009

We studied the optimization method of sensing part for measuring heart rate in wrist. In order to know optimum structure of sensing part, we measured the heart rate signal by changing the shape and size of sensor pad structure and the thickness of silicon. The shapes of structure using in experiment are Empty, Rectangle, Embossing, Length, Width. We were compared the amplitude of output signal about each shape when thickness of silicon pad is increasing from 0 to 7 mm by 1 mm.

• Archives of Plastic Surgery
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• v.38 no.4
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• pp.415-420
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• 2011

Purpose: The reconstruction of a soft tissue defect of the heel pad can be challenging. One vital issue is the restoration of the ability of the heel to bear the load of the body weight. Many surgeons prefer to use local flaps or free tissue transfer rather than a skin graft. In this study, we evaluated the criteria for choosing a proper flap for heel pad reconstruction. Methods: In this study, 23 cases of heel pad reconstruction were performed by using the flap technique. The etiologies of the heel defects included pressure sores, trauma, or wide excision of a malignant tumor. During the operation, the location, size and depth of the heel pad defect determined which flap was chosen. When the defect size was relatively small and the defect depth was limited to the subcutaneous layer, a local flap was used. A free flap was selected when the defect was so large and deep that almost entire heel pad had to be replaced. Results: There was only one complication of poor graft acceptance, involving partial flap necrosis. This patient experienced complete recovery after debridement of the necrotic tissue and a split thickness skin graft. None of the other transferred tissues had complications. During the follow-up period, the patients were reported satisfactory with both aesthetic and functional results. Conclusion: The heel pad reconstructive method is determined by the size and soft-tissue requirements of the defect. The proper choice of the donor flap allows to achieve satisfactory surgical outcomes in aesthetic and functional viewpoints with fewer complications.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.4
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• pp.711-719
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• 2002

This paper presents the synchronous vibration control of a rotor system using an active air bearing(AAB). In order to suppress the synchronous vibration, it is necessary to actively control the air film pressure or the air film thickness. In this study, active pads are used to control the air film thickness. Active pads are supported by pivots containing piezoelectric actuators and their radial position can be actively controlled by applying voltage to the actuators. Thus, disturbances, i. e. various kinds of external force can cause shaft vibration as well as change of the air film thickness. The dynamic behavior of a rotary system supported by two tilting-pad gas bearings and its active stabilization using the tilting-pads as actuators are investigated numerically. The $\mu$ synthesis are applied to the AAB system with three pads, two of which contain piezoelectric actuators. To test the validity of the theoretical method, the performance of this control method is evaluated through experiments. The experimental results also show the effectiveness of the control system for suppressing the unbalanced response of the rigid modes.

• Tribology and Lubricants
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• v.9 no.2
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• pp.22-28
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• 1993

The experimental investigation on the inlet pressure of a large tilting pad journal bearing is studied. The continuous distribution of the film pressure and film thickness are measured along with the shaft speed and bearing load for various flow rates. Considerably large inlet pressure is observed at the entrance of each pad, especially lower pads. The inlet pressure increases with the increase of shaft speed as well as bearing load, but it is almost independent on the folw rate and the oil supply temperature. Because of the inlet pressure, the upper pads always keep up slight wedge film shape which are almost parallel to the journal surface, and spragging is not observed in the upper pads with no preload.

• Tribology and Lubricants
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• v.10 no.2
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• pp.30-38
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• 1994

The thermohydrodynamic(THD) performance of a large tilting pad journal bearing is investigated both theoretically and experimentally. The theory takes into account the three dimensional variation of lubricant viscosity and eddy viscosity, and the inlet pressure. Owing to the inlet pressure effect, the film pressure and load capacity are increased but the mixing temperature and bearing surface temperature are decreased. The continuous distribution of the film pressure and film thickness and the bearing surface temperature are measured along with the shaft speed and the bearing load, and they are compared with the theoretical results. The results obtained by the experiment are in good agreement with those by the theory including the inlet pressure effect. It is suggested that the three dimensional turbulent THD analysis including the inlet pressure effect is very useful to predict the performance of the large tilting pad journal bearing more accurately.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2004.11a
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• pp.331-338
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• 2004

We present a three-dimensional average flow model considering elastic deformation of pad asperities for chemical mechanical planarization. To consider the contact deformation of pad asperities in the calculation of the flow factor, three-dimensional contact analysis of a semi-infinite solid based on the use of influence functions is conducted from computer generated three dimensional roughness data. The average Reynolds equation and the boundary condition of both force and momentum balance are used to investigate the effect of pad roughness and external pressure conditions on film thickness and wafer position angle.

• Journal of the Korean Society of Industry Convergence
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• v.21 no.4
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• pp.175-181
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• 2018

Stamping process and rubber pad forming process were performed to manufacture the bipolar plate for fuel cells. For that, a vacuum die casting process and a semi-solid forming process wherein liquid-state materials were used were adopted. After preparing the blank with the stainless steel thin plate having a thickness of 0.1 mm, the bipolar plate channel was formed with the stamping process and rubber pad forming process. The depth of the bipolar plate channel prepared by the stamping method was 0.45 mm and the depth of the bipolar plate channel prepared by the rubber pad forming process was 0.41 mm. Meanwhile, with the vacuum die casting and semi solid forming, the bipolar plate having a channel depth of 0.3 mm, same as the size of the die, could be formed.

• Journal of IKEEE
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• v.20 no.4
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• pp.416-419
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• 2016

When the integration density and operating frequency increase in the electronic circuits, it is important to improve the signal transmission characteristics. In this paper, the signal transmission characteristics of the printed circuit boards are analyzed with the curvature of the pads. From the simulation results, signal transmission characteristics are improved when pad curvature increases. Pad curvature more effects on signal transmission characteristics when the thickness of the transmission line and the length of the transmission decrease.

• The KSFM Journal of Fluid Machinery
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• v.9 no.5 s.38
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• pp.7-13
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• 2006

In the present study, we develop an analysis module to be applicable to design of sliding thrust bearings. The pressure equation is solved by using the finite element method. Average lubricant temperature is obtained from using the energy balance method. The module developed has been applied to three types of thrust bearing, such as tapered-land thrust bearings of angular and diamond types, and tilting-pad thrust bearings. Effects of the dam of the tapered-lad thrust bearings have also been investigated. It has been seen that the tapered-land thrust bearings of angular type result in the highest load capacity, while the tilting pad thrust bearings result in the lowest lubricant temperature. It has also been seen that the dam in the tapered-land thrust bearings increases both the load capacity and lubricant temperature.