• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.301-306
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• 2004

In this study, Dual servo mechanism with VCM(Voice Coil Motor) and PZT is designed for a high precision force and position control. We designed the VCM actuator and dual servo mechanism with leaf spring. VCM actuators, with their high linearity, simple structure, low weight, and high efficiency, are increasingly being used in micro-positioning applications. There are many kinds of VCM with a structure. VCM actuators are divided into two types by moving parts. One is moving magnet type and the other moving coil type. We described the properties of these two types of VCM. Design parameters of VCM are defined through the FEM simulation analysis of magnetic field and dynamic model of dual servo mechanism. These researches help to for decreasing loss in the air gap of VCM. We present dual servo mechanism is effective mechanism for a force control in hi h precision, properties of designed VCM.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.185-185
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• 2009

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. Using the flexural vibration mode of PZT bar, a piezopump is successfully made. The PZT bar is polarized with thickness direction. The proposed structure for the piezo-pump consists of an input and an output port, piezoelectric ceramic actuator, actuator support, diaphragm. The traveling flexural wave along the bar is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. Fluid is drawn into a forming chamber, eventually the forming chamber closes trapping the fluid therein. The finite elements analysis on the proposed pump model is carried out to verify its operation principle and design by the commercial FEM software. Components of piezopump were made, assembled, and tested to validate the concepts of the proposed pump and confirm the simulation results. The performance of the proposed piezopump the highest pressure level of 83.4kHz.

• Journal of Advanced Marine Engineering and Technology
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• v.35 no.3
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• pp.309-316
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• 2011

This paper deals with the experimental study of the vibration suppression of the smart structures. First, a new high-speed active control system is presented using the DSP320C6713 microprocessor. A peripheral system developed is composed of a data acquisition system, A/D and D/A converters, piezoelectric (PZT) actuator/sensors, and drivers using PA 95 for fast data processing. Next, the processing time of the peripheral device is tested and the corresponding test results are provided. Since fast data processing is very important in the active vibration control of the structures, achieving the fast loop times of the control system is focused. The control algorithm using PPF in addition to FIR filter is implemented. Finally, numerous experiments were carried out on the aluminum plate to validate the superior performance of the vibration control system at different control loop times.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.1
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• pp.8-16
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• 2006

The communication through optical fiber is taking an important role of the expansion of communication network with excellent transmitting rate and quality. As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement of the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.3
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• pp.537-543
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• 2002

This paper examines a new in-process measurement system for the measurement of micro-defects on the surfaces of brittle materials by using the AFM (Atomic Force Microscopy). A new AFM scanning stage that can also perform nano-scale bending of the sample was developed by adding a bending unit to a commercially available AFM scanner. The bending unit consists of a PZT actuator and sample holder, and can perform static and cyclic three-point bending. The true bending displacement of the bending unit is approximately 1.8mm when 80 volts are applied to the PZT actuator. The frequency response of the bending unit and the stress on the sample were also analyzed, both theoretically and experimentally. Potential surface defects of the sample were successfully detected by this measurement system. It was confirmed that the number of micro-defects on a scratched surface increases when the surface is subjected to a cyclic bending load.

• Transactions on Electrical and Electronic Materials
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• v.9 no.3
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• pp.91-95
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• 2008

In this study, in order to develop the composition ceramics for low loss multilayer piezoelectric actuator application, $Pb(Zn_{1/2}W_{1/2})O_3-Pb(Mn_{1/3}Nb_{2/3})O_3-Pb(Zr,Ti)O_3$ (abbreviated as PZW-PMN-PZT)ceramics according to the amount of $MnO_2$ addition were fabricated using two-stage calcinations method. And also, their dielectric and piezoelectric properties were investigated. At the 0.2 wt% $MnO_2$ added PZW-PMN-PZT ceramics sintered at $930^{\circ}C$, density, electromechanical coupling factor $k_p$, dielectric constant ${\varepsilon}_r$, piezoelectric $d_{33}$ constant and mechanical quality factor $Q_m$ showed the optimum value of $7.84g/cm^3$, 0.543, 1,392, 318.7 pC/N, 1,536, respectively for low loss multilayer ceramics actuator application.

• Journal of Advanced Marine Engineering and Technology
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• v.33 no.6
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• pp.918-924
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• 2009

This paper deals with the experimental assessment of the vibration suppression of the smart structures. First, we have presented the paper about the new high-speed active control system that we have developed using the DSP320C6713 microprocessor and a peripheral system composed of a data acquisition system, A/D and D/A converters, piezoelectric (PZT) actuator/sensors, and drivers using PA95. Since fast data processing is very important in the active vibration control of the structures, we utilized the fast processing DSP320C6713 microprocessor as a main processor to the controller and fast peripheral devices for fast control loop. To realize a fast active vibration control, we have analyzed and tested the processing time of the peripheral devices and provided the corresponding test results. Especially, we have focused on achieving the fast signal amplification of the PA95 device since it takes most of loop times of the control system. Finally, we performed numerous experiments of active vibration control of the aluminum plate to validate the superior performance of the developed control system based on previous mode tests of the plate.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.81-86
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• 2005

As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement to the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.3
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• pp.419-425
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• 2010

To machine the micro hole, laser machining system is widely used, however, the system cannot fabricate the micro hole with high aspect ratio and good surface finish. To break the obstacles, the high frequency vibration mechanism with PZT (Piezoelectric Transducers) is proposed in this paper. The mechanism will vibrate the laser beam in vertical direction so that the aspect ratio and surface finish may be higher than the conventional. The mechanism vibrates the eyepiece of laser optics. In addition to the benefits, the mechanism enables us to have high precision and flexibility. It decreases burr and debris during machining. And it is able to machine various materials of workpiece. This research include high frequency and large travel range of the proposed mechanism. The PZT motion of mechanism and analysis on the sensitivity of design parameters are extracted from a finite element method (FEM) simulation. In the analysis, the target vibration mode without parasitic motion is designated to have the target frequency and high amplitude.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2000.04a
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• pp.135-138
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• 2000

본 논문에서는 열팽창계수(CTE)가 거의 없는 카본게폭시, PZT 세라믹 박판, 그리고 열팽창계수가 큰 글래스/에폭시 층으로 이루어진 곡면형 복합재료 작동기(LIPCA)의 설계, 제작 및 성능실험에 대한 연구성과를 제시하고 있다. LIPCA의 른 요점은 기존 THUNDER의 성능을 유지하면서 이를 경량화 하기 위하여 THUNDER의 금속 층을 상대적으로 가벼운 섬유 강화 복합재료로 대체하는 것이다. 이러한 경량화 작업으로 LIPCA는 기존 THUNDER 보다 약 30~40% 정도의 무게를 감소시킬 수 있으며, 복합재료의 특성에 따라 설계의 유연성을 가질 수 있는 장점이 있다. 또한, 에폭시 수지를 사용함으로써 접착제 없이 평판 몰드에서 오토클레이브에서 177$^{\circ}C$로 경화되어, 탈형된 후 충분한 곡률을 형성하였다. 작동 성능 실험에서, LIPCA는 기존 THUNDER보다 작동변위가 향상됨을 보였다.