• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.118-118
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• 2009

Low temperature co-fired ceramic (LTCC) is one of promising materials for MEMS structures because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of 400 um were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of $Pb(ZrTi)O_3$ (PZT) thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The results showed that the fabrication method is very suitable for pressure sensor applications. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

• 소음진동
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• 제8권6호
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• pp.1093-1102
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• 1998

The success of controllability of smart structures depends on the quality of the bonding along the interface between the main structure and the attached sensing and acuating elements. Generally, the analysis procedures neglect the effect of the interfacial bond layer or assume that this bond layer behaves like viscoelastic material. Three different bond layers. two modified epoxy adhesives, and one isocyanate adhesive were prepared for their toughness and moduli. Bond layer of the chosen adhesive provides an almost perfect bonding condition between the composite structure and the PZT while bended significantly like arrow-shape. The perfect bonding condition is tested by considering various material properties of the bond layers. and based on this perfect bonding condition, the effects of the interfacial bond layer on the dynamic behavior and controllability of the test structure is experimentally studied. Once the perfect bonding condition is achieved. dynamic effects of the bond layer itself on the dynamic characteristics of the main structure is negligible. but the contribution of the attached PZT elements on the stiffness of the multi-layered structure becomes significant when the thickness of the bond layer increased.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.204-204
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• 2010

A development of device with reduced size and improved sensitivity is highly impotant Pb(Zr,Ti)$O_3$ thin films are widely used both to make actuator and sensor due to their high sensitivity and low cost. In this study, the feasibility of a piezoelectric presssure sensors based on hybrid low-temperaute co-fired ceramic (LTCC) technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 4 green tapes which consist of alumina and glass particle in an organic binder. PZT thin films were successfully prepared on between top and bottom Au electrode with LTCC substrates using RF magnetron sputtering. In addition, The frequency response characteristics of the sensor under varing pressure has been analysed. by Network Analyser (HP-8722D). A frequency shift range has been obseved from 1.7GHz to 1.8GHz with a good linearity for applied pressure from 0 psi up to 25 psi.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2003년도 하계종합학술대회 논문집 II
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• pp.1121-1124
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• 2003

PZT(30/70) thick film was fabricated by using 1,3 propanediol-based sol-gel method. Prepared film of pyroelectric property was investigated by Dynamic method of modulation frequency dependence. Pyroelectric coefficient was obtained about 5.0$\times$10$^{-8}$ C/$\textrm{cm}^2$.K. The figure of merits for voltage responsivity and specific detectivity were 3.4$\times$10$^{-11}$ C.cm/J and 5.9$\times$10$^{-9}$ C.cm/J, respectively, because of relative high-dielectric constant and high-pyroelectric coefficient. Voltage responsivity was increased at low modulation frequency and it was decreased at high modulation frequency. Voltage responsivity was maximum 1.84 V/W at 10 Hz. As Johnson noise is dominant, Noise voltage was increased nearly proportional to f$^{-1}$ 2/. Noise equivalent power and specific detectivity were 2.83$\times$10$^{-7}$ W/Hz$^{1}$2/ and 3.13$\times$10$^{5}$ cm.Hz$^{1}$2//W the same frequency at 80 Hz, respectively.

• 한국분말재료학회지
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• 제17권5호
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• pp.404-408
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• 2010

The effects of high energy ball-milling (HEBM) on the sintering behavior and piezoelectric properties of 0.1 wt% $Li_2CO_3$ doped 0.8Pb($Mg_{1/3}Nb_{2/3}$)$O_3$-0.2Pb($Zr_{0.475}Ti_{0.525}$)$O_3$ (PMN-PZT) ceramics were investigated. It was found that HEBM treatment was quite effective to reduce the average particle size down to 300 nm, leading to increased density as well as enhanced piezoelectric properties of a sintered specimen even though prolonged HEBM resulted in unwanted secondary phases that caused a degradation of piezoelectric properties. The dielectric constant ($\varepsilon_r$), piezoelectric coupling factor ($k_p$) and piezoelectric constant $d_{33}$ of 0.1 wt% $Li_2CO_3$ doped PMN-PZT ceramics prepared via HEBM for 10 h reached 2040, 0.68 and 554 pC/N, respectively.

• 한국구조물진단유지관리공학회 논문집
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• 제15권4호
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• pp.185-192
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• 2011

CFRP 보강공법은 구조물에 내하력을 증가시키기 위해 사용되고 있는데 실제 교량에 적합하고 연구 활용성이 좋다. 하지만, CFRP로 보강된 콘크리트 보에서 휨파괴와 전단파괴 뿐만 아니라 부착파괴 또한 추가적으로 발생하게 된다. 이러한 CFRP 부착파괴는 취성파괴를 유발하게 된다. 따라서 이러한 CFRP로 보강된 콘크리트보 박리에 대한 모니터링은 매우 중요한 의미를 갖는다. 본 논문에서는 국부적인 손상 파악에 유리한 PZT센서를 이용한 임피던스 기반 손상검색 방법을 사용하여 CFRP로 보강된 콘크리트보에서 박리 모니터링에 대한 적용가능성을 검증해 보았다.

• 한국음향학회지
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• 제21권7호
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• pp.614-623
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• 2002

본 논문에서는 전력설비의 열화로 발생되는 부분방전 음압 검출을 위해 간섭계형 광섬유 센서를 제작하고 방전 음압을 측정하였다. 광섬유 센서는 아크릴과 알루미늄에 광섬유를 수회 감은 맨드릴형으로 선택하였으며, 간섭계는 Sagnac간섭계 및 Mach-Zehnder 간섭계를 선택하여 실험하였다. 피에조 (PZT)를 이용하여 구성된 광섬유 간섭계의 적합성을 확인하였다. 방전 음압 발생장치는 절연유 내에 방전 모의셀을 설치하여 방전 음압을 발생시키고, 광섬유 센서로 방전신호를 검출하였다. 실험결과 Sagnac 간섭계가 Mach-Zehnder간섭계보다 방전 음압을 보다 안정적으로 검출함을 확인하였으며, Sagnac 간섭계 센서가 방전 음압 검출에 적합함을 확인하였다.

• ETRI Journal
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• 제31권6호
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• pp.688-694
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• 2009

In this paper, we present the results of a preliminary study on the piezoelectric energy harvesting performance of a Zr-doped $PbMg_{1/3}Nb_{2/3}O_3-PbTiO_3$ (PMN-PZT) single crystal beam. A novel piezoelectric beam cantilever structure is used to demonstrate the feasibility of generating AC voltage during a state of vibration. The energy-harvesting capability of a PMN-PZT beam is calculated and tested. The frequency response of the cantilever device shows that the first mode resonance frequency of the excitation model exists in the neighborhood of several hundreds of hertz, which is similar to the calculated value. These tests show that several significantly open AC voltages and sub-mW power are achieved. To test the possibility of a small scale power source for a ubiquitous sensor network service, energy conversion and the testing of storage experiment are also carried out.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 추계학술대회논문집
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• pp.744-749
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• 2005

In this paper, a lens actuator for mobile devices is proposed using stack type piezoelectric materials. In general, the deformation of PZT actuators is not enough for lens motion when the allowed voltage is applied. The small stroke problem can be solved by accumulating a lot of small displacements in high frequency. In this paper, a new inch-worm type model for focusing actuator is suggested based on the interaction of inertial and frictional forces. Theoretical analysis and simulation using ANSYS are performed to verify the feasibility of the inch-worm PZT actuator model. Various types of clamps are considered to determine the effect of frictional force on the motion, and appropriate clamp-actuator models are proposed. The proposed models are experimentally verified and the experimental results show high correspondence with theoretical and simulated values. The inch-worm type focusing actuator enable a large stroke with 7.79 mm/sec with 10kHz and 10V.

• Smart Structures and Systems
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• 제19권4호
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• pp.341-350
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• 2017

Based on the super elastic properties of the shape memory alloy (SMA) and the inverse piezoelectric effect of piezoelectric (PZT) ceramics, a kind of hybrid semi-active control device was designed and made, its mechanical properties test was done under different frequency and different voltage. The local search ability of genetic algorithm is poor, which would fall into the defect of prematurity easily. A kind of adaptive immune memory cloning algorithm(AIMCA) was proposed based on the simulation of clone selection and immune memory process. It can adjust the mutation probability and clone scale adaptively through the way of introducing memory cell and antibody incentive degrees. And performance indicator based on the modal controllable degree was taken as antigen-antibody affinity function, the optimization analysis of damper layout in a space truss structure was done. The structural seismic response was analyzed by applying the neural network prediction model and T-S fuzzy logic. Results show that SMA and PZT friction composite damper has a good energy dissipation capacity and stable performance, the bigger voltage, the better energy dissipation ability. Compared with genetic algorithm, the adaptive immune memory clone algorithm overcomes the problem of prematurity effectively. Besides, it has stronger global searching ability, better population diversity and faster convergence speed, makes the damper has a better arrangement position in structural dampers optimization leading to the better damping effect.