• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.21 no.6
• /
• pp.524-529
• /
• 2008

In this paper, in order to develop low loss multilayer actuator, piezoelectric properties of PZW-PMN-PZT multilayer actuator sintered at $900^{\circ}C$ low temperature were investigated according to the number of multilayer. The multilayer actuator was fabricated using tape casting method and used pure Ag internal electrode. The density above $8.0\;g/cm^3$ was obtained at all specimens. With increasing number of multilayer, effective electromechanical coupling factor($k_{eff}$) was increased. $k_{eff}$ of multilayer actuator shows the maximum value of 0.283 at 11 layers actuator. However, effective mechanical quality factor(Qm') was decreased according to the increase of number of multilayer. The Qm' of multilayer actuator showed the maximum value of 920 at 5 layers actuator.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.31 no.8
• /
• pp.880-888
• /
• 2007

This article describes the load capability of bending piezoelectric actuators with a thin sandwiched PZT plate in association with the stored elastic energy induced by an increased dome height after a curing process. The stored elastic energy within the actuators is obtained via a flexural mechanical bending test. The load capability is evaluated indirectly in terms of an actuating displacement with a load of mass at simply supported and fixed-free boundary conditions. Additionally, a free displacement under no load of mass is measured for a comparison with an actuating displacement. The results reveal that an actuator with a top layer having a high elastic modulus and a low coefficient of thermal expansion exhibits a better performance than the rest of actuators in terms of free displacement as well as actuating displacement due to the formation of the large stored elastic energy within the actuator system. When actuators are excited at AC voltage, the actuating displacement is rather higher than the free displacement for the same actuating conditions. In addition, the effect of PZT ceramic softening results in a slight reduction in the resonance frequency of each actuator as the applied electric field increases. It is thus suggested that the static and dynamic actuating characteristics of bending piezoelectric composite actuators with a thin sandwiched PZT plate should be simultaneously considered in controlling the performance.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.5 no.1
• /
• pp.45-50
• /
• 2006

This paper shows a new precision actuator of MUTM(miniature universal testing machine) for the testing of compression and tensile load on the MEMS materials and structures. The MUTM consists of a sample holder, an ultraprecision precision actuator(tranlation stage) and load sensor. The precision actuator has been developed for generating displacements with nanometer accuracy and a dynamic range of 1mm simultaneously. In this paper, it can be made by using the displacement property of bi-morph type PZT, which is able to extend the long range(stroke) according to cantilever size. However, it is not enough to be generated for compression and tensile load in miniature universal testing machine. Therefore, three dozen bi-morph type PZTs are used for generating the load. The load and displacement of the precision actuator are 35g and 0.4mm respectively.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 1996.04a
• /
• pp.130-135
• /
• 1996

This paper presents a proof-concept investigation on the active vibration control of two hybrid smart structures (HSSs). The first one is consisting of a piezoelectric film (PF) actuator and an electro-rheological fluid(ERF) actuator, and the other is featured by a piezoceramic (PZT) actuator and a shape memory alloy (SMA) actuator. For the PF/ERF hybrid smart structure, both the increment of the damping ratios and the suppression of the tip deflections are evaluated in order to demonstrate control effectiveness of the PF actuator and ERF actuator and the hybrid actuation. For the PZT/SMA hybrid smart structure, the PZT actuator takes account of the high frequency excitation, while the SMA actuator exerts large vibration control force. The experimental results exhibit superior abilities of the hybrid actuation systems to tailor elastodynamic responses of the HSS rather than a single class of actuation system alone.

• Proceedings of the KSME Conference
• /
• 2007.05a
• /
• pp.979-984
• /
• 2007

This paper presents a new control mechanism for the proportional pressure control which is accomplished by electro-pneumatic regulator using two PZT actuators. The electro-pneumatic regulator of this study is 2-stage type and consists of two piezoelectric actuators, a controller and a main poppet valve. The piezoelectric actuators are multilayer bender type and are controlled by digital signal. Proportional pressure control technique is very important because that can derive improvement of product quality and driving ability in the pneumatic system. Solenoid actuator method for pressure control is widely used but this actuator has a high power consumption characteristics. So new actuator is required for the energy saving. In this study, PZT actuator for the pressure control was fabricated and experimented instead of the conventional type solenoid actuator. Experiments for the new control mechanism of the elector-pneumatic regulator were operated under the input condition of 0.4[MPa] and it was confirmed that this mechanism has a good control characteristics to the response sensitivity and hysteresis.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2007.05a
• /
• pp.1131-1136
• /
• 2007

This paper presents an active vibration control of a 1-DOF system using hybrid mount which consists of elastic rubber and PZT(piezostack) actuator and elastic rubber and electromagnetic actuator, respectively After identifying stiffness, damping properties of the elastic rubber, PZT actuator and electromagnetic element, a mathematical model of the hybrid mount is established. The mount model is then incorporated into the 1-DOF system and the governing equation of motion is obtained in a state space. A sliding mode controller is designed in order to actively attenuate the vibration of the system. Control responses such as acceleration and transmitted force of the 1-DOF system are experimentally evaluated and presented in time and frequency domains.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2008.06a
• /
• pp.801-802
• /
• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2007.06a
• /
• pp.743-744
• /
• 2007

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2009.10a
• /
• pp.292-298
• /
• 2009

This paper investigates the control performance of the proposed hybrid mount system for vibration isolation table. The hybrid mount system consists of an air spring as a passive device and a PZT stack actuator as an active device in series. The feasibility of the PZT stack actuator as an active actuator was examined through the simple experiments. After that, a series of numerical simulations were carried out to evaluate the control performance of the proposed hybrid mount system. The equations of motion of the table with a set of hybrid mount systems consisting of four devices are derived. The air spring is considered as a 1 spring and 1 dashpot elements, and PID control algorithm is adopted to estimate the control force. The results of the numerical simulations presents that the proposed hybrid mount system could be the promising control system for vibration isolation table.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 2002.10a
• /
• pp.214-218
• /
• 2002

In recent years, precision positioning stage is demanded for some industrial fields such as semi-conductor lithography, ultra precision machining, and fabricating of nano structure. In this research, precision multi-axis positioning stage, which consists of pzt actuator, flexure, and capacitance gauge, is designed and developed. The performance of 3-axis positioning, characteristics of motion and resolution are verified.