• Transactions on Electrical and Electronic Materials
• /
• 제8권1호
• /
• pp.11-14
• /
• 2007

Consumables used in Chemical Mechanical Polishing (CMP) have been played important role to improve quality and productivity. Since the properties of consumables constantly change with various reasons, such as shelf time, manufactured time, lot to lot variation from supplier and so on, CMP results are not constant during the process. Also, CMP process results are affected by multiple sources from wafer, conditioner, pad and slurry. Therefore, multiple sensing systems are required to monitor CMP process variation. In this paper, the authors focus on development of monitoring system for CMP process which consist of force, temperature and displacement sensor to measure the signal from CMP process. With monitoring systems mentioned above, complex CMP phenomena can be investigated more clearly.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 춘계학술대회 논문집
• /
• pp.792-795
• /
• 2005

The guide-ways of precision machine tools are one of important element of machine tools. It has usually a pair of surfaces for constraint of one direction with bearing. In the case of precision machine tools, non-contact bearing such as hydrostatic bearing and aerostatic bearing is adopted usually. In this case, profiles of rails has effect on straightness and the clearance of bearing has effect on stiffness of guide way, which changes to higher if clearance changes to smaller. The clearance is varied along moving table according to relative distance of pair of rails. The relative distance of pair of rail can be divided by three properties. First and second properties are straightness of each pair of rail and bearing pad. And, third is parallelism about pair of rails and pairs of bearing pad. There are several methods for measuring straightness of each surface such as reversal method, sequential two point method, and way straightness. These straightness measuring methods are always acquiring deviation of profile from eliminating linear fitted inclined line and don't have the information of parallelism. Therefore, to get the small clearance for high stiffness, the straightness of rail and bearing pad and parallelism about pair of rails and pair of bearing pads are measured for correction such as regrinding, reassembling and lapping. In this research, new and easy method for measuring parallelism of pair of rails is suggested. Two displacement probe and sensor stage, which is carry on the displacement sensor, are needed. The simulation and experiment was accomplished about pair of horizontal guide way to confirm the measurement of parallelism. And, the third probe is added to measure the straightness of each rails by sequential two point method. From the estimation of combined these two methods, it is confirmed that the profiles of a pairs of rails can be measured.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
• /
• pp.277-277
• /
• 2011

디스플레이의 기술발전에 의해 대면적 고해상도의 LCD가 제작되어 왔다. 이에 따라 LCD 점등검사를 위한 Probe Unit의 기술 또한 급속도로 발전하고 있다. 고해상도에 따라 TFT LCD pad가 미세피치화 되어가고 있으며, panel의 검사를 위한 Probe 또한 30 um 이하의 초미세피치를 요구하고 있다. 따라서, 초미세 pitch의 LCD panel의 점등검사를 위한 Probe Unit의 개발이 시급하가. 본 연구에서는 30 um 이하의 미세피치의 Probe block을 위한 Slit wafer의 식각 공정 조건을 연구하였다. Si 공정에서 식각율과 식각깊이에 따른 profile angle의 목표를 설정하고, 식각조건에 따라 이 두 값의 변화를 관측하였다. 식각실험으로 Si DRIE 장비를 이용하여, chamber 압력, cycle time, gas flow, Oxygen의 조건에 따라 각각의 단면 및 표면을 SEM 관측을 통해 최적의 식각 조건을 찾고자 하였다. 식각율은 5um/min 이상, profile angle은 $90{\pm}1^{\circ}$의 값을 목표로 하였다. 이 때 최적의 식각조건은 Etching : SF6 400 sccm, 10.4 sec, passivation : C4F8 400 sccm, 4 sec의 조건이었으며, 식각공정의 Coil power는 2,600 W이었다. 이러한 조건의 공정으로 6 inch Si wafer에 공정한 결과 균일한 식각율 및 profile angle 값을 보였으며, oxygen gas를 미량 유입함으로써 식각율이 균일해짐을 알 수 있었다. 결론적으로 최적의 Slit wafer 식각 조건을 확립함으로써 Probe Unit을 위한 Pin 삽입공정 또한 수율 향상이 기대된다.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2009년도 하계학술대회 논문집
• /
• pp.482-483
• /
• 2009

In chemical mechanical planarization (CMP) process, the uniformity of stress acting on wafer surface is a key factor for uniform material removal of thin film especially in the oxide CMP. In this paper, we analyze the stress on the contact region between wafer and pad with finite-element analysis (FEA). The setting pressure acting on wafer back side was $500g/cm^2$ and the retainer pressure was changed from 300 to $700g/cm^2$. The polishing test is also done with the same conditions. The material removal rate profiles well-matched with stress distribution.

• 대한한의학회지
• /
• 제34권1호
• /
• pp.1-14
• /
• 2013

Objectives: This study was designed to investigate the anti-obesity, anti-diabetic and anti-inflammatory effects of Platycodi radix on obese type 2 diabetes mouse model. Methods: Obese type 2 diabetes mouse model was induced by Surwit's high fat, high sucrose diet for 8 weeks. Models were divided into 4 groups of normal diet (ND, n=10), high fat and high sucrose diet (HFD, n=10), high fat and high sucrose diet with Platycodi radix (PR, n=10), and high fat and high sucrose diet with Metformin (Met, n=10). Body weights were measured every week. After 7 weeks fasting, blood sugar and oral glucose tolerance tests were conducted. After 8 weeks blood samples were taken from mouse hearts and analyzed biochemically. Lipid profile, fructosamine, leptin and weight of epididymal fat pad and liver were measured. Adipose tissue macrophage percentage was analyzed by fluorescence-activated cell sorting (FACS). Results: Compared with the HFD group, body weight, glucose level, fructosamine, weight of epididymal fat pad and adipose tissue macrophage percentage decreased in the PR group. Conclusions: These results suggest that Platycodi Radix has anti-obesity, anti-diabetic, and anti-inflammatory effects on obese type 2 diabetes mouse model.

• 한국전산구조공학회논문집
• /
• 제23권4호
• /
• pp.403-407
• /
• 2010

게코 접착 시스템은 보(beam)의 형상을 가지는 seta와 접착패드 역할을 하는 spatula로 구성된다. 본 논문에서는 보 접착 모델(ahhesive beam contact model)을 사용하여 게코(gecko) 접착 시스템의 접착 메커니즘의 해석을 수행한다. 보 접착 모델은 접촉면에서 불균일한 응력 분포를 가지는 특징이 있으며, 접촉면에서의 최대 인장 응력(tensile stress)에 의하여 접착/분리 메커니즘이 결정된다. 접착패드 역할을 하는 spatula는 최대 인장응력을 감소시키는 역할을 하며, 이로 인해 접착력이 증가한다. 역방향 하중에 대해서는 spatula에 의하여 최대 압축 응력(compressive stress)이 감소하며, 이러한 현상에 의하여 접착력과 분리력의 비대칭성이 발생한다. 본 연구에서는 보 접착 모델의 해석을 위해 유한요소법(Finite Element Method)을 사용되며, spatula effect를 위한 해석 결과가 제시된다.

• Journal of Nutrition and Health
• /
• 제40권8호
• /
• pp.675-683
• /
• 2007

This study was conducted to investigate the effects of feeding different carbohydrate sources and garcinia cambogia extract(HCA) on body weight and lipid metabolism. Fifty 10-month-old male Sprague-Dawley rats weighting $635{\pm}6g$ were randomly divided into 5 groups and fed different experimental diets for 4 weeks. The carbohydrate(CHO) sources of each group were cornstarch(control group, 100% of CHO), fructose(F group and FH group, 25% of CHO) and sucrose(S group and SH group, 25% of CHO). FH group and SH group were fed diets containing 1%(W/W) of HCA. Food intake, body weight gain, and calorie efficiency were not significantly different among the groups. Perirenal fat pad weight of FH group was significantly lower than F group, but epididymal fat pad weight was not different among the groups. Fasting glucose level were not significant among the groups. Plasma lipid profile of FH or SH group was slightly lower than F or S group, respectively. The degree of difference of plasma lipid level was greater between F and FH group than those of between S and SH group. In liver, total lipid, triglyceride and total cholesterol level were slightly higher in F group than S group, and tended to be lower in FH group than F group, but tended to be higher in SH group than S group. Liver citrate lyase activity were not significant among the groups. These results suggest that HCA is potential material for reduction of body weight and improvement of plasma lipid profiles. But, there was no difference between fructose intake with HCA and sucrose intake with HCA in reduction of body weight and lipid metabolism.

• 문화기술의 융합
• /
• 제8권5호
• /
• pp.515-524
• /
• 2022

도시철도 침목플로팅궤도(STEDEF)의 분기기는 콘크리트 도상에 매입된 목침목과 침목 하부의 침목방진패드로 구성된 방진궤도로서 침목방진패드의 열화 및 이에 따른 스프링강성의 변화가 침목지지조건의 변화를 초래할 수 있다. 현재 약 21년의 공용기간 동안 발생된 망간크로싱의 손상수량은 전체 부설수량 대비 약 17%로 조사되었으며, 사용 기간 15년 이후(누적통과톤수 약 5.5억톤)부터 손상 물량이 증가하는 것으로 분석되었다. 본 연구에서는 실물 망간크로싱과 차륜의 형상을 모사한 3차원 수치모델을 이용한 매개변수 해석(차륜의 위치, 침목지지조건 및 동적 윤중의 크기)을 수행하여 실제 현장에서 발생된 망간크로싱의 손상유형 및 발생원인을 분석하였다. 연구결과, 노즈부 주변 침목에 뜬침목이 발생된 경우, 설계 궤도충격계수가 적용된 동적윤중 작용 시 노즈부 단면의 발생응력이 항복강도를 초과하였으며, 이는 실제 현장에서 발생된 손상위치와 비교적 잘 일치하는 것으로 분석되었다. 따라서 망간크로싱의 손상을 최소화하기 위해서는 노즈부 주변의 침목지지조건을 일정한 수준으로 유지하고, 손상된 망간크로싱 교체 시에는 침목 하부 경계조건의 균일성 확보를 위해 침목방진패드를 함께 교체하는 것이 바람직할 것으로 분석되었다.

• Journal of Nutrition and Health
• /
• 제39권8호
• /
• pp.733-741
• /
• 2006

The study was conducted to investigate the effects of dietary calcium and soy isoflavone on body fat and lipid metabolism in high fat-induced obesity. Four week old female C57/BL6J mice, known as a good model of diet-induced obesity, were fed low Ca and high fat diet for 6 weeks. After induced obesity, mice were divided into six groups according to diets varying calcium contents (0.1 or 1.5%) and genistein contents (0 or 500 or 1,000 ppm). Body weight, fat pad (perirenal fat and parameterial fat), adipocyte size, serum total lipid and total cholesterol were significantly decreased by both high Ca intake and genistein supplementation. However, the effect of genistein supplementation showed in low Ca-fed groups. Serum LDL-cholesterol and TG were significantly decreased by high Ca intake and genistein supplementation, respectively. In liver, lipogenic enzymes (fatty acid synthase and malic enzyme) activity and TG were significantly decreased by both high Ca intake and genistein supplementation. This inhibitory effect of genistein on lipogenic enzymes showed in low Ca-fed groups. But liver total cholesterol and total lipid were significantly decreased by high Ca intake and genistein supplementation, respectively. Fecal excretion of total lipid, total cholesterol and TG were significantly increased by high Ca intake, not by genistein supplementation. In conclusion, high calcium intake and genistein supplement may be beneficial for suppression of obesity through direct anti-adipogenesis by decreasing fat weight and size and indirect anti-lipo-genesis by inhibiting lipogenic enzymes activity and improving lipid profile.

• 약학회지
• /
• 제36권1호
• /
• pp.17-25
• /
• 1992

The general and some other pharmacological actions of growth hormone without N-terminal methionine(rhGH) were investigated in animals. The hormone had no influences on the central nervous system and on body temperature at a high oral dose of 40 IU/kg in animals. It had neither analgesic nor antiepileptic actions at the high doses. In the isolated ileum and trachea of guinea-pig and isolated stomach fundus and uterus of rat, it showed neither contractive nor relaxing effects at a concentration of $1{\times}10^{-3}\;IU/ml$ in bath, and no inhibitory action at a dose of $1{\times}10^{-3}\;IU/ml$ against the contractions produced by histamine ($5{\times}10^{-5}\;g/ml$), serotonin($1{\times}10^{-5}\;g/ml$), acetylcholine($1{\times}10^{-5}\;g/ml$) and oxytocin($5{\times}10^{-3}\;IU/ml$). Furthermore, the intravenous injection of 20 IU/kg rhGH had no influences on the normal blood pressure and respiration in rabbits. These negative results in pharmacological profile are thought that the hormone may not elicit serious side effects. On the other hand, the rhGH exhibited a weak inhibitory action of glucose tolerance in normal rats, significantly lowered the blood glucose contents in adrenalectomized rats 20 min after i.v. administration of 80 IU/kg, and showed a significant inhibitory effect on in vitro glycerol release in epinephrine-stimulated epididymal fat pad segments of rats.