• 한국전기전자재료학회논문지
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• 제19권12호
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• pp.1118-1122
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• 2006

In this study, in order to develop the low temperature sintering multilayer piezoelectric actuator, PMN-PNN-PZT system ceramics were manufactured and their microstructure, ferroelectric and piezoelectric properties were investigated. By increasing sintering temperature, remanent polarization$(P_r)$ was increased due to the increase of sinterability and grain size. However, coercive $field(E_c)$ showed an opposite tendency to remanent polarization owing to the feasibility of domain wall motion. At the sintering temperature of $900^{\circ}C$, dielectric $constant({\varepsilon}_r)$, electromechanical coupling $factor(k_p)$, piezoelectric $constant(d_{33})$ and mechanical quality $factor(Q_m)$ showed the optimal value of 1095, 0.60, 363 and 1055, respectively, for multilayer piezoelectric actuator application.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1207-1210
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• 2003

This paper deals with experiments for dynamic characteristics and performance evaluation of the 3-axis fine positioning stage developed in [1]. The features of the developed fine positioning stage are the long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design. The dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the actuator and the stage design. Performance evaluation is also made for the PZT actuators as well as the stage positioning accuracy. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2001년도 추계학술대회논문집 I
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• pp.459-464
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• 2001

Vibration control of a plate using an optical fiber sensor and a PZT actuator is considered in this study. An aluminum plate with attached Extrinsic Fabry-Perot Interferometer (EFPI) and PZT actuator is prepared for experimental investigation. Vibration level of EFPI that can represent the mechanical strain without severe distortion is validated by forced vibration experiment. A numerical model of the plate is constructed based on the experimentally obtained frequency responses, and an optimal controller is designed for the multi-modal vibration suppression. It is found that the vibration level of the first three modes can be greatly reduced. The effect of low-pass filtering used to eliminate high frequency noise on the stability and control performance is also considered.

• 한국생산제조학회지
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• 제21권3호
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• pp.465-472
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• 2012

This paper describes a new robust control algorithm which can be used to enhance the positioning performance of an ultra-precision positioning system. The working table is supported by flexure hinges and moved by a piezoelectric actuator, whose position is measured by an ultra-precise linear encoder. The system dynamics is very complicated because the movement of the table is governed by both the mechanical characteristics and those of the PZT actuator. So that, the dynamics of the stage was modeled roughly in this paper, and the overall system was formularized to solve the small gain problem. A series of experiments was conducted in order to verify the usefulness of the proposed algorithm. From the experimental results, the positioning performance such as the accuracy, the rise time and the hysteresis nonlinearity were greatly improved.

• 동력기계공학회지
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• 제18권2호
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• pp.31-36
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• 2014

In this paper, pneumatic valve which consists of valve body, valve controller, nozzle and a multi-bender PZT actuator was suggested and fabricated. The fabricated pneumatic valve was experimented for performance evaluation. From the experimental results, we know that the flow rate of the suggested valve is 23 lpm at the pressure difference of 1bar and the maximum flow rate is 30 lpm at the pressure difference of 4 bar. The flow rates after endurance test of 9.8 million were 22.57 lpm and 28.62 lpm at the pressure difference of 1bar and 4bar, respectably. Finally, it was verified that the B10 life of the suggested pneumatic valve is over 50 million.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1999년도 춘계학술대회 논문집
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• pp.51-55
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• 1999

Recently, manufacturing work has been transformed to advanced technology intensive form from mass production with a little items required in the past. It was demanded that superior workpiece surface integrity. However, the study of ductile mode machining was proceeded actively.In this paper, it is developed Ultra-Micro Indentation Device using the PZT actuator. Experimentally, by using theUltra-Micro Indentation device, the micro fracture behavior of the silicon wafer was invesgated. It was possible that ductile-brittle transition point in ultimate surface of brittle material can be detected by adding an acoustic emission sensor system to the Ultra-Micro Indentation apparatus.

• 한국자동차공학회논문집
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• 제2권3호
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• pp.33-39
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• 1994

The purpose of this research is to examine precise linear motion and rotary motion. A six-degrees-of-freedom fine motion mechanism is introduced to drive an object precisely in directions of X, Y and Z-axes and around them : three rectangular linear motion and rotary ones. An experimental mechanism is introduced in which a $70$\times$70$\times$70$\times$(${mm}^3$) cube object is driven by six PZT actuator. The study is to establish the six-degrees-of-freedom fine motion mechanism of linear motion and rotary motion using PZT actuator.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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• pp.33-34
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• 2005

In this study, in odor to develop low temperature sintering multilayer piezoelectric actuator and ultrasonic vibrator, PMN-PNN-PZT ceramics were fabricated using $Li_2CO_3$ and $Na_2CO_3$ as sintering aids and their piezoelectric and dielectric characteristics were investigated according to the addition of dopant CuO and $Fe_2O_3$, respectively. The CuO added PMN-PNN-PZT ceramics improved mechanical quality factor Qm due to the acceptor doping effect. And also, $Fe_2O_3$ reacted as softner in this composition system in addition to the increase of grain size and sinterability. Taking into consideration electromechanical coupling factor kp of 0.62, dielectric constant $\varepsilon_r$, of 1275, Piezoelectric $d_{33}$ constant of 377[pC/N] and mechanical quality factor Qm of 975, it was concluded that the ceramics with the $Fe_2O_3$, added composition sintered at 900[$^{\circ}C$] were best for the multilayer piezoelectric actuator and ultrasonic vibrator application.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.66-67
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• 2005

In this study, in order to develop multilayer piezoelectric actuator, PMN-PNN-PZT ceramics were fabricated using $Li_2CO_3-Na_2CO_3$ as sintering aids and their piezoelectric and dielectric characteristics were investigated with the function of PNN substitution. With increasing PNN substitution, dielectric constant(${\varepsilon}r$), electromechanical coupling factor(kp), and piezoelectric d constant($d_{33}$) were increased at 10~12[mol%] PNN substitution and then decreased at all sintering temperature. With increasing PNN substitution, phase changed from tetragonal to rhombohedral at [10~12mol%] PNN substitution. At the 12[mol%] PNN substituted PMN-PZT composition ceramic sintered at 950[$^{\circ}C$], density, ${\varepsilon}r$, kp, $d_{33}$ and Qm showed the optimum value of 7.79[$g/cm^3$], 1160, 0.599, 419[pC/N) and 894, respectively for multilayer piezoelectric actuator application.

• 한국정밀공학회지
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• 제21권5호
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• pp.73-82
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• 2004

This paper presents the study on damage diagnosis of an intelligent cantilevered beams using PZT actuator and PVDF sensor This study provides the theoretical and experimental verification to examine structural damage. Time domain analysis for the non-destructive detection of damage is presented by parameterized partial differential equations and Galerkin approximation techniques. The time histories of the vibration response of structure were used to identify the presence of damage. Furthermore, this systematic approach permits one to use the piezomaterials to both excite and sense the vibration of structures. We also carried out the experimental verification about reliability of theoretical methods fur detecting the damage of a composite beam with PZT actuator and PVDF sensor. Experimental results are presented from tests on cantilevered composite beams which is damaged at different location and different dimensions. The results were compared with the simulation results. Good agreement between the results was found for the time shifts and amplitude difference in transients response of the cantilevered beam.